1/26/2011	2:45:02 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
1/26/2011	2:45:03 AM	Recipe started at 2:45 AM
1/26/2011	2:45:03 AM	H2 valve closed
1/26/2011	2:45:03 AM	BCl3 valve closed
1/26/2011	2:45:03 AM	PH3 valve closed
1/26/2011	2:45:03 AM	SiCl4 pre valve closed
1/26/2011	2:45:03 AM	SiCl4 post valve closed
1/26/2011	2:45:03 AM	Main Vac valve closed
1/26/2011	2:45:03 AM	Bypass valve closed
1/26/2011	2:45:03 AM	Bubbler valve closed
1/26/2011	2:45:03 AM	Helium valve opened
1/26/2011	2:45:03 AM	Helium MFC set to  500.000000
1/26/2011	2:45:03 AM	H2 MFC set to  0.000000
1/26/2011	2:45:03 AM	BCl3 MFC set to  0.000000
1/26/2011	2:45:03 AM	PHl3 MFC set to  0.000000
1/26/2011	2:45:03 AM	SiCl4 MFC set to  0.000000
1/26/2011	2:45:03 AM	Bypass solenoid MFC set to  0.000000
1/26/2011	2:45:03 AM	Tube furnace set to 0
1/26/2011	2:46:18 AM	Helium valve closed
1/26/2011	2:46:18 AM	H2 valve closed
1/26/2011	2:46:18 AM	BCl3 valve closed
1/26/2011	2:46:18 AM	PH3 valve closed
1/26/2011	2:46:18 AM	SiCl4 pre valve closed
1/26/2011	2:46:18 AM	SiCl4 post valve closed
1/26/2011	2:46:18 AM	Main Vac valve closed
1/26/2011	2:46:18 AM	Bypass valve closed
1/26/2011	2:46:18 AM	Bubbler valve closed
1/26/2011	2:46:18 AM	Helium MFC set to  0.000000
1/26/2011	2:46:18 AM	H2 MFC set to  0.000000
1/26/2011	2:46:18 AM	BCl3 MFC set to  0.000000
1/26/2011	2:46:18 AM	PHl3 MFC set to  0.000000
1/26/2011	2:46:18 AM	SiCl4 MFC set to  0.000000
1/26/2011	2:46:18 AM	Bypass solenoid MFC set to  0.000000
1/26/2011	2:46:18 AM	Tube furnace set to 0
1/26/2011	2:46:18 AM	Run finished at 2:46 AM
1/26/2011	2:46:18 AM	Completed task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
1/26/2011	2:56:00 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
1/26/2011	2:56:00 AM	Recipe started at 2:56 AM
1/26/2011	2:56:01 AM	Helium valve closed
1/26/2011	2:56:01 AM	H2 valve closed
1/26/2011	2:56:01 AM	BCl3 valve closed
1/26/2011	2:56:01 AM	PH3 valve closed
1/26/2011	2:56:01 AM	SiCl4 pre valve closed
1/26/2011	2:56:01 AM	SiCl4 post valve closed
1/26/2011	2:56:01 AM	Main Vac valve closed
1/26/2011	2:56:01 AM	Bubbler valve closed
1/26/2011	2:56:01 AM	Bypass valve opened
1/26/2011	2:56:01 AM	Helium MFC set to  0.000000
1/26/2011	2:56:01 AM	H2 MFC set to  0.000000
1/26/2011	2:56:01 AM	BCl3 MFC set to  0.000000
1/26/2011	2:56:01 AM	PHl3 MFC set to  0.000000
1/26/2011	2:56:01 AM	SiCl4 MFC set to  0.000000
1/26/2011	2:56:01 AM	Bypass solenoid MFC set to  0.000000
1/26/2011	2:56:01 AM	Tube furnace set to 0
1/26/2011	2:56:35 AM	Helium valve closed
1/26/2011	2:56:35 AM	H2 valve closed
1/26/2011	2:56:35 AM	BCl3 valve closed
1/26/2011	2:56:35 AM	PH3 valve closed
1/26/2011	2:56:35 AM	SiCl4 pre valve closed
1/26/2011	2:56:35 AM	SiCl4 post valve closed
1/26/2011	2:56:35 AM	Bubbler valve closed
1/26/2011	2:56:35 AM	Main Vac valve opened
1/26/2011	2:56:35 AM	Bypass valve opened
1/26/2011	2:56:35 AM	Helium MFC set to  0.000000
1/26/2011	2:56:35 AM	H2 MFC set to  0.000000
1/26/2011	2:56:35 AM	BCl3 MFC set to  0.000000
1/26/2011	2:56:35 AM	PHl3 MFC set to  0.000000
1/26/2011	2:56:35 AM	SiCl4 MFC set to  0.000000
1/26/2011	2:56:35 AM	Bypass solenoid MFC set to  0.000000
1/26/2011	2:56:35 AM	Tube furnace set to 0
1/26/2011	2:56:35 AM	Run finished at 2:56 AM
1/26/2011	2:56:35 AM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
1/26/2011	2:57:10 AM	Tube furnace set to 100
1/26/2011	2:58:34 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\10x_he_purgepump.xml
1/26/2011	2:58:47 AM	Recipe started at 2:58 AM
1/26/2011	2:58:47 AM	Helium valve closed
1/26/2011	2:58:47 AM	H2 valve closed
1/26/2011	2:58:47 AM	BCl3 valve closed
1/26/2011	2:58:47 AM	PH3 valve closed
1/26/2011	2:58:47 AM	SiCl4 pre valve closed
1/26/2011	2:58:47 AM	SiCl4 post valve closed
1/26/2011	2:58:47 AM	Main Vac valve closed
1/26/2011	2:58:47 AM	Bubbler valve closed
1/26/2011	2:58:47 AM	Bypass valve opened
1/26/2011	2:58:47 AM	Helium MFC set to  0.000000
1/26/2011	2:58:47 AM	H2 MFC set to  0.000000
1/26/2011	2:58:47 AM	BCl3 MFC set to  0.000000
1/26/2011	2:58:47 AM	PHl3 MFC set to  0.000000
1/26/2011	2:58:47 AM	SiCl4 MFC set to  0.000000
1/26/2011	2:58:47 AM	Bypass solenoid MFC set to  0.000000
1/26/2011	2:58:47 AM	Tube furnace set to 0
1/26/2011	2:58:47 AM	Helium valve closed
1/26/2011	2:58:47 AM	H2 valve closed
1/26/2011	2:58:47 AM	BCl3 valve closed
1/26/2011	2:58:47 AM	PH3 valve closed
1/26/2011	2:58:47 AM	SiCl4 pre valve closed
1/26/2011	2:58:47 AM	SiCl4 post valve closed
1/26/2011	2:58:47 AM	Bubbler valve closed
1/26/2011	2:58:47 AM	Main Vac valve opened
1/26/2011	2:58:47 AM	Bypass valve opened
1/26/2011	2:58:47 AM	Helium MFC set to  0.000000
1/26/2011	2:58:47 AM	H2 MFC set to  0.000000
1/26/2011	2:58:47 AM	BCl3 MFC set to  0.000000
1/26/2011	2:58:47 AM	PHl3 MFC set to  0.000000
1/26/2011	2:58:47 AM	SiCl4 MFC set to  0.000000
1/26/2011	2:58:47 AM	Bypass solenoid MFC set to  0.000000
1/26/2011	2:58:48 AM	Tube furnace set to 0
1/26/2011	2:59:48 AM	H2 valve closed
1/26/2011	2:59:48 AM	BCl3 valve closed
1/26/2011	2:59:48 AM	PH3 valve closed
1/26/2011	2:59:48 AM	SiCl4 pre valve closed
1/26/2011	2:59:48 AM	SiCl4 post valve closed
1/26/2011	2:59:48 AM	Bubbler valve closed
1/26/2011	2:59:48 AM	Helium valve opened
1/26/2011	2:59:48 AM	Main Vac valve opened
1/26/2011	2:59:48 AM	Bypass valve opened
1/26/2011	2:59:48 AM	Helium MFC set to  100.000000
1/26/2011	2:59:48 AM	H2 MFC set to  0.000000
1/26/2011	2:59:48 AM	BCl3 MFC set to  0.000000
1/26/2011	2:59:48 AM	PHl3 MFC set to  0.000000
1/26/2011	2:59:48 AM	SiCl4 MFC set to  0.000000
1/26/2011	2:59:48 AM	Bypass solenoid MFC set to  0.000000
1/26/2011	2:59:48 AM	Tube furnace set to 0
1/26/2011	3:00:48 AM	Helium valve closed
1/26/2011	3:00:48 AM	H2 valve closed
1/26/2011	3:00:48 AM	BCl3 valve closed
1/26/2011	3:00:48 AM	PH3 valve closed
1/26/2011	3:00:48 AM	SiCl4 pre valve closed
1/26/2011	3:00:48 AM	SiCl4 post valve closed
1/26/2011	3:00:48 AM	Bubbler valve closed
1/26/2011	3:00:48 AM	Main Vac valve opened
1/26/2011	3:00:48 AM	Bypass valve opened
1/26/2011	3:00:48 AM	Helium MFC set to  0.000000
1/26/2011	3:00:48 AM	H2 MFC set to  0.000000
1/26/2011	3:00:48 AM	BCl3 MFC set to  0.000000
1/26/2011	3:00:48 AM	PHl3 MFC set to  0.000000
1/26/2011	3:00:48 AM	SiCl4 MFC set to  0.000000
1/26/2011	3:00:48 AM	Bypass solenoid MFC set to  0.000000
1/26/2011	3:00:48 AM	Tube furnace set to 0
1/26/2011	3:01:48 AM	H2 valve closed
1/26/2011	3:01:48 AM	BCl3 valve closed
1/26/2011	3:01:48 AM	PH3 valve closed
1/26/2011	3:01:48 AM	SiCl4 pre valve closed
1/26/2011	3:01:48 AM	SiCl4 post valve closed
1/26/2011	3:01:48 AM	Bubbler valve closed
1/26/2011	3:01:48 AM	Helium valve opened
1/26/2011	3:01:48 AM	Main Vac valve opened
1/26/2011	3:01:48 AM	Bypass valve opened
1/26/2011	3:01:48 AM	Helium MFC set to  100.000000
1/26/2011	3:01:48 AM	H2 MFC set to  0.000000
1/26/2011	3:01:48 AM	BCl3 MFC set to  0.000000
1/26/2011	3:01:48 AM	PHl3 MFC set to  0.000000
1/26/2011	3:01:48 AM	SiCl4 MFC set to  0.000000
1/26/2011	3:01:48 AM	Bypass solenoid MFC set to  0.000000
1/26/2011	3:01:48 AM	Tube furnace set to 0
1/26/2011	3:02:06 AM	Run aborted at 3:02 AM
1/26/2011	3:02:06 AM	Helium valve closed
1/26/2011	3:02:06 AM	H2 valve closed
1/26/2011	3:02:06 AM	BCl3 valve closed
1/26/2011	3:02:06 AM	PH3 valve closed
1/26/2011	3:02:06 AM	SiCl4 pre valve closed
1/26/2011	3:02:06 AM	SiCl4 post valve closed
1/26/2011	3:02:06 AM	Bypass valve closed
1/26/2011	3:02:06 AM	Main Vac valve closed
1/26/2011	3:02:06 AM	Bubbler valve closed
1/26/2011	3:02:06 AM	Helium MFC set to  0.000000
1/26/2011	3:02:06 AM	H2 MFC set to  0.000000
1/26/2011	3:02:06 AM	BCl3 MFC set to  0.000000
1/26/2011	3:02:06 AM	PHl3 MFC set to  0.000000
1/26/2011	3:02:06 AM	SiCl4 MFC set to  0.000000
1/26/2011	3:02:06 AM	Tube furnace set to 0
1/26/2011	3:02:06 AM	Completed task C:\Users\Si CVD\CVD_Control\tasks\10x_he_purgepump.xml
1/26/2011	3:02:10 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
1/26/2011	3:02:10 AM	Recipe started at 3:02 AM
1/26/2011	3:02:10 AM	Helium valve closed
1/26/2011	3:02:10 AM	H2 valve closed
1/26/2011	3:02:10 AM	BCl3 valve closed
1/26/2011	3:02:10 AM	PH3 valve closed
1/26/2011	3:02:10 AM	SiCl4 pre valve closed
1/26/2011	3:02:10 AM	SiCl4 post valve closed
1/26/2011	3:02:10 AM	Main Vac valve closed
1/26/2011	3:02:10 AM	Bubbler valve closed
1/26/2011	3:02:10 AM	Bypass valve opened
1/26/2011	3:02:10 AM	Helium MFC set to  0.000000
1/26/2011	3:02:10 AM	H2 MFC set to  0.000000
1/26/2011	3:02:10 AM	BCl3 MFC set to  0.000000
1/26/2011	3:02:10 AM	PHl3 MFC set to  0.000000
1/26/2011	3:02:10 AM	SiCl4 MFC set to  0.000000
1/26/2011	3:02:10 AM	Bypass solenoid MFC set to  0.000000
1/26/2011	3:02:10 AM	Tube furnace set to 0
1/26/2011	3:02:11 AM	Helium valve closed
1/26/2011	3:02:11 AM	H2 valve closed
1/26/2011	3:02:11 AM	BCl3 valve closed
1/26/2011	3:02:11 AM	PH3 valve closed
1/26/2011	3:02:11 AM	SiCl4 pre valve closed
1/26/2011	3:02:11 AM	SiCl4 post valve closed
1/26/2011	3:02:11 AM	Bubbler valve closed
1/26/2011	3:02:11 AM	Main Vac valve opened
1/26/2011	3:02:11 AM	Bypass valve opened
1/26/2011	3:02:11 AM	Helium MFC set to  0.000000
1/26/2011	3:02:11 AM	H2 MFC set to  0.000000
1/26/2011	3:02:11 AM	BCl3 MFC set to  0.000000
1/26/2011	3:02:11 AM	PHl3 MFC set to  0.000000
1/26/2011	3:02:11 AM	SiCl4 MFC set to  0.000000
1/26/2011	3:02:11 AM	Bypass solenoid MFC set to  0.000000
1/26/2011	3:02:11 AM	Tube furnace set to 0
1/26/2011	3:02:11 AM	Run finished at 3:02 AM
1/26/2011	3:02:11 AM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
1/26/2011	3:02:30 AM	Tube furnace set to 150
1/26/2011	3:03:51 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\10x_he_purgepump.xml
1/26/2011	3:04:04 AM	Recipe started at 3:03 AM
1/26/2011	3:04:04 AM	Helium valve closed
1/26/2011	3:04:04 AM	H2 valve closed
1/26/2011	3:04:04 AM	BCl3 valve closed
1/26/2011	3:04:04 AM	PH3 valve closed
1/26/2011	3:04:04 AM	SiCl4 pre valve closed
1/26/2011	3:04:04 AM	SiCl4 post valve closed
1/26/2011	3:04:04 AM	Main Vac valve closed
1/26/2011	3:04:04 AM	Bubbler valve closed
1/26/2011	3:04:04 AM	Bypass valve opened
1/26/2011	3:04:04 AM	Helium MFC set to  0.000000
1/26/2011	3:04:04 AM	H2 MFC set to  0.000000
1/26/2011	3:04:04 AM	BCl3 MFC set to  0.000000
1/26/2011	3:04:04 AM	PHl3 MFC set to  0.000000
1/26/2011	3:04:04 AM	SiCl4 MFC set to  0.000000
1/26/2011	3:04:04 AM	Bypass solenoid MFC set to  0.000000
1/26/2011	3:04:04 AM	Tube furnace set to 0
1/26/2011	3:04:04 AM	Helium valve closed
1/26/2011	3:04:04 AM	H2 valve closed
1/26/2011	3:04:04 AM	BCl3 valve closed
1/26/2011	3:04:04 AM	PH3 valve closed
1/26/2011	3:04:04 AM	SiCl4 pre valve closed
1/26/2011	3:04:04 AM	SiCl4 post valve closed
1/26/2011	3:04:04 AM	Bubbler valve closed
1/26/2011	3:04:04 AM	Main Vac valve opened
1/26/2011	3:04:04 AM	Bypass valve opened
1/26/2011	3:04:04 AM	Helium MFC set to  0.000000
1/26/2011	3:04:04 AM	H2 MFC set to  0.000000
1/26/2011	3:04:04 AM	BCl3 MFC set to  0.000000
1/26/2011	3:04:04 AM	PHl3 MFC set to  0.000000
1/26/2011	3:04:04 AM	SiCl4 MFC set to  0.000000
1/26/2011	3:04:04 AM	Bypass solenoid MFC set to  0.000000
1/26/2011	3:04:04 AM	Tube furnace set to 0
1/26/2011	3:05:04 AM	H2 valve closed
1/26/2011	3:05:04 AM	BCl3 valve closed
1/26/2011	3:05:04 AM	PH3 valve closed
1/26/2011	3:05:04 AM	SiCl4 pre valve closed
1/26/2011	3:05:04 AM	SiCl4 post valve closed
1/26/2011	3:05:04 AM	Bubbler valve closed
1/26/2011	3:05:04 AM	Helium valve opened
1/26/2011	3:05:04 AM	Main Vac valve opened
1/26/2011	3:05:04 AM	Bypass valve opened
1/26/2011	3:05:04 AM	Helium MFC set to  100.000000
1/26/2011	3:05:04 AM	H2 MFC set to  0.000000
1/26/2011	3:05:04 AM	BCl3 MFC set to  0.000000
1/26/2011	3:05:04 AM	PHl3 MFC set to  0.000000
1/26/2011	3:05:04 AM	SiCl4 MFC set to  0.000000
1/26/2011	3:05:04 AM	Bypass solenoid MFC set to  0.000000
1/26/2011	3:05:04 AM	Tube furnace set to 0
1/26/2011	3:06:04 AM	Helium valve closed
1/26/2011	3:06:04 AM	H2 valve closed
1/26/2011	3:06:04 AM	BCl3 valve closed
1/26/2011	3:06:04 AM	PH3 valve closed
1/26/2011	3:06:04 AM	SiCl4 pre valve closed
1/26/2011	3:06:04 AM	SiCl4 post valve closed
1/26/2011	3:06:05 AM	Bubbler valve closed
1/26/2011	3:06:05 AM	Main Vac valve opened
1/26/2011	3:06:05 AM	Bypass valve opened
1/26/2011	3:06:05 AM	Helium MFC set to  0.000000
1/26/2011	3:06:05 AM	H2 MFC set to  0.000000
1/26/2011	3:06:05 AM	BCl3 MFC set to  0.000000
1/26/2011	3:06:05 AM	PHl3 MFC set to  0.000000
1/26/2011	3:06:05 AM	SiCl4 MFC set to  0.000000
1/26/2011	3:06:05 AM	Bypass solenoid MFC set to  0.000000
1/26/2011	3:06:05 AM	Tube furnace set to 0
1/26/2011	3:07:05 AM	H2 valve closed
1/26/2011	3:07:05 AM	BCl3 valve closed
1/26/2011	3:07:05 AM	PH3 valve closed
1/26/2011	3:07:05 AM	SiCl4 pre valve closed
1/26/2011	3:07:05 AM	SiCl4 post valve closed
1/26/2011	3:07:05 AM	Bubbler valve closed
1/26/2011	3:07:05 AM	Helium valve opened
1/26/2011	3:07:05 AM	Main Vac valve opened
1/26/2011	3:07:05 AM	Bypass valve opened
1/26/2011	3:07:05 AM	Helium MFC set to  100.000000
1/26/2011	3:07:05 AM	H2 MFC set to  0.000000
1/26/2011	3:07:05 AM	BCl3 MFC set to  0.000000
1/26/2011	3:07:05 AM	PHl3 MFC set to  0.000000
1/26/2011	3:07:05 AM	SiCl4 MFC set to  0.000000
1/26/2011	3:07:05 AM	Bypass solenoid MFC set to  0.000000
1/26/2011	3:07:05 AM	Tube furnace set to 0
1/26/2011	3:08:05 AM	Helium valve closed
1/26/2011	3:08:05 AM	H2 valve closed
1/26/2011	3:08:05 AM	BCl3 valve closed
1/26/2011	3:08:05 AM	PH3 valve closed
1/26/2011	3:08:05 AM	SiCl4 pre valve closed
1/26/2011	3:08:05 AM	SiCl4 post valve closed
1/26/2011	3:08:05 AM	Bubbler valve closed
1/26/2011	3:08:05 AM	Main Vac valve opened
1/26/2011	3:08:05 AM	Bypass valve opened
1/26/2011	3:08:05 AM	Helium MFC set to  0.000000
1/26/2011	3:08:05 AM	H2 MFC set to  0.000000
1/26/2011	3:08:05 AM	BCl3 MFC set to  0.000000
1/26/2011	3:08:05 AM	PHl3 MFC set to  0.000000
1/26/2011	3:08:05 AM	SiCl4 MFC set to  0.000000
1/26/2011	3:08:05 AM	Bypass solenoid MFC set to  0.000000
1/26/2011	3:08:05 AM	Tube furnace set to 0
1/26/2011	3:09:05 AM	H2 valve closed
1/26/2011	3:09:05 AM	BCl3 valve closed
1/26/2011	3:09:05 AM	PH3 valve closed
1/26/2011	3:09:05 AM	SiCl4 pre valve closed
1/26/2011	3:09:05 AM	SiCl4 post valve closed
1/26/2011	3:09:05 AM	Bubbler valve closed
1/26/2011	3:09:05 AM	Helium valve opened
1/26/2011	3:09:05 AM	Main Vac valve opened
1/26/2011	3:09:05 AM	Bypass valve opened
1/26/2011	3:09:05 AM	Helium MFC set to  100.000000
1/26/2011	3:09:05 AM	H2 MFC set to  0.000000
1/26/2011	3:09:05 AM	BCl3 MFC set to  0.000000
1/26/2011	3:09:05 AM	PHl3 MFC set to  0.000000
1/26/2011	3:09:05 AM	SiCl4 MFC set to  0.000000
1/26/2011	3:09:05 AM	Bypass solenoid MFC set to  0.000000
1/26/2011	3:09:05 AM	Tube furnace set to 0
1/26/2011	3:10:05 AM	Helium valve closed
1/26/2011	3:10:05 AM	H2 valve closed
1/26/2011	3:10:05 AM	BCl3 valve closed
1/26/2011	3:10:05 AM	PH3 valve closed
1/26/2011	3:10:05 AM	SiCl4 pre valve closed
1/26/2011	3:10:05 AM	SiCl4 post valve closed
1/26/2011	3:10:05 AM	Bubbler valve closed
1/26/2011	3:10:05 AM	Main Vac valve opened
1/26/2011	3:10:05 AM	Bypass valve opened
1/26/2011	3:10:05 AM	Helium MFC set to  0.000000
1/26/2011	3:10:05 AM	H2 MFC set to  0.000000
1/26/2011	3:10:05 AM	BCl3 MFC set to  0.000000
1/26/2011	3:10:05 AM	PHl3 MFC set to  0.000000
1/26/2011	3:10:05 AM	SiCl4 MFC set to  0.000000
1/26/2011	3:10:05 AM	Bypass solenoid MFC set to  0.000000
1/26/2011	3:10:05 AM	Tube furnace set to 0
1/26/2011	3:10:52 AM	Run aborted at 3:10 AM
1/26/2011	3:10:52 AM	Helium valve closed
1/26/2011	3:10:52 AM	H2 valve closed
1/26/2011	3:10:52 AM	BCl3 valve closed
1/26/2011	3:10:52 AM	PH3 valve closed
1/26/2011	3:10:52 AM	SiCl4 pre valve closed
1/26/2011	3:10:52 AM	SiCl4 post valve closed
1/26/2011	3:10:52 AM	Bypass valve closed
1/26/2011	3:10:52 AM	Main Vac valve closed
1/26/2011	3:10:52 AM	Bubbler valve closed
1/26/2011	3:10:52 AM	Helium MFC set to  0.000000
1/26/2011	3:10:52 AM	H2 MFC set to  0.000000
1/26/2011	3:10:52 AM	BCl3 MFC set to  0.000000
1/26/2011	3:10:52 AM	PHl3 MFC set to  0.000000
1/26/2011	3:10:52 AM	SiCl4 MFC set to  0.000000
1/26/2011	3:10:52 AM	Tube furnace set to 0
1/26/2011	3:10:52 AM	Completed task C:\Users\Si CVD\CVD_Control\tasks\10x_he_purgepump.xml
1/26/2011	3:11:03 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
1/26/2011	3:11:03 AM	Recipe started at 3:11 AM
1/26/2011	3:11:03 AM	Helium valve closed
1/26/2011	3:11:03 AM	H2 valve closed
1/26/2011	3:11:03 AM	BCl3 valve closed
1/26/2011	3:11:03 AM	PH3 valve closed
1/26/2011	3:11:03 AM	SiCl4 pre valve closed
1/26/2011	3:11:03 AM	SiCl4 post valve closed
1/26/2011	3:11:03 AM	Main Vac valve closed
1/26/2011	3:11:03 AM	Bubbler valve closed
1/26/2011	3:11:03 AM	Bypass valve opened
1/26/2011	3:11:03 AM	Helium MFC set to  0.000000
1/26/2011	3:11:03 AM	H2 MFC set to  0.000000
1/26/2011	3:11:03 AM	BCl3 MFC set to  0.000000
1/26/2011	3:11:03 AM	PHl3 MFC set to  0.000000
1/26/2011	3:11:03 AM	SiCl4 MFC set to  0.000000
1/26/2011	3:11:03 AM	Bypass solenoid MFC set to  0.000000
1/26/2011	3:11:03 AM	Tube furnace set to 0
1/26/2011	3:11:04 AM	Helium valve closed
1/26/2011	3:11:04 AM	H2 valve closed
1/26/2011	3:11:04 AM	BCl3 valve closed
1/26/2011	3:11:04 AM	PH3 valve closed
1/26/2011	3:11:04 AM	SiCl4 pre valve closed
1/26/2011	3:11:04 AM	SiCl4 post valve closed
1/26/2011	3:11:04 AM	Bubbler valve closed
1/26/2011	3:11:04 AM	Main Vac valve opened
1/26/2011	3:11:04 AM	Bypass valve opened
1/26/2011	3:11:04 AM	Helium MFC set to  0.000000
1/26/2011	3:11:04 AM	H2 MFC set to  0.000000
1/26/2011	3:11:04 AM	BCl3 MFC set to  0.000000
1/26/2011	3:11:04 AM	PHl3 MFC set to  0.000000
1/26/2011	3:11:04 AM	SiCl4 MFC set to  0.000000
1/26/2011	3:11:04 AM	Bypass solenoid MFC set to  0.000000
1/26/2011	3:11:04 AM	Tube furnace set to 0
1/26/2011	3:11:04 AM	Run finished at 3:11 AM
1/26/2011	3:11:04 AM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
1/26/2011	3:11:52 AM	Tube furnace set to 150
1/26/2011	3:13:08 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\10x_he_purgepump.xml
1/26/2011	3:13:20 AM	Recipe started at 3:13 AM
1/26/2011	3:13:20 AM	Helium valve closed
1/26/2011	3:13:20 AM	H2 valve closed
1/26/2011	3:13:20 AM	BCl3 valve closed
1/26/2011	3:13:20 AM	PH3 valve closed
1/26/2011	3:13:20 AM	SiCl4 pre valve closed
1/26/2011	3:13:20 AM	SiCl4 post valve closed
1/26/2011	3:13:20 AM	Main Vac valve closed
1/26/2011	3:13:20 AM	Bubbler valve closed
1/26/2011	3:13:20 AM	Bypass valve opened
1/26/2011	3:13:20 AM	Helium MFC set to  0.000000
1/26/2011	3:13:20 AM	H2 MFC set to  0.000000
1/26/2011	3:13:20 AM	BCl3 MFC set to  0.000000
1/26/2011	3:13:20 AM	PHl3 MFC set to  0.000000
1/26/2011	3:13:20 AM	SiCl4 MFC set to  0.000000
1/26/2011	3:13:20 AM	Bypass solenoid MFC set to  0.000000
1/26/2011	3:13:20 AM	Tube furnace set to 0
1/26/2011	3:13:21 AM	Helium valve closed
1/26/2011	3:13:21 AM	H2 valve closed
1/26/2011	3:13:21 AM	BCl3 valve closed
1/26/2011	3:13:21 AM	PH3 valve closed
1/26/2011	3:13:21 AM	SiCl4 pre valve closed
1/26/2011	3:13:21 AM	SiCl4 post valve closed
1/26/2011	3:13:21 AM	Bubbler valve closed
1/26/2011	3:13:21 AM	Main Vac valve opened
1/26/2011	3:13:21 AM	Bypass valve opened
1/26/2011	3:13:21 AM	Helium MFC set to  0.000000
1/26/2011	3:13:21 AM	H2 MFC set to  0.000000
1/26/2011	3:13:21 AM	BCl3 MFC set to  0.000000
1/26/2011	3:13:21 AM	PHl3 MFC set to  0.000000
1/26/2011	3:13:21 AM	SiCl4 MFC set to  0.000000
1/26/2011	3:13:21 AM	Bypass solenoid MFC set to  0.000000
1/26/2011	3:13:21 AM	Tube furnace set to 0
1/26/2011	3:14:21 AM	H2 valve closed
1/26/2011	3:14:21 AM	BCl3 valve closed
1/26/2011	3:14:21 AM	PH3 valve closed
1/26/2011	3:14:21 AM	SiCl4 pre valve closed
1/26/2011	3:14:21 AM	SiCl4 post valve closed
1/26/2011	3:14:21 AM	Bubbler valve closed
1/26/2011	3:14:21 AM	Helium valve opened
1/26/2011	3:14:21 AM	Main Vac valve opened
1/26/2011	3:14:21 AM	Bypass valve opened
1/26/2011	3:14:21 AM	Helium MFC set to  100.000000
1/26/2011	3:14:21 AM	H2 MFC set to  0.000000
1/26/2011	3:14:21 AM	BCl3 MFC set to  0.000000
1/26/2011	3:14:21 AM	PHl3 MFC set to  0.000000
1/26/2011	3:14:21 AM	SiCl4 MFC set to  0.000000
1/26/2011	3:14:21 AM	Bypass solenoid MFC set to  0.000000
1/26/2011	3:14:21 AM	Tube furnace set to 0
1/26/2011	3:15:21 AM	Helium valve closed
1/26/2011	3:15:21 AM	H2 valve closed
1/26/2011	3:15:21 AM	BCl3 valve closed
1/26/2011	3:15:21 AM	PH3 valve closed
1/26/2011	3:15:21 AM	SiCl4 pre valve closed
1/26/2011	3:15:21 AM	SiCl4 post valve closed
1/26/2011	3:15:21 AM	Bubbler valve closed
1/26/2011	3:15:21 AM	Main Vac valve opened
1/26/2011	3:15:21 AM	Bypass valve opened
1/26/2011	3:15:21 AM	Helium MFC set to  0.000000
1/26/2011	3:15:21 AM	H2 MFC set to  0.000000
1/26/2011	3:15:21 AM	BCl3 MFC set to  0.000000
1/26/2011	3:15:21 AM	PHl3 MFC set to  0.000000
1/26/2011	3:15:21 AM	SiCl4 MFC set to  0.000000
1/26/2011	3:15:21 AM	Bypass solenoid MFC set to  0.000000
1/26/2011	3:15:21 AM	Tube furnace set to 0
1/26/2011	3:16:21 AM	H2 valve closed
1/26/2011	3:16:21 AM	BCl3 valve closed
1/26/2011	3:16:21 AM	PH3 valve closed
1/26/2011	3:16:21 AM	SiCl4 pre valve closed
1/26/2011	3:16:21 AM	SiCl4 post valve closed
1/26/2011	3:16:21 AM	Bubbler valve closed
1/26/2011	3:16:21 AM	Helium valve opened
1/26/2011	3:16:21 AM	Main Vac valve opened
1/26/2011	3:16:21 AM	Bypass valve opened
1/26/2011	3:16:21 AM	Helium MFC set to  100.000000
1/26/2011	3:16:21 AM	H2 MFC set to  0.000000
1/26/2011	3:16:21 AM	BCl3 MFC set to  0.000000
1/26/2011	3:16:21 AM	PHl3 MFC set to  0.000000
1/26/2011	3:16:21 AM	SiCl4 MFC set to  0.000000
1/26/2011	3:16:21 AM	Bypass solenoid MFC set to  0.000000
1/26/2011	3:16:22 AM	Tube furnace set to 0
1/26/2011	3:17:22 AM	Helium valve closed
1/26/2011	3:17:22 AM	H2 valve closed
1/26/2011	3:17:22 AM	BCl3 valve closed
1/26/2011	3:17:22 AM	PH3 valve closed
1/26/2011	3:17:22 AM	SiCl4 pre valve closed
1/26/2011	3:17:22 AM	SiCl4 post valve closed
1/26/2011	3:17:22 AM	Bubbler valve closed
1/26/2011	3:17:22 AM	Main Vac valve opened
1/26/2011	3:17:22 AM	Bypass valve opened
1/26/2011	3:17:22 AM	Helium MFC set to  0.000000
1/26/2011	3:17:22 AM	H2 MFC set to  0.000000
1/26/2011	3:17:22 AM	BCl3 MFC set to  0.000000
1/26/2011	3:17:22 AM	PHl3 MFC set to  0.000000
1/26/2011	3:17:22 AM	SiCl4 MFC set to  0.000000
1/26/2011	3:17:22 AM	Bypass solenoid MFC set to  0.000000
1/26/2011	3:17:22 AM	Tube furnace set to 0
1/26/2011	3:18:15 AM	Run aborted at 3:18 AM
1/26/2011	3:18:15 AM	Helium valve closed
1/26/2011	3:18:15 AM	H2 valve closed
1/26/2011	3:18:15 AM	BCl3 valve closed
1/26/2011	3:18:15 AM	PH3 valve closed
1/26/2011	3:18:15 AM	SiCl4 pre valve closed
1/26/2011	3:18:15 AM	SiCl4 post valve closed
1/26/2011	3:18:15 AM	Bypass valve closed
1/26/2011	3:18:15 AM	Main Vac valve closed
1/26/2011	3:18:15 AM	Bubbler valve closed
1/26/2011	3:18:16 AM	Helium MFC set to  0.000000
1/26/2011	3:18:16 AM	H2 MFC set to  0.000000
1/26/2011	3:18:16 AM	BCl3 MFC set to  0.000000
1/26/2011	3:18:16 AM	PHl3 MFC set to  0.000000
1/26/2011	3:18:16 AM	SiCl4 MFC set to  0.000000
1/26/2011	3:18:16 AM	Tube furnace set to 0
1/26/2011	3:18:16 AM	Completed task C:\Users\Si CVD\CVD_Control\tasks\10x_he_purgepump.xml
1/26/2011	3:18:27 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
1/26/2011	3:18:28 AM	Recipe started at 3:18 AM
1/26/2011	3:18:28 AM	Helium valve closed
1/26/2011	3:18:28 AM	H2 valve closed
1/26/2011	3:18:28 AM	BCl3 valve closed
1/26/2011	3:18:28 AM	PH3 valve closed
1/26/2011	3:18:28 AM	SiCl4 pre valve closed
1/26/2011	3:18:28 AM	SiCl4 post valve closed
1/26/2011	3:18:28 AM	Main Vac valve closed
1/26/2011	3:18:28 AM	Bubbler valve closed
1/26/2011	3:18:28 AM	Bypass valve opened
1/26/2011	3:18:28 AM	Helium MFC set to  0.000000
1/26/2011	3:18:28 AM	H2 MFC set to  0.000000
1/26/2011	3:18:28 AM	BCl3 MFC set to  0.000000
1/26/2011	3:18:28 AM	PHl3 MFC set to  0.000000
1/26/2011	3:18:28 AM	SiCl4 MFC set to  0.000000
1/26/2011	3:18:28 AM	Bypass solenoid MFC set to  0.000000
1/26/2011	3:18:28 AM	Tube furnace set to 0
1/26/2011	3:18:28 AM	Helium valve closed
1/26/2011	3:18:28 AM	H2 valve closed
1/26/2011	3:18:28 AM	BCl3 valve closed
1/26/2011	3:18:28 AM	PH3 valve closed
1/26/2011	3:18:28 AM	SiCl4 pre valve closed
1/26/2011	3:18:28 AM	SiCl4 post valve closed
1/26/2011	3:18:28 AM	Bubbler valve closed
1/26/2011	3:18:28 AM	Main Vac valve opened
1/26/2011	3:18:28 AM	Bypass valve opened
1/26/2011	3:18:28 AM	Helium MFC set to  0.000000
1/26/2011	3:18:28 AM	H2 MFC set to  0.000000
1/26/2011	3:18:28 AM	BCl3 MFC set to  0.000000
1/26/2011	3:18:28 AM	PHl3 MFC set to  0.000000
1/26/2011	3:18:28 AM	SiCl4 MFC set to  0.000000
1/26/2011	3:18:28 AM	Bypass solenoid MFC set to  0.000000
1/26/2011	3:18:28 AM	Tube furnace set to 0
1/26/2011	3:18:29 AM	Run finished at 3:18 AM
1/26/2011	3:18:29 AM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
1/26/2011	3:20:19 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\10x_he_purgepump.xml
1/26/2011	3:20:31 AM	Recipe started at 3:20 AM
1/26/2011	3:20:31 AM	Helium valve closed
1/26/2011	3:20:31 AM	H2 valve closed
1/26/2011	3:20:31 AM	BCl3 valve closed
1/26/2011	3:20:31 AM	PH3 valve closed
1/26/2011	3:20:31 AM	SiCl4 pre valve closed
1/26/2011	3:20:31 AM	SiCl4 post valve closed
1/26/2011	3:20:31 AM	Main Vac valve closed
1/26/2011	3:20:31 AM	Bubbler valve closed
1/26/2011	3:20:31 AM	Bypass valve opened
1/26/2011	3:20:31 AM	Helium MFC set to  0.000000
1/26/2011	3:20:31 AM	H2 MFC set to  0.000000
1/26/2011	3:20:31 AM	BCl3 MFC set to  0.000000
1/26/2011	3:20:31 AM	PHl3 MFC set to  0.000000
1/26/2011	3:20:31 AM	SiCl4 MFC set to  0.000000
1/26/2011	3:20:31 AM	Bypass solenoid MFC set to  0.000000
1/26/2011	3:20:31 AM	Tube furnace set to 0
1/26/2011	3:20:31 AM	Helium valve closed
1/26/2011	3:20:31 AM	H2 valve closed
1/26/2011	3:20:31 AM	BCl3 valve closed
1/26/2011	3:20:31 AM	PH3 valve closed
1/26/2011	3:20:31 AM	SiCl4 pre valve closed
1/26/2011	3:20:31 AM	SiCl4 post valve closed
1/26/2011	3:20:31 AM	Bubbler valve closed
1/26/2011	3:20:31 AM	Main Vac valve opened
1/26/2011	3:20:31 AM	Bypass valve opened
1/26/2011	3:20:31 AM	Helium MFC set to  0.000000
1/26/2011	3:20:31 AM	H2 MFC set to  0.000000
1/26/2011	3:20:31 AM	BCl3 MFC set to  0.000000
1/26/2011	3:20:31 AM	PHl3 MFC set to  0.000000
1/26/2011	3:20:31 AM	SiCl4 MFC set to  0.000000
1/26/2011	3:20:31 AM	Bypass solenoid MFC set to  0.000000
1/26/2011	3:20:32 AM	Tube furnace set to 0
1/26/2011	3:21:32 AM	H2 valve closed
1/26/2011	3:21:32 AM	BCl3 valve closed
1/26/2011	3:21:32 AM	PH3 valve closed
1/26/2011	3:21:32 AM	SiCl4 pre valve closed
1/26/2011	3:21:32 AM	SiCl4 post valve closed
1/26/2011	3:21:32 AM	Bubbler valve closed
1/26/2011	3:21:32 AM	Helium valve opened
1/26/2011	3:21:32 AM	Main Vac valve opened
1/26/2011	3:21:32 AM	Bypass valve opened
1/26/2011	3:21:32 AM	Helium MFC set to  100.000000
1/26/2011	3:21:32 AM	H2 MFC set to  0.000000
1/26/2011	3:21:32 AM	BCl3 MFC set to  0.000000
1/26/2011	3:21:32 AM	PHl3 MFC set to  0.000000
1/26/2011	3:21:32 AM	SiCl4 MFC set to  0.000000
1/26/2011	3:21:32 AM	Bypass solenoid MFC set to  0.000000
1/26/2011	3:21:32 AM	Tube furnace set to 0
1/26/2011	3:22:32 AM	Helium valve closed
1/26/2011	3:22:32 AM	H2 valve closed
1/26/2011	3:22:32 AM	BCl3 valve closed
1/26/2011	3:22:32 AM	PH3 valve closed
1/26/2011	3:22:32 AM	SiCl4 pre valve closed
1/26/2011	3:22:32 AM	SiCl4 post valve closed
1/26/2011	3:22:32 AM	Bubbler valve closed
1/26/2011	3:22:32 AM	Main Vac valve opened
1/26/2011	3:22:32 AM	Bypass valve opened
1/26/2011	3:22:32 AM	Helium MFC set to  0.000000
1/26/2011	3:22:32 AM	H2 MFC set to  0.000000
1/26/2011	3:22:32 AM	BCl3 MFC set to  0.000000
1/26/2011	3:22:32 AM	PHl3 MFC set to  0.000000
1/26/2011	3:22:32 AM	SiCl4 MFC set to  0.000000
1/26/2011	3:22:32 AM	Bypass solenoid MFC set to  0.000000
1/26/2011	3:22:32 AM	Tube furnace set to 0
1/26/2011	3:23:32 AM	H2 valve closed
1/26/2011	3:23:32 AM	BCl3 valve closed
1/26/2011	3:23:32 AM	PH3 valve closed
1/26/2011	3:23:32 AM	SiCl4 pre valve closed
1/26/2011	3:23:32 AM	SiCl4 post valve closed
1/26/2011	3:23:32 AM	Bubbler valve closed
1/26/2011	3:23:32 AM	Helium valve opened
1/26/2011	3:23:32 AM	Main Vac valve opened
1/26/2011	3:23:32 AM	Bypass valve opened
1/26/2011	3:23:32 AM	Helium MFC set to  100.000000
1/26/2011	3:23:32 AM	H2 MFC set to  0.000000
1/26/2011	3:23:32 AM	BCl3 MFC set to  0.000000
1/26/2011	3:23:32 AM	PHl3 MFC set to  0.000000
1/26/2011	3:23:32 AM	SiCl4 MFC set to  0.000000
1/26/2011	3:23:32 AM	Bypass solenoid MFC set to  0.000000
1/26/2011	3:23:32 AM	Tube furnace set to 0
1/26/2011	3:23:39 AM	Run aborted at 3:23 AM
1/26/2011	3:23:39 AM	Helium valve closed
1/26/2011	3:23:39 AM	H2 valve closed
1/26/2011	3:23:39 AM	BCl3 valve closed
1/26/2011	3:23:39 AM	PH3 valve closed
1/26/2011	3:23:39 AM	SiCl4 pre valve closed
1/26/2011	3:23:39 AM	SiCl4 post valve closed
1/26/2011	3:23:39 AM	Bypass valve closed
1/26/2011	3:23:39 AM	Main Vac valve closed
1/26/2011	3:23:39 AM	Bubbler valve closed
1/26/2011	3:23:39 AM	Helium MFC set to  0.000000
1/26/2011	3:23:39 AM	H2 MFC set to  0.000000
1/26/2011	3:23:39 AM	BCl3 MFC set to  0.000000
1/26/2011	3:23:39 AM	PHl3 MFC set to  0.000000
1/26/2011	3:23:39 AM	SiCl4 MFC set to  0.000000
1/26/2011	3:23:39 AM	Tube furnace set to 0
1/26/2011	3:23:39 AM	Completed task C:\Users\Si CVD\CVD_Control\tasks\10x_he_purgepump.xml
1/26/2011	3:23:40 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
1/26/2011	3:23:41 AM	Recipe started at 3:23 AM
1/26/2011	3:23:41 AM	Helium valve closed
1/26/2011	3:23:41 AM	H2 valve closed
1/26/2011	3:23:41 AM	BCl3 valve closed
1/26/2011	3:23:41 AM	PH3 valve closed
1/26/2011	3:23:41 AM	SiCl4 pre valve closed
1/26/2011	3:23:41 AM	SiCl4 post valve closed
1/26/2011	3:23:41 AM	Main Vac valve closed
1/26/2011	3:23:41 AM	Bubbler valve closed
1/26/2011	3:23:41 AM	Bypass valve opened
1/26/2011	3:23:41 AM	Helium MFC set to  0.000000
1/26/2011	3:23:41 AM	H2 MFC set to  0.000000
1/26/2011	3:23:41 AM	BCl3 MFC set to  0.000000
1/26/2011	3:23:41 AM	PHl3 MFC set to  0.000000
1/26/2011	3:23:41 AM	SiCl4 MFC set to  0.000000
1/26/2011	3:23:41 AM	Bypass solenoid MFC set to  0.000000
1/26/2011	3:23:41 AM	Tube furnace set to 0
1/26/2011	3:23:41 AM	Helium valve closed
1/26/2011	3:23:41 AM	H2 valve closed
1/26/2011	3:23:41 AM	BCl3 valve closed
1/26/2011	3:23:41 AM	PH3 valve closed
1/26/2011	3:23:41 AM	SiCl4 pre valve closed
1/26/2011	3:23:41 AM	SiCl4 post valve closed
1/26/2011	3:23:41 AM	Bubbler valve closed
1/26/2011	3:23:41 AM	Main Vac valve opened
1/26/2011	3:23:41 AM	Bypass valve opened
1/26/2011	3:23:41 AM	Helium MFC set to  0.000000
1/26/2011	3:23:41 AM	H2 MFC set to  0.000000
1/26/2011	3:23:41 AM	BCl3 MFC set to  0.000000
1/26/2011	3:23:41 AM	PHl3 MFC set to  0.000000
1/26/2011	3:23:41 AM	SiCl4 MFC set to  0.000000
1/26/2011	3:23:41 AM	Bypass solenoid MFC set to  0.000000
1/26/2011	3:23:42 AM	Tube furnace set to 0
1/26/2011	3:23:42 AM	Run finished at 3:23 AM
1/26/2011	3:23:42 AM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
1/26/2011	3:32:22 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\10x_he_purgepump.xml
1/26/2011	3:32:34 AM	Recipe started at 3:32 AM
1/26/2011	3:32:34 AM	Helium valve closed
1/26/2011	3:32:34 AM	H2 valve closed
1/26/2011	3:32:34 AM	BCl3 valve closed
1/26/2011	3:32:34 AM	PH3 valve closed
1/26/2011	3:32:34 AM	SiCl4 pre valve closed
1/26/2011	3:32:34 AM	SiCl4 post valve closed
1/26/2011	3:32:34 AM	Main Vac valve closed
1/26/2011	3:32:34 AM	Bubbler valve closed
1/26/2011	3:32:34 AM	Bypass valve opened
1/26/2011	3:32:34 AM	Helium MFC set to  0.000000
1/26/2011	3:32:34 AM	H2 MFC set to  0.000000
1/26/2011	3:32:34 AM	BCl3 MFC set to  0.000000
1/26/2011	3:32:34 AM	PHl3 MFC set to  0.000000
1/26/2011	3:32:34 AM	SiCl4 MFC set to  0.000000
1/26/2011	3:32:34 AM	Bypass solenoid MFC set to  0.000000
1/26/2011	3:32:34 AM	Tube furnace set to 0
1/26/2011	3:32:35 AM	Helium valve closed
1/26/2011	3:32:35 AM	H2 valve closed
1/26/2011	3:32:35 AM	BCl3 valve closed
1/26/2011	3:32:35 AM	PH3 valve closed
1/26/2011	3:32:35 AM	SiCl4 pre valve closed
1/26/2011	3:32:35 AM	SiCl4 post valve closed
1/26/2011	3:32:35 AM	Bubbler valve closed
1/26/2011	3:32:35 AM	Main Vac valve opened
1/26/2011	3:32:35 AM	Bypass valve opened
1/26/2011	3:32:35 AM	Helium MFC set to  0.000000
1/26/2011	3:32:35 AM	H2 MFC set to  0.000000
1/26/2011	3:32:35 AM	BCl3 MFC set to  0.000000
1/26/2011	3:32:35 AM	PHl3 MFC set to  0.000000
1/26/2011	3:32:35 AM	SiCl4 MFC set to  0.000000
1/26/2011	3:32:35 AM	Bypass solenoid MFC set to  0.000000
1/26/2011	3:32:35 AM	Tube furnace set to 0
1/26/2011	3:33:35 AM	H2 valve closed
1/26/2011	3:33:35 AM	BCl3 valve closed
1/26/2011	3:33:35 AM	PH3 valve closed
1/26/2011	3:33:35 AM	SiCl4 pre valve closed
1/26/2011	3:33:35 AM	SiCl4 post valve closed
1/26/2011	3:33:35 AM	Bubbler valve closed
1/26/2011	3:33:35 AM	Helium valve opened
1/26/2011	3:33:35 AM	Main Vac valve opened
1/26/2011	3:33:35 AM	Bypass valve opened
1/26/2011	3:33:35 AM	Helium MFC set to  100.000000
1/26/2011	3:33:35 AM	H2 MFC set to  0.000000
1/26/2011	3:33:35 AM	BCl3 MFC set to  0.000000
1/26/2011	3:33:35 AM	PHl3 MFC set to  0.000000
1/26/2011	3:33:35 AM	SiCl4 MFC set to  0.000000
1/26/2011	3:33:35 AM	Bypass solenoid MFC set to  0.000000
1/26/2011	3:33:35 AM	Tube furnace set to 0
1/26/2011	3:34:35 AM	Helium valve closed
1/26/2011	3:34:35 AM	H2 valve closed
1/26/2011	3:34:35 AM	BCl3 valve closed
1/26/2011	3:34:35 AM	PH3 valve closed
1/26/2011	3:34:35 AM	SiCl4 pre valve closed
1/26/2011	3:34:35 AM	SiCl4 post valve closed
1/26/2011	3:34:35 AM	Bubbler valve closed
1/26/2011	3:34:35 AM	Main Vac valve opened
1/26/2011	3:34:35 AM	Bypass valve opened
1/26/2011	3:34:35 AM	Helium MFC set to  0.000000
1/26/2011	3:34:35 AM	H2 MFC set to  0.000000
1/26/2011	3:34:35 AM	BCl3 MFC set to  0.000000
1/26/2011	3:34:35 AM	PHl3 MFC set to  0.000000
1/26/2011	3:34:35 AM	SiCl4 MFC set to  0.000000
1/26/2011	3:34:35 AM	Bypass solenoid MFC set to  0.000000
1/26/2011	3:34:35 AM	Tube furnace set to 0
1/26/2011	3:35:35 AM	H2 valve closed
1/26/2011	3:35:35 AM	BCl3 valve closed
1/26/2011	3:35:35 AM	PH3 valve closed
1/26/2011	3:35:35 AM	SiCl4 pre valve closed
1/26/2011	3:35:35 AM	SiCl4 post valve closed
1/26/2011	3:35:35 AM	Bubbler valve closed
1/26/2011	3:35:35 AM	Helium valve opened
1/26/2011	3:35:35 AM	Main Vac valve opened
1/26/2011	3:35:35 AM	Bypass valve opened
1/26/2011	3:35:35 AM	Helium MFC set to  100.000000
1/26/2011	3:35:35 AM	H2 MFC set to  0.000000
1/26/2011	3:35:35 AM	BCl3 MFC set to  0.000000
1/26/2011	3:35:35 AM	PHl3 MFC set to  0.000000
1/26/2011	3:35:35 AM	SiCl4 MFC set to  0.000000
1/26/2011	3:35:35 AM	Bypass solenoid MFC set to  0.000000
1/26/2011	3:35:36 AM	Tube furnace set to 0
1/26/2011	3:35:53 AM	Run aborted at 3:35 AM
1/26/2011	3:35:53 AM	Helium valve closed
1/26/2011	3:35:53 AM	H2 valve closed
1/26/2011	3:35:53 AM	BCl3 valve closed
1/26/2011	3:35:53 AM	PH3 valve closed
1/26/2011	3:35:53 AM	SiCl4 pre valve closed
1/26/2011	3:35:53 AM	SiCl4 post valve closed
1/26/2011	3:35:53 AM	Bypass valve closed
1/26/2011	3:35:53 AM	Main Vac valve closed
1/26/2011	3:35:53 AM	Bubbler valve closed
1/26/2011	3:35:53 AM	Helium MFC set to  0.000000
1/26/2011	3:35:53 AM	H2 MFC set to  0.000000
1/26/2011	3:35:53 AM	BCl3 MFC set to  0.000000
1/26/2011	3:35:53 AM	PHl3 MFC set to  0.000000
1/26/2011	3:35:53 AM	SiCl4 MFC set to  0.000000
1/26/2011	3:35:53 AM	Tube furnace set to 0
1/26/2011	3:35:53 AM	Completed task C:\Users\Si CVD\CVD_Control\tasks\10x_he_purgepump.xml
1/26/2011	3:35:56 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
1/26/2011	3:35:57 AM	Recipe started at 3:35 AM
1/26/2011	3:35:57 AM	Helium valve closed
1/26/2011	3:35:57 AM	H2 valve closed
1/26/2011	3:35:57 AM	BCl3 valve closed
1/26/2011	3:35:57 AM	PH3 valve closed
1/26/2011	3:35:57 AM	SiCl4 pre valve closed
1/26/2011	3:35:57 AM	SiCl4 post valve closed
1/26/2011	3:35:57 AM	Main Vac valve closed
1/26/2011	3:35:57 AM	Bubbler valve closed
1/26/2011	3:35:57 AM	Bypass valve opened
1/26/2011	3:35:57 AM	Helium MFC set to  0.000000
1/26/2011	3:35:57 AM	H2 MFC set to  0.000000
1/26/2011	3:35:57 AM	BCl3 MFC set to  0.000000
1/26/2011	3:35:57 AM	PHl3 MFC set to  0.000000
1/26/2011	3:35:57 AM	SiCl4 MFC set to  0.000000
1/26/2011	3:35:57 AM	Bypass solenoid MFC set to  0.000000
1/26/2011	3:35:57 AM	Tube furnace set to 0
1/26/2011	3:35:57 AM	Helium valve closed
1/26/2011	3:35:57 AM	H2 valve closed
1/26/2011	3:35:57 AM	BCl3 valve closed
1/26/2011	3:35:57 AM	PH3 valve closed
1/26/2011	3:35:57 AM	SiCl4 pre valve closed
1/26/2011	3:35:57 AM	SiCl4 post valve closed
1/26/2011	3:35:57 AM	Bubbler valve closed
1/26/2011	3:35:57 AM	Main Vac valve opened
1/26/2011	3:35:57 AM	Bypass valve opened
1/26/2011	3:35:57 AM	Helium MFC set to  0.000000
1/26/2011	3:35:57 AM	H2 MFC set to  0.000000
1/26/2011	3:35:57 AM	BCl3 MFC set to  0.000000
1/26/2011	3:35:57 AM	PHl3 MFC set to  0.000000
1/26/2011	3:35:57 AM	SiCl4 MFC set to  0.000000
1/26/2011	3:35:57 AM	Bypass solenoid MFC set to  0.000000
1/26/2011	3:35:57 AM	Tube furnace set to 0
1/26/2011	3:35:57 AM	Run finished at 3:35 AM
1/26/2011	3:35:57 AM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
1/26/2011	3:39:18 AM	Recipe started at 3:39 AM
1/26/2011	3:39:18 AM	Helium valve closed
1/26/2011	3:39:18 AM	BCl3 valve closed
1/26/2011	3:39:18 AM	PH3 valve closed
1/26/2011	3:39:18 AM	SiCl4 pre valve closed
1/26/2011	3:39:18 AM	SiCl4 post valve closed
1/26/2011	3:39:18 AM	Main Vac valve closed
1/26/2011	3:39:18 AM	Bypass valve closed
1/26/2011	3:39:18 AM	Bubbler valve closed
1/26/2011	3:39:18 AM	H2 valve opened
1/26/2011	3:39:18 AM	Helium MFC set to  0.000000
1/26/2011	3:39:18 AM	H2 MFC set to  500.000000
1/26/2011	3:39:18 AM	BCl3 MFC set to  0.000000
1/26/2011	3:39:18 AM	PHl3 MFC set to  0.000000
1/26/2011	3:39:18 AM	SiCl4 MFC set to  0.000000
1/26/2011	3:39:18 AM	Bypass solenoid MFC set to  0.000000
1/26/2011	3:39:18 AM	Tube furnace set to 0
1/26/2011	3:40:37 AM	Helium valve closed
1/26/2011	3:40:37 AM	BCl3 valve closed
1/26/2011	3:40:37 AM	PH3 valve closed
1/26/2011	3:40:37 AM	SiCl4 pre valve closed
1/26/2011	3:40:37 AM	SiCl4 post valve closed
1/26/2011	3:40:37 AM	Main Vac valve closed
1/26/2011	3:40:37 AM	Bypass valve closed
1/26/2011	3:40:37 AM	H2 valve opened
1/26/2011	3:40:37 AM	Bubbler valve opened
1/26/2011	3:40:37 AM	Helium MFC set to  0.000000
1/26/2011	3:40:37 AM	H2 MFC set to  500.000000
1/26/2011	3:40:37 AM	BCl3 MFC set to  0.000000
1/26/2011	3:40:37 AM	PHl3 MFC set to  0.000000
1/26/2011	3:40:37 AM	SiCl4 MFC set to  0.000000
1/26/2011	3:40:37 AM	Bypass solenoid MFC set to  0.000000
1/26/2011	3:40:37 AM	Tube furnace set to 1000
1/26/2011	4:00:38 AM	Helium valve closed
1/26/2011	4:00:38 AM	PH3 valve closed
1/26/2011	4:00:38 AM	Main Vac valve closed
1/26/2011	4:00:38 AM	Bypass valve closed
1/26/2011	4:00:38 AM	H2 valve opened
1/26/2011	4:00:38 AM	BCl3 valve opened
1/26/2011	4:00:38 AM	SiCl4 pre valve opened
1/26/2011	4:00:38 AM	SiCl4 post valve opened
1/26/2011	4:00:38 AM	Bubbler valve opened
1/26/2011	4:00:38 AM	Helium MFC set to  0.000000
1/26/2011	4:00:38 AM	H2 MFC set to  500.000000
1/26/2011	4:00:38 AM	BCl3 MFC set to  5.000000
1/26/2011	4:00:38 AM	PHl3 MFC set to  0.000000
1/26/2011	4:00:38 AM	SiCl4 MFC set to  50.000000
1/26/2011	4:00:38 AM	Bypass solenoid MFC set to  0.000000
1/26/2011	4:00:38 AM	Tube furnace set to 1000
1/26/2011	4:20:38 AM	H2 valve closed
1/26/2011	4:20:38 AM	BCl3 valve closed
1/26/2011	4:20:38 AM	PH3 valve closed
1/26/2011	4:20:38 AM	SiCl4 pre valve closed
1/26/2011	4:20:38 AM	SiCl4 post valve closed
1/26/2011	4:20:38 AM	Main Vac valve closed
1/26/2011	4:20:38 AM	Bypass valve closed
1/26/2011	4:20:38 AM	Helium valve opened
1/26/2011	4:20:38 AM	Bubbler valve opened
1/26/2011	4:20:38 AM	Helium MFC set to  500.000000
1/26/2011	4:20:38 AM	H2 MFC set to  0.000000
1/26/2011	4:20:38 AM	BCl3 MFC set to  0.000000
1/26/2011	4:20:38 AM	PHl3 MFC set to  0.000000
1/26/2011	4:20:38 AM	SiCl4 MFC set to  0.000000
1/26/2011	4:20:38 AM	Bypass solenoid MFC set to  0.000000
1/26/2011	4:20:38 AM	Tube furnace set to 0
1/26/2011	4:40:38 AM	Helium valve closed
1/26/2011	4:40:38 AM	H2 valve closed
1/26/2011	4:40:38 AM	BCl3 valve closed
1/26/2011	4:40:38 AM	PH3 valve closed
1/26/2011	4:40:38 AM	SiCl4 pre valve closed
1/26/2011	4:40:38 AM	SiCl4 post valve closed
1/26/2011	4:40:38 AM	Main Vac valve closed
1/26/2011	4:40:38 AM	Bypass valve closed
1/26/2011	4:40:38 AM	Bubbler valve closed
1/26/2011	4:40:38 AM	Helium MFC set to  0.000000
1/26/2011	4:40:38 AM	H2 MFC set to  0.000000
1/26/2011	4:40:38 AM	BCl3 MFC set to  0.000000
1/26/2011	4:40:38 AM	PHl3 MFC set to  0.000000
1/26/2011	4:40:38 AM	SiCl4 MFC set to  0.000000
1/26/2011	4:40:38 AM	Bypass solenoid MFC set to  0.000000
1/26/2011	4:40:38 AM	Tube furnace set to 0
1/26/2011	4:40:38 AM	Run finished at 4:40 AM
1/26/2011	5:05:46 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
1/26/2011	5:05:47 AM	Recipe started at 5:05 AM
1/26/2011	5:05:47 AM	H2 valve closed
1/26/2011	5:05:47 AM	BCl3 valve closed
1/26/2011	5:05:47 AM	PH3 valve closed
1/26/2011	5:05:47 AM	SiCl4 pre valve closed
1/26/2011	5:05:47 AM	SiCl4 post valve closed
1/26/2011	5:05:47 AM	Main Vac valve closed
1/26/2011	5:05:47 AM	Bypass valve closed
1/26/2011	5:05:47 AM	Bubbler valve closed
1/26/2011	5:05:47 AM	Helium valve opened
1/26/2011	5:05:47 AM	Helium MFC set to  500.000000
1/26/2011	5:05:47 AM	H2 MFC set to  0.000000
1/26/2011	5:05:47 AM	BCl3 MFC set to  0.000000
1/26/2011	5:05:47 AM	PHl3 MFC set to  0.000000
1/26/2011	5:05:47 AM	SiCl4 MFC set to  0.000000
1/26/2011	5:05:47 AM	Bypass solenoid MFC set to  0.000000
1/26/2011	5:05:47 AM	Tube furnace set to 0
1/26/2011	5:05:50 AM	Helium valve closed
1/26/2011	5:05:50 AM	H2 valve closed
1/26/2011	5:05:50 AM	BCl3 valve closed
1/26/2011	5:05:50 AM	PH3 valve closed
1/26/2011	5:05:50 AM	SiCl4 pre valve closed
1/26/2011	5:05:50 AM	SiCl4 post valve closed
1/26/2011	5:05:50 AM	Main Vac valve closed
1/26/2011	5:05:50 AM	Bypass valve closed
1/26/2011	5:05:50 AM	Bubbler valve closed
1/26/2011	5:05:50 AM	Helium MFC set to  0.000000
1/26/2011	5:05:50 AM	H2 MFC set to  0.000000
1/26/2011	5:05:50 AM	BCl3 MFC set to  0.000000
1/26/2011	5:05:50 AM	PHl3 MFC set to  0.000000
1/26/2011	5:05:50 AM	SiCl4 MFC set to  0.000000
1/26/2011	5:05:50 AM	Bypass solenoid MFC set to  0.000000
1/26/2011	5:05:50 AM	Tube furnace set to 0
1/26/2011	5:05:50 AM	Run finished at 5:05 AM
1/26/2011	5:05:50 AM	Completed task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
1/26/2011	5:22:49 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
1/26/2011	5:22:50 AM	Recipe started at 5:22 AM
1/26/2011	5:22:50 AM	Helium valve closed
1/26/2011	5:22:50 AM	H2 valve closed
1/26/2011	5:22:50 AM	BCl3 valve closed
1/26/2011	5:22:50 AM	PH3 valve closed
1/26/2011	5:22:50 AM	SiCl4 pre valve closed
1/26/2011	5:22:50 AM	SiCl4 post valve closed
1/26/2011	5:22:50 AM	Main Vac valve closed
1/26/2011	5:22:50 AM	Bubbler valve closed
1/26/2011	5:22:50 AM	Bypass valve opened
1/26/2011	5:22:50 AM	Helium MFC set to  0.000000
1/26/2011	5:22:50 AM	H2 MFC set to  0.000000
1/26/2011	5:22:50 AM	BCl3 MFC set to  0.000000
1/26/2011	5:22:50 AM	PHl3 MFC set to  0.000000
1/26/2011	5:22:50 AM	SiCl4 MFC set to  0.000000
1/26/2011	5:22:50 AM	Bypass solenoid MFC set to  0.000000
1/26/2011	5:22:50 AM	Tube furnace set to 0
1/26/2011	5:23:25 AM	Helium valve closed
1/26/2011	5:23:25 AM	H2 valve closed
1/26/2011	5:23:25 AM	BCl3 valve closed
1/26/2011	5:23:25 AM	PH3 valve closed
1/26/2011	5:23:25 AM	SiCl4 pre valve closed
1/26/2011	5:23:25 AM	SiCl4 post valve closed
1/26/2011	5:23:25 AM	Bubbler valve closed
1/26/2011	5:23:25 AM	Main Vac valve opened
1/26/2011	5:23:25 AM	Bypass valve opened
1/26/2011	5:23:25 AM	Helium MFC set to  0.000000
1/26/2011	5:23:25 AM	H2 MFC set to  0.000000
1/26/2011	5:23:25 AM	BCl3 MFC set to  0.000000
1/26/2011	5:23:25 AM	PHl3 MFC set to  0.000000
1/26/2011	5:23:25 AM	SiCl4 MFC set to  0.000000
1/26/2011	5:23:25 AM	Bypass solenoid MFC set to  0.000000
1/26/2011	5:23:25 AM	Tube furnace set to 0
1/26/2011	5:23:25 AM	Run finished at 5:23 AM
1/26/2011	5:23:25 AM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
1/26/2011	5:23:48 AM	Tube furnace set to 150
1/26/2011	5:26:54 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\10x_he_purgepump.xml
1/26/2011	5:27:06 AM	Recipe started at 5:27 AM
1/26/2011	5:27:06 AM	Helium valve closed
1/26/2011	5:27:06 AM	H2 valve closed
1/26/2011	5:27:06 AM	BCl3 valve closed
1/26/2011	5:27:06 AM	PH3 valve closed
1/26/2011	5:27:06 AM	SiCl4 pre valve closed
1/26/2011	5:27:06 AM	SiCl4 post valve closed
1/26/2011	5:27:06 AM	Main Vac valve closed
1/26/2011	5:27:06 AM	Bubbler valve closed
1/26/2011	5:27:06 AM	Bypass valve opened
1/26/2011	5:27:06 AM	Helium MFC set to  0.000000
1/26/2011	5:27:06 AM	H2 MFC set to  0.000000
1/26/2011	5:27:06 AM	BCl3 MFC set to  0.000000
1/26/2011	5:27:06 AM	PHl3 MFC set to  0.000000
1/26/2011	5:27:06 AM	SiCl4 MFC set to  0.000000
1/26/2011	5:27:06 AM	Bypass solenoid MFC set to  0.000000
1/26/2011	5:27:06 AM	Tube furnace set to 0
1/26/2011	5:27:06 AM	Helium valve closed
1/26/2011	5:27:06 AM	H2 valve closed
1/26/2011	5:27:06 AM	BCl3 valve closed
1/26/2011	5:27:06 AM	PH3 valve closed
1/26/2011	5:27:06 AM	SiCl4 pre valve closed
1/26/2011	5:27:06 AM	SiCl4 post valve closed
1/26/2011	5:27:06 AM	Bubbler valve closed
1/26/2011	5:27:06 AM	Main Vac valve opened
1/26/2011	5:27:06 AM	Bypass valve opened
1/26/2011	5:27:06 AM	Helium MFC set to  0.000000
1/26/2011	5:27:06 AM	H2 MFC set to  0.000000
1/26/2011	5:27:06 AM	BCl3 MFC set to  0.000000
1/26/2011	5:27:06 AM	PHl3 MFC set to  0.000000
1/26/2011	5:27:06 AM	SiCl4 MFC set to  0.000000
1/26/2011	5:27:06 AM	Bypass solenoid MFC set to  0.000000
1/26/2011	5:27:07 AM	Tube furnace set to 0
1/26/2011	5:28:07 AM	H2 valve closed
1/26/2011	5:28:07 AM	BCl3 valve closed
1/26/2011	5:28:07 AM	PH3 valve closed
1/26/2011	5:28:07 AM	SiCl4 pre valve closed
1/26/2011	5:28:07 AM	SiCl4 post valve closed
1/26/2011	5:28:07 AM	Bubbler valve closed
1/26/2011	5:28:07 AM	Helium valve opened
1/26/2011	5:28:07 AM	Main Vac valve opened
1/26/2011	5:28:07 AM	Bypass valve opened
1/26/2011	5:28:07 AM	Helium MFC set to  100.000000
1/26/2011	5:28:07 AM	H2 MFC set to  0.000000
1/26/2011	5:28:07 AM	BCl3 MFC set to  0.000000
1/26/2011	5:28:07 AM	PHl3 MFC set to  0.000000
1/26/2011	5:28:07 AM	SiCl4 MFC set to  0.000000
1/26/2011	5:28:07 AM	Bypass solenoid MFC set to  0.000000
1/26/2011	5:28:07 AM	Tube furnace set to 0
1/26/2011	5:29:07 AM	Helium valve closed
1/26/2011	5:29:07 AM	H2 valve closed
1/26/2011	5:29:07 AM	BCl3 valve closed
1/26/2011	5:29:07 AM	PH3 valve closed
1/26/2011	5:29:07 AM	SiCl4 pre valve closed
1/26/2011	5:29:07 AM	SiCl4 post valve closed
1/26/2011	5:29:07 AM	Bubbler valve closed
1/26/2011	5:29:07 AM	Main Vac valve opened
1/26/2011	5:29:07 AM	Bypass valve opened
1/26/2011	5:29:07 AM	Helium MFC set to  0.000000
1/26/2011	5:29:07 AM	H2 MFC set to  0.000000
1/26/2011	5:29:07 AM	BCl3 MFC set to  0.000000
1/26/2011	5:29:07 AM	PHl3 MFC set to  0.000000
1/26/2011	5:29:07 AM	SiCl4 MFC set to  0.000000
1/26/2011	5:29:07 AM	Bypass solenoid MFC set to  0.000000
1/26/2011	5:29:07 AM	Tube furnace set to 0
1/26/2011	5:30:07 AM	H2 valve closed
1/26/2011	5:30:07 AM	BCl3 valve closed
1/26/2011	5:30:07 AM	PH3 valve closed
1/26/2011	5:30:07 AM	SiCl4 pre valve closed
1/26/2011	5:30:07 AM	SiCl4 post valve closed
1/26/2011	5:30:07 AM	Bubbler valve closed
1/26/2011	5:30:07 AM	Helium valve opened
1/26/2011	5:30:07 AM	Main Vac valve opened
1/26/2011	5:30:07 AM	Bypass valve opened
1/26/2011	5:30:07 AM	Helium MFC set to  100.000000
1/26/2011	5:30:07 AM	H2 MFC set to  0.000000
1/26/2011	5:30:07 AM	BCl3 MFC set to  0.000000
1/26/2011	5:30:07 AM	PHl3 MFC set to  0.000000
1/26/2011	5:30:07 AM	SiCl4 MFC set to  0.000000
1/26/2011	5:30:07 AM	Bypass solenoid MFC set to  0.000000
1/26/2011	5:30:07 AM	Tube furnace set to 0
1/26/2011	5:31:07 AM	Helium valve closed
1/26/2011	5:31:07 AM	H2 valve closed
1/26/2011	5:31:07 AM	BCl3 valve closed
1/26/2011	5:31:07 AM	PH3 valve closed
1/26/2011	5:31:07 AM	SiCl4 pre valve closed
1/26/2011	5:31:07 AM	SiCl4 post valve closed
1/26/2011	5:31:07 AM	Bubbler valve closed
1/26/2011	5:31:07 AM	Main Vac valve opened
1/26/2011	5:31:07 AM	Bypass valve opened
1/26/2011	5:31:07 AM	Helium MFC set to  0.000000
1/26/2011	5:31:07 AM	H2 MFC set to  0.000000
1/26/2011	5:31:07 AM	BCl3 MFC set to  0.000000
1/26/2011	5:31:07 AM	PHl3 MFC set to  0.000000
1/26/2011	5:31:07 AM	SiCl4 MFC set to  0.000000
1/26/2011	5:31:07 AM	Bypass solenoid MFC set to  0.000000
1/26/2011	5:31:07 AM	Tube furnace set to 0
1/26/2011	5:32:07 AM	H2 valve closed
1/26/2011	5:32:07 AM	BCl3 valve closed
1/26/2011	5:32:07 AM	PH3 valve closed
1/26/2011	5:32:07 AM	SiCl4 pre valve closed
1/26/2011	5:32:07 AM	SiCl4 post valve closed
1/26/2011	5:32:07 AM	Bubbler valve closed
1/26/2011	5:32:07 AM	Helium valve opened
1/26/2011	5:32:07 AM	Main Vac valve opened
1/26/2011	5:32:07 AM	Bypass valve opened
1/26/2011	5:32:07 AM	Helium MFC set to  100.000000
1/26/2011	5:32:07 AM	H2 MFC set to  0.000000
1/26/2011	5:32:07 AM	BCl3 MFC set to  0.000000
1/26/2011	5:32:07 AM	PHl3 MFC set to  0.000000
1/26/2011	5:32:07 AM	SiCl4 MFC set to  0.000000
1/26/2011	5:32:07 AM	Bypass solenoid MFC set to  0.000000
1/26/2011	5:32:08 AM	Tube furnace set to 0
1/26/2011	5:33:08 AM	Helium valve closed
1/26/2011	5:33:08 AM	H2 valve closed
1/26/2011	5:33:08 AM	BCl3 valve closed
1/26/2011	5:33:08 AM	PH3 valve closed
1/26/2011	5:33:08 AM	SiCl4 pre valve closed
1/26/2011	5:33:08 AM	SiCl4 post valve closed
1/26/2011	5:33:08 AM	Bubbler valve closed
1/26/2011	5:33:08 AM	Main Vac valve opened
1/26/2011	5:33:08 AM	Bypass valve opened
1/26/2011	5:33:08 AM	Helium MFC set to  0.000000
1/26/2011	5:33:08 AM	H2 MFC set to  0.000000
1/26/2011	5:33:08 AM	BCl3 MFC set to  0.000000
1/26/2011	5:33:08 AM	PHl3 MFC set to  0.000000
1/26/2011	5:33:08 AM	SiCl4 MFC set to  0.000000
1/26/2011	5:33:08 AM	Bypass solenoid MFC set to  0.000000
1/26/2011	5:33:08 AM	Tube furnace set to 0
1/26/2011	5:34:08 AM	H2 valve closed
1/26/2011	5:34:08 AM	BCl3 valve closed
1/26/2011	5:34:08 AM	PH3 valve closed
1/26/2011	5:34:08 AM	SiCl4 pre valve closed
1/26/2011	5:34:08 AM	SiCl4 post valve closed
1/26/2011	5:34:08 AM	Bubbler valve closed
1/26/2011	5:34:08 AM	Helium valve opened
1/26/2011	5:34:08 AM	Main Vac valve opened
1/26/2011	5:34:08 AM	Bypass valve opened
1/26/2011	5:34:08 AM	Helium MFC set to  100.000000
1/26/2011	5:34:08 AM	H2 MFC set to  0.000000
1/26/2011	5:34:08 AM	BCl3 MFC set to  0.000000
1/26/2011	5:34:08 AM	PHl3 MFC set to  0.000000
1/26/2011	5:34:08 AM	SiCl4 MFC set to  0.000000
1/26/2011	5:34:08 AM	Bypass solenoid MFC set to  0.000000
1/26/2011	5:34:08 AM	Tube furnace set to 0
1/26/2011	5:35:08 AM	Helium valve closed
1/26/2011	5:35:08 AM	H2 valve closed
1/26/2011	5:35:08 AM	BCl3 valve closed
1/26/2011	5:35:08 AM	PH3 valve closed
1/26/2011	5:35:08 AM	SiCl4 pre valve closed
1/26/2011	5:35:08 AM	SiCl4 post valve closed
1/26/2011	5:35:08 AM	Bubbler valve closed
1/26/2011	5:35:08 AM	Main Vac valve opened
1/26/2011	5:35:08 AM	Bypass valve opened
1/26/2011	5:35:08 AM	Helium MFC set to  0.000000
1/26/2011	5:35:08 AM	H2 MFC set to  0.000000
1/26/2011	5:35:08 AM	BCl3 MFC set to  0.000000
1/26/2011	5:35:08 AM	PHl3 MFC set to  0.000000
1/26/2011	5:35:08 AM	SiCl4 MFC set to  0.000000
1/26/2011	5:35:08 AM	Bypass solenoid MFC set to  0.000000
1/26/2011	5:35:08 AM	Tube furnace set to 0
1/26/2011	5:36:08 AM	H2 valve closed
1/26/2011	5:36:08 AM	BCl3 valve closed
1/26/2011	5:36:08 AM	PH3 valve closed
1/26/2011	5:36:08 AM	SiCl4 pre valve closed
1/26/2011	5:36:08 AM	SiCl4 post valve closed
1/26/2011	5:36:08 AM	Bubbler valve closed
1/26/2011	5:36:08 AM	Helium valve opened
1/26/2011	5:36:08 AM	Main Vac valve opened
1/26/2011	5:36:08 AM	Bypass valve opened
1/26/2011	5:36:08 AM	Helium MFC set to  100.000000
1/26/2011	5:36:08 AM	H2 MFC set to  0.000000
1/26/2011	5:36:08 AM	BCl3 MFC set to  0.000000
1/26/2011	5:36:08 AM	PHl3 MFC set to  0.000000
1/26/2011	5:36:08 AM	SiCl4 MFC set to  0.000000
1/26/2011	5:36:08 AM	Bypass solenoid MFC set to  0.000000
1/26/2011	5:36:08 AM	Tube furnace set to 0
1/26/2011	5:37:08 AM	Helium valve closed
1/26/2011	5:37:08 AM	H2 valve closed
1/26/2011	5:37:08 AM	BCl3 valve closed
1/26/2011	5:37:08 AM	PH3 valve closed
1/26/2011	5:37:08 AM	SiCl4 pre valve closed
1/26/2011	5:37:08 AM	SiCl4 post valve closed
1/26/2011	5:37:08 AM	Bubbler valve closed
1/26/2011	5:37:08 AM	Main Vac valve opened
1/26/2011	5:37:08 AM	Bypass valve opened
1/26/2011	5:37:08 AM	Helium MFC set to  0.000000
1/26/2011	5:37:08 AM	H2 MFC set to  0.000000
1/26/2011	5:37:08 AM	BCl3 MFC set to  0.000000
1/26/2011	5:37:08 AM	PHl3 MFC set to  0.000000
1/26/2011	5:37:08 AM	SiCl4 MFC set to  0.000000
1/26/2011	5:37:08 AM	Bypass solenoid MFC set to  0.000000
1/26/2011	5:37:09 AM	Tube furnace set to 0
1/26/2011	5:38:09 AM	H2 valve closed
1/26/2011	5:38:09 AM	BCl3 valve closed
1/26/2011	5:38:09 AM	PH3 valve closed
1/26/2011	5:38:09 AM	SiCl4 pre valve closed
1/26/2011	5:38:09 AM	SiCl4 post valve closed
1/26/2011	5:38:09 AM	Bubbler valve closed
1/26/2011	5:38:09 AM	Helium valve opened
1/26/2011	5:38:09 AM	Main Vac valve opened
1/26/2011	5:38:09 AM	Bypass valve opened
1/26/2011	5:38:09 AM	Helium MFC set to  100.000000
1/26/2011	5:38:09 AM	H2 MFC set to  0.000000
1/26/2011	5:38:09 AM	BCl3 MFC set to  0.000000
1/26/2011	5:38:09 AM	PHl3 MFC set to  0.000000
1/26/2011	5:38:09 AM	SiCl4 MFC set to  0.000000
1/26/2011	5:38:09 AM	Bypass solenoid MFC set to  0.000000
1/26/2011	5:38:09 AM	Tube furnace set to 0
1/26/2011	5:39:09 AM	Helium valve closed
1/26/2011	5:39:09 AM	H2 valve closed
1/26/2011	5:39:09 AM	BCl3 valve closed
1/26/2011	5:39:09 AM	PH3 valve closed
1/26/2011	5:39:09 AM	SiCl4 pre valve closed
1/26/2011	5:39:09 AM	SiCl4 post valve closed
1/26/2011	5:39:09 AM	Bubbler valve closed
1/26/2011	5:39:09 AM	Main Vac valve opened
1/26/2011	5:39:09 AM	Bypass valve opened
1/26/2011	5:39:09 AM	Helium MFC set to  0.000000
1/26/2011	5:39:09 AM	H2 MFC set to  0.000000
1/26/2011	5:39:09 AM	BCl3 MFC set to  0.000000
1/26/2011	5:39:09 AM	PHl3 MFC set to  0.000000
1/26/2011	5:39:09 AM	SiCl4 MFC set to  0.000000
1/26/2011	5:39:09 AM	Bypass solenoid MFC set to  0.000000
1/26/2011	5:39:09 AM	Tube furnace set to 0
1/26/2011	5:40:09 AM	H2 valve closed
1/26/2011	5:40:09 AM	BCl3 valve closed
1/26/2011	5:40:09 AM	PH3 valve closed
1/26/2011	5:40:09 AM	SiCl4 pre valve closed
1/26/2011	5:40:09 AM	SiCl4 post valve closed
1/26/2011	5:40:09 AM	Bubbler valve closed
1/26/2011	5:40:09 AM	Helium valve opened
1/26/2011	5:40:09 AM	Main Vac valve opened
1/26/2011	5:40:09 AM	Bypass valve opened
1/26/2011	5:40:09 AM	Helium MFC set to  100.000000
1/26/2011	5:40:09 AM	H2 MFC set to  0.000000
1/26/2011	5:40:09 AM	BCl3 MFC set to  0.000000
1/26/2011	5:40:09 AM	PHl3 MFC set to  0.000000
1/26/2011	5:40:09 AM	SiCl4 MFC set to  0.000000
1/26/2011	5:40:09 AM	Bypass solenoid MFC set to  0.000000
1/26/2011	5:40:09 AM	Tube furnace set to 0
1/26/2011	5:41:09 AM	Helium valve closed
1/26/2011	5:41:09 AM	H2 valve closed
1/26/2011	5:41:09 AM	BCl3 valve closed
1/26/2011	5:41:09 AM	PH3 valve closed
1/26/2011	5:41:09 AM	SiCl4 pre valve closed
1/26/2011	5:41:09 AM	SiCl4 post valve closed
1/26/2011	5:41:09 AM	Bubbler valve closed
1/26/2011	5:41:09 AM	Main Vac valve opened
1/26/2011	5:41:09 AM	Bypass valve opened
1/26/2011	5:41:09 AM	Helium MFC set to  0.000000
1/26/2011	5:41:09 AM	H2 MFC set to  0.000000
1/26/2011	5:41:09 AM	BCl3 MFC set to  0.000000
1/26/2011	5:41:09 AM	PHl3 MFC set to  0.000000
1/26/2011	5:41:09 AM	SiCl4 MFC set to  0.000000
1/26/2011	5:41:09 AM	Bypass solenoid MFC set to  0.000000
1/26/2011	5:41:09 AM	Tube furnace set to 0
1/26/2011	5:42:09 AM	H2 valve closed
1/26/2011	5:42:09 AM	BCl3 valve closed
1/26/2011	5:42:09 AM	PH3 valve closed
1/26/2011	5:42:09 AM	SiCl4 pre valve closed
1/26/2011	5:42:09 AM	SiCl4 post valve closed
1/26/2011	5:42:09 AM	Bubbler valve closed
1/26/2011	5:42:09 AM	Helium valve opened
1/26/2011	5:42:09 AM	Main Vac valve opened
1/26/2011	5:42:09 AM	Bypass valve opened
1/26/2011	5:42:09 AM	Helium MFC set to  100.000000
1/26/2011	5:42:09 AM	H2 MFC set to  0.000000
1/26/2011	5:42:09 AM	BCl3 MFC set to  0.000000
1/26/2011	5:42:09 AM	PHl3 MFC set to  0.000000
1/26/2011	5:42:09 AM	SiCl4 MFC set to  0.000000
1/26/2011	5:42:09 AM	Bypass solenoid MFC set to  0.000000
1/26/2011	5:42:10 AM	Tube furnace set to 0
1/26/2011	5:42:39 AM	Run aborted at 5:42 AM
1/26/2011	5:42:39 AM	Helium valve closed
1/26/2011	5:42:39 AM	H2 valve closed
1/26/2011	5:42:39 AM	BCl3 valve closed
1/26/2011	5:42:39 AM	PH3 valve closed
1/26/2011	5:42:39 AM	SiCl4 pre valve closed
1/26/2011	5:42:39 AM	SiCl4 post valve closed
1/26/2011	5:42:39 AM	Bypass valve closed
1/26/2011	5:42:39 AM	Main Vac valve closed
1/26/2011	5:42:39 AM	Bubbler valve closed
1/26/2011	5:42:39 AM	Helium MFC set to  0.000000
1/26/2011	5:42:39 AM	H2 MFC set to  0.000000
1/26/2011	5:42:39 AM	BCl3 MFC set to  0.000000
1/26/2011	5:42:39 AM	PHl3 MFC set to  0.000000
1/26/2011	5:42:39 AM	SiCl4 MFC set to  0.000000
1/26/2011	5:42:40 AM	Tube furnace set to 0
1/26/2011	5:42:40 AM	Completed task C:\Users\Si CVD\CVD_Control\tasks\10x_he_purgepump.xml
1/26/2011	5:42:41 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
1/26/2011	5:42:42 AM	Recipe started at 5:42 AM
1/26/2011	5:42:42 AM	Helium valve closed
1/26/2011	5:42:42 AM	H2 valve closed
1/26/2011	5:42:42 AM	BCl3 valve closed
1/26/2011	5:42:42 AM	PH3 valve closed
1/26/2011	5:42:42 AM	SiCl4 pre valve closed
1/26/2011	5:42:42 AM	SiCl4 post valve closed
1/26/2011	5:42:42 AM	Main Vac valve closed
1/26/2011	5:42:42 AM	Bubbler valve closed
1/26/2011	5:42:42 AM	Bypass valve opened
1/26/2011	5:42:42 AM	Helium MFC set to  0.000000
1/26/2011	5:42:42 AM	H2 MFC set to  0.000000
1/26/2011	5:42:42 AM	BCl3 MFC set to  0.000000
1/26/2011	5:42:42 AM	PHl3 MFC set to  0.000000
1/26/2011	5:42:42 AM	SiCl4 MFC set to  0.000000
1/26/2011	5:42:42 AM	Bypass solenoid MFC set to  0.000000
1/26/2011	5:42:42 AM	Tube furnace set to 0
1/26/2011	5:42:42 AM	Helium valve closed
1/26/2011	5:42:42 AM	H2 valve closed
1/26/2011	5:42:42 AM	BCl3 valve closed
1/26/2011	5:42:42 AM	PH3 valve closed
1/26/2011	5:42:42 AM	SiCl4 pre valve closed
1/26/2011	5:42:42 AM	SiCl4 post valve closed
1/26/2011	5:42:42 AM	Bubbler valve closed
1/26/2011	5:42:42 AM	Main Vac valve opened
1/26/2011	5:42:42 AM	Bypass valve opened
1/26/2011	5:42:42 AM	Helium MFC set to  0.000000
1/26/2011	5:42:42 AM	H2 MFC set to  0.000000
1/26/2011	5:42:42 AM	BCl3 MFC set to  0.000000
1/26/2011	5:42:42 AM	PHl3 MFC set to  0.000000
1/26/2011	5:42:42 AM	SiCl4 MFC set to  0.000000
1/26/2011	5:42:42 AM	Bypass solenoid MFC set to  0.000000
1/26/2011	5:42:42 AM	Tube furnace set to 0
1/26/2011	5:42:42 AM	Run finished at 5:42 AM
1/26/2011	5:42:42 AM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
1/26/2011	5:44:14 AM	Recipe started at 5:44 AM
1/26/2011	5:44:14 AM	Helium valve closed
1/26/2011	5:44:14 AM	BCl3 valve closed
1/26/2011	5:44:14 AM	PH3 valve closed
1/26/2011	5:44:14 AM	SiCl4 pre valve closed
1/26/2011	5:44:14 AM	SiCl4 post valve closed
1/26/2011	5:44:14 AM	Main Vac valve closed
1/26/2011	5:44:14 AM	Bypass valve closed
1/26/2011	5:44:14 AM	Bubbler valve closed
1/26/2011	5:44:14 AM	H2 valve opened
1/26/2011	5:44:14 AM	Helium MFC set to  0.000000
1/26/2011	5:44:14 AM	H2 MFC set to  500.000000
1/26/2011	5:44:14 AM	BCl3 MFC set to  0.000000
1/26/2011	5:44:14 AM	PHl3 MFC set to  0.000000
1/26/2011	5:44:14 AM	SiCl4 MFC set to  0.000000
1/26/2011	5:44:14 AM	Bypass solenoid MFC set to  0.000000
1/26/2011	5:44:14 AM	Tube furnace set to 0
1/26/2011	5:45:31 AM	Helium valve closed
1/26/2011	5:45:31 AM	BCl3 valve closed
1/26/2011	5:45:31 AM	PH3 valve closed
1/26/2011	5:45:31 AM	SiCl4 pre valve closed
1/26/2011	5:45:31 AM	SiCl4 post valve closed
1/26/2011	5:45:31 AM	Main Vac valve closed
1/26/2011	5:45:31 AM	Bypass valve closed
1/26/2011	5:45:31 AM	H2 valve opened
1/26/2011	5:45:31 AM	Bubbler valve opened
1/26/2011	5:45:31 AM	Helium MFC set to  0.000000
1/26/2011	5:45:31 AM	H2 MFC set to  500.000000
1/26/2011	5:45:31 AM	BCl3 MFC set to  0.000000
1/26/2011	5:45:31 AM	PHl3 MFC set to  0.000000
1/26/2011	5:45:31 AM	SiCl4 MFC set to  0.000000
1/26/2011	5:45:31 AM	Bypass solenoid MFC set to  0.000000
1/26/2011	5:45:31 AM	Tube furnace set to 1000
1/26/2011	6:05:31 AM	Helium valve closed
1/26/2011	6:05:31 AM	PH3 valve closed
1/26/2011	6:05:31 AM	Main Vac valve closed
1/26/2011	6:05:31 AM	Bypass valve closed
1/26/2011	6:05:31 AM	H2 valve opened
1/26/2011	6:05:31 AM	BCl3 valve opened
1/26/2011	6:05:31 AM	SiCl4 pre valve opened
1/26/2011	6:05:31 AM	SiCl4 post valve opened
1/26/2011	6:05:31 AM	Bubbler valve opened
1/26/2011	6:05:31 AM	Helium MFC set to  0.000000
1/26/2011	6:05:31 AM	H2 MFC set to  500.000000
1/26/2011	6:05:31 AM	BCl3 MFC set to  5.000000
1/26/2011	6:05:31 AM	PHl3 MFC set to  0.000000
1/26/2011	6:05:31 AM	SiCl4 MFC set to  50.000000
1/26/2011	6:05:31 AM	Bypass solenoid MFC set to  0.000000
1/26/2011	6:05:31 AM	Tube furnace set to 1000
1/26/2011	6:25:31 AM	H2 valve closed
1/26/2011	6:25:31 AM	BCl3 valve closed
1/26/2011	6:25:31 AM	PH3 valve closed
1/26/2011	6:25:31 AM	SiCl4 pre valve closed
1/26/2011	6:25:31 AM	SiCl4 post valve closed
1/26/2011	6:25:31 AM	Main Vac valve closed
1/26/2011	6:25:31 AM	Bypass valve closed
1/26/2011	6:25:31 AM	Helium valve opened
1/26/2011	6:25:31 AM	Bubbler valve opened
1/26/2011	6:25:31 AM	Helium MFC set to  500.000000
1/26/2011	6:25:31 AM	H2 MFC set to  0.000000
1/26/2011	6:25:31 AM	BCl3 MFC set to  0.000000
1/26/2011	6:25:31 AM	PHl3 MFC set to  0.000000
1/26/2011	6:25:31 AM	SiCl4 MFC set to  0.000000
1/26/2011	6:25:31 AM	Bypass solenoid MFC set to  0.000000
1/26/2011	6:25:32 AM	Tube furnace set to 0
1/26/2011	6:45:32 AM	Helium valve closed
1/26/2011	6:45:32 AM	H2 valve closed
1/26/2011	6:45:32 AM	BCl3 valve closed
1/26/2011	6:45:32 AM	PH3 valve closed
1/26/2011	6:45:32 AM	SiCl4 pre valve closed
1/26/2011	6:45:32 AM	SiCl4 post valve closed
1/26/2011	6:45:32 AM	Main Vac valve closed
1/26/2011	6:45:32 AM	Bypass valve closed
1/26/2011	6:45:32 AM	Bubbler valve closed
1/26/2011	6:45:32 AM	Helium MFC set to  0.000000
1/26/2011	6:45:32 AM	H2 MFC set to  0.000000
1/26/2011	6:45:32 AM	BCl3 MFC set to  0.000000
1/26/2011	6:45:32 AM	PHl3 MFC set to  0.000000
1/26/2011	6:45:32 AM	SiCl4 MFC set to  0.000000
1/26/2011	6:45:32 AM	Bypass solenoid MFC set to  0.000000
1/26/2011	6:45:32 AM	Tube furnace set to 0
1/26/2011	6:45:32 AM	Run finished at 6:45 AM
1/26/2011	7:31:09 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
1/26/2011	7:31:09 AM	Recipe started at 7:31 AM
1/26/2011	7:31:09 AM	H2 valve closed
1/26/2011	7:31:09 AM	BCl3 valve closed
1/26/2011	7:31:09 AM	PH3 valve closed
1/26/2011	7:31:09 AM	SiCl4 pre valve closed
1/26/2011	7:31:09 AM	SiCl4 post valve closed
1/26/2011	7:31:09 AM	Main Vac valve closed
1/26/2011	7:31:09 AM	Bypass valve closed
1/26/2011	7:31:09 AM	Bubbler valve closed
1/26/2011	7:31:09 AM	Helium valve opened
1/26/2011	7:31:09 AM	Helium MFC set to  500.000000
1/26/2011	7:31:09 AM	H2 MFC set to  0.000000
1/26/2011	7:31:09 AM	BCl3 MFC set to  0.000000
1/26/2011	7:31:09 AM	PHl3 MFC set to  0.000000
1/26/2011	7:31:09 AM	SiCl4 MFC set to  0.000000
1/26/2011	7:31:09 AM	Bypass solenoid MFC set to  0.000000
1/26/2011	7:31:10 AM	Tube furnace set to 0
1/26/2011	7:31:12 AM	Helium valve closed
1/26/2011	7:31:12 AM	H2 valve closed
1/26/2011	7:31:12 AM	BCl3 valve closed
1/26/2011	7:31:12 AM	PH3 valve closed
1/26/2011	7:31:12 AM	SiCl4 pre valve closed
1/26/2011	7:31:12 AM	SiCl4 post valve closed
1/26/2011	7:31:12 AM	Main Vac valve closed
1/26/2011	7:31:12 AM	Bypass valve closed
1/26/2011	7:31:12 AM	Bubbler valve closed
1/26/2011	7:31:12 AM	Helium MFC set to  0.000000
1/26/2011	7:31:12 AM	H2 MFC set to  0.000000
1/26/2011	7:31:12 AM	BCl3 MFC set to  0.000000
1/26/2011	7:31:12 AM	PHl3 MFC set to  0.000000
1/26/2011	7:31:12 AM	SiCl4 MFC set to  0.000000
1/26/2011	7:31:12 AM	Bypass solenoid MFC set to  0.000000
1/26/2011	7:31:12 AM	Tube furnace set to 0
1/26/2011	7:31:13 AM	Run finished at 7:31 AM
1/26/2011	7:31:13 AM	Completed task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
1/26/2011	7:50:28 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\10x_he_purgepump.xml
1/26/2011	7:50:41 AM	Recipe started at 7:50 AM
1/26/2011	7:50:41 AM	Helium valve closed
1/26/2011	7:50:41 AM	H2 valve closed
1/26/2011	7:50:41 AM	BCl3 valve closed
1/26/2011	7:50:41 AM	PH3 valve closed
1/26/2011	7:50:41 AM	SiCl4 pre valve closed
1/26/2011	7:50:41 AM	SiCl4 post valve closed
1/26/2011	7:50:41 AM	Main Vac valve closed
1/26/2011	7:50:41 AM	Bubbler valve closed
1/26/2011	7:50:41 AM	Bypass valve opened
1/26/2011	7:50:41 AM	Helium MFC set to  0.000000
1/26/2011	7:50:41 AM	H2 MFC set to  0.000000
1/26/2011	7:50:41 AM	BCl3 MFC set to  0.000000
1/26/2011	7:50:41 AM	PHl3 MFC set to  0.000000
1/26/2011	7:50:41 AM	SiCl4 MFC set to  0.000000
1/26/2011	7:50:41 AM	Bypass solenoid MFC set to  0.000000
1/26/2011	7:50:41 AM	Tube furnace set to 0
1/26/2011	7:51:14 AM	Helium valve closed
1/26/2011	7:51:14 AM	H2 valve closed
1/26/2011	7:51:14 AM	BCl3 valve closed
1/26/2011	7:51:14 AM	PH3 valve closed
1/26/2011	7:51:14 AM	SiCl4 pre valve closed
1/26/2011	7:51:14 AM	SiCl4 post valve closed
1/26/2011	7:51:14 AM	Bubbler valve closed
1/26/2011	7:51:14 AM	Main Vac valve opened
1/26/2011	7:51:14 AM	Bypass valve opened
1/26/2011	7:51:14 AM	Helium MFC set to  0.000000
1/26/2011	7:51:14 AM	H2 MFC set to  0.000000
1/26/2011	7:51:14 AM	BCl3 MFC set to  0.000000
1/26/2011	7:51:14 AM	PHl3 MFC set to  0.000000
1/26/2011	7:51:14 AM	SiCl4 MFC set to  0.000000
1/26/2011	7:51:14 AM	Bypass solenoid MFC set to  0.000000
1/26/2011	7:51:14 AM	Tube furnace set to 0
1/26/2011	7:52:14 AM	H2 valve closed
1/26/2011	7:52:14 AM	BCl3 valve closed
1/26/2011	7:52:14 AM	PH3 valve closed
1/26/2011	7:52:14 AM	SiCl4 pre valve closed
1/26/2011	7:52:14 AM	SiCl4 post valve closed
1/26/2011	7:52:14 AM	Bubbler valve closed
1/26/2011	7:52:14 AM	Helium valve opened
1/26/2011	7:52:14 AM	Main Vac valve opened
1/26/2011	7:52:14 AM	Bypass valve opened
1/26/2011	7:52:14 AM	Helium MFC set to  100.000000
1/26/2011	7:52:14 AM	H2 MFC set to  0.000000
1/26/2011	7:52:14 AM	BCl3 MFC set to  0.000000
1/26/2011	7:52:14 AM	PHl3 MFC set to  0.000000
1/26/2011	7:52:14 AM	SiCl4 MFC set to  0.000000
1/26/2011	7:52:14 AM	Bypass solenoid MFC set to  0.000000
1/26/2011	7:52:14 AM	Tube furnace set to 0
1/26/2011	7:53:14 AM	Helium valve closed
1/26/2011	7:53:14 AM	H2 valve closed
1/26/2011	7:53:14 AM	BCl3 valve closed
1/26/2011	7:53:14 AM	PH3 valve closed
1/26/2011	7:53:14 AM	SiCl4 pre valve closed
1/26/2011	7:53:14 AM	SiCl4 post valve closed
1/26/2011	7:53:14 AM	Bubbler valve closed
1/26/2011	7:53:14 AM	Main Vac valve opened
1/26/2011	7:53:14 AM	Bypass valve opened
1/26/2011	7:53:14 AM	Helium MFC set to  0.000000
1/26/2011	7:53:14 AM	H2 MFC set to  0.000000
1/26/2011	7:53:14 AM	BCl3 MFC set to  0.000000
1/26/2011	7:53:14 AM	PHl3 MFC set to  0.000000
1/26/2011	7:53:14 AM	SiCl4 MFC set to  0.000000
1/26/2011	7:53:14 AM	Bypass solenoid MFC set to  0.000000
1/26/2011	7:53:14 AM	Tube furnace set to 0
1/26/2011	7:54:14 AM	H2 valve closed
1/26/2011	7:54:14 AM	BCl3 valve closed
1/26/2011	7:54:14 AM	PH3 valve closed
1/26/2011	7:54:14 AM	SiCl4 pre valve closed
1/26/2011	7:54:14 AM	SiCl4 post valve closed
1/26/2011	7:54:14 AM	Bubbler valve closed
1/26/2011	7:54:14 AM	Helium valve opened
1/26/2011	7:54:14 AM	Main Vac valve opened
1/26/2011	7:54:14 AM	Bypass valve opened
1/26/2011	7:54:14 AM	Helium MFC set to  100.000000
1/26/2011	7:54:14 AM	H2 MFC set to  0.000000
1/26/2011	7:54:14 AM	BCl3 MFC set to  0.000000
1/26/2011	7:54:14 AM	PHl3 MFC set to  0.000000
1/26/2011	7:54:14 AM	SiCl4 MFC set to  0.000000
1/26/2011	7:54:14 AM	Bypass solenoid MFC set to  0.000000
1/26/2011	7:54:14 AM	Tube furnace set to 0
1/26/2011	7:55:15 AM	Helium valve closed
1/26/2011	7:55:15 AM	H2 valve closed
1/26/2011	7:55:15 AM	BCl3 valve closed
1/26/2011	7:55:15 AM	PH3 valve closed
1/26/2011	7:55:15 AM	SiCl4 pre valve closed
1/26/2011	7:55:15 AM	SiCl4 post valve closed
1/26/2011	7:55:15 AM	Bubbler valve closed
1/26/2011	7:55:15 AM	Main Vac valve opened
1/26/2011	7:55:15 AM	Bypass valve opened
1/26/2011	7:55:15 AM	Helium MFC set to  0.000000
1/26/2011	7:55:15 AM	H2 MFC set to  0.000000
1/26/2011	7:55:15 AM	BCl3 MFC set to  0.000000
1/26/2011	7:55:15 AM	PHl3 MFC set to  0.000000
1/26/2011	7:55:15 AM	SiCl4 MFC set to  0.000000
1/26/2011	7:55:15 AM	Bypass solenoid MFC set to  0.000000
1/26/2011	7:55:15 AM	Tube furnace set to 0
1/26/2011	7:56:15 AM	H2 valve closed
1/26/2011	7:56:15 AM	BCl3 valve closed
1/26/2011	7:56:15 AM	PH3 valve closed
1/26/2011	7:56:15 AM	SiCl4 pre valve closed
1/26/2011	7:56:15 AM	SiCl4 post valve closed
1/26/2011	7:56:15 AM	Bubbler valve closed
1/26/2011	7:56:15 AM	Helium valve opened
1/26/2011	7:56:15 AM	Main Vac valve opened
1/26/2011	7:56:15 AM	Bypass valve opened
1/26/2011	7:56:15 AM	Helium MFC set to  100.000000
1/26/2011	7:56:15 AM	H2 MFC set to  0.000000
1/26/2011	7:56:15 AM	BCl3 MFC set to  0.000000
1/26/2011	7:56:15 AM	PHl3 MFC set to  0.000000
1/26/2011	7:56:15 AM	SiCl4 MFC set to  0.000000
1/26/2011	7:56:15 AM	Bypass solenoid MFC set to  0.000000
1/26/2011	7:56:15 AM	Tube furnace set to 0
1/26/2011	7:57:15 AM	Helium valve closed
1/26/2011	7:57:15 AM	H2 valve closed
1/26/2011	7:57:15 AM	BCl3 valve closed
1/26/2011	7:57:15 AM	PH3 valve closed
1/26/2011	7:57:15 AM	SiCl4 pre valve closed
1/26/2011	7:57:15 AM	SiCl4 post valve closed
1/26/2011	7:57:15 AM	Bubbler valve closed
1/26/2011	7:57:15 AM	Main Vac valve opened
1/26/2011	7:57:15 AM	Bypass valve opened
1/26/2011	7:57:15 AM	Helium MFC set to  0.000000
1/26/2011	7:57:15 AM	H2 MFC set to  0.000000
1/26/2011	7:57:15 AM	BCl3 MFC set to  0.000000
1/26/2011	7:57:15 AM	PHl3 MFC set to  0.000000
1/26/2011	7:57:15 AM	SiCl4 MFC set to  0.000000
1/26/2011	7:57:15 AM	Bypass solenoid MFC set to  0.000000
1/26/2011	7:57:15 AM	Tube furnace set to 0
1/26/2011	7:58:15 AM	H2 valve closed
1/26/2011	7:58:15 AM	BCl3 valve closed
1/26/2011	7:58:15 AM	PH3 valve closed
1/26/2011	7:58:15 AM	SiCl4 pre valve closed
1/26/2011	7:58:15 AM	SiCl4 post valve closed
1/26/2011	7:58:15 AM	Bubbler valve closed
1/26/2011	7:58:15 AM	Helium valve opened
1/26/2011	7:58:15 AM	Main Vac valve opened
1/26/2011	7:58:15 AM	Bypass valve opened
1/26/2011	7:58:15 AM	Helium MFC set to  100.000000
1/26/2011	7:58:15 AM	H2 MFC set to  0.000000
1/26/2011	7:58:15 AM	BCl3 MFC set to  0.000000
1/26/2011	7:58:15 AM	PHl3 MFC set to  0.000000
1/26/2011	7:58:15 AM	SiCl4 MFC set to  0.000000
1/26/2011	7:58:15 AM	Bypass solenoid MFC set to  0.000000
1/26/2011	7:58:15 AM	Tube furnace set to 0
1/26/2011	7:59:15 AM	Helium valve closed
1/26/2011	7:59:15 AM	H2 valve closed
1/26/2011	7:59:15 AM	BCl3 valve closed
1/26/2011	7:59:15 AM	PH3 valve closed
1/26/2011	7:59:15 AM	SiCl4 pre valve closed
1/26/2011	7:59:15 AM	SiCl4 post valve closed
1/26/2011	7:59:15 AM	Bubbler valve closed
1/26/2011	7:59:15 AM	Main Vac valve opened
1/26/2011	7:59:15 AM	Bypass valve opened
1/26/2011	7:59:15 AM	Helium MFC set to  0.000000
1/26/2011	7:59:15 AM	H2 MFC set to  0.000000
1/26/2011	7:59:15 AM	BCl3 MFC set to  0.000000
1/26/2011	7:59:15 AM	PHl3 MFC set to  0.000000
1/26/2011	7:59:15 AM	SiCl4 MFC set to  0.000000
1/26/2011	7:59:15 AM	Bypass solenoid MFC set to  0.000000
1/26/2011	7:59:16 AM	Tube furnace set to 0
1/26/2011	8:00:16 AM	H2 valve closed
1/26/2011	8:00:16 AM	BCl3 valve closed
1/26/2011	8:00:16 AM	PH3 valve closed
1/26/2011	8:00:16 AM	SiCl4 pre valve closed
1/26/2011	8:00:16 AM	SiCl4 post valve closed
1/26/2011	8:00:16 AM	Bubbler valve closed
1/26/2011	8:00:16 AM	Helium valve opened
1/26/2011	8:00:16 AM	Main Vac valve opened
1/26/2011	8:00:16 AM	Bypass valve opened
1/26/2011	8:00:16 AM	Helium MFC set to  100.000000
1/26/2011	8:00:16 AM	H2 MFC set to  0.000000
1/26/2011	8:00:16 AM	BCl3 MFC set to  0.000000
1/26/2011	8:00:16 AM	PHl3 MFC set to  0.000000
1/26/2011	8:00:16 AM	SiCl4 MFC set to  0.000000
1/26/2011	8:00:16 AM	Bypass solenoid MFC set to  0.000000
1/26/2011	8:00:16 AM	Tube furnace set to 0
1/26/2011	8:01:16 AM	Helium valve closed
1/26/2011	8:01:16 AM	H2 valve closed
1/26/2011	8:01:16 AM	BCl3 valve closed
1/26/2011	8:01:16 AM	PH3 valve closed
1/26/2011	8:01:16 AM	SiCl4 pre valve closed
1/26/2011	8:01:16 AM	SiCl4 post valve closed
1/26/2011	8:01:16 AM	Bubbler valve closed
1/26/2011	8:01:16 AM	Main Vac valve opened
1/26/2011	8:01:16 AM	Bypass valve opened
1/26/2011	8:01:16 AM	Helium MFC set to  0.000000
1/26/2011	8:01:16 AM	H2 MFC set to  0.000000
1/26/2011	8:01:16 AM	BCl3 MFC set to  0.000000
1/26/2011	8:01:16 AM	PHl3 MFC set to  0.000000
1/26/2011	8:01:16 AM	SiCl4 MFC set to  0.000000
1/26/2011	8:01:16 AM	Bypass solenoid MFC set to  0.000000
1/26/2011	8:01:16 AM	Tube furnace set to 0
1/26/2011	8:02:16 AM	H2 valve closed
1/26/2011	8:02:16 AM	BCl3 valve closed
1/26/2011	8:02:16 AM	PH3 valve closed
1/26/2011	8:02:16 AM	SiCl4 pre valve closed
1/26/2011	8:02:16 AM	SiCl4 post valve closed
1/26/2011	8:02:16 AM	Bubbler valve closed
1/26/2011	8:02:16 AM	Helium valve opened
1/26/2011	8:02:16 AM	Main Vac valve opened
1/26/2011	8:02:16 AM	Bypass valve opened
1/26/2011	8:02:16 AM	Helium MFC set to  100.000000
1/26/2011	8:02:16 AM	H2 MFC set to  0.000000
1/26/2011	8:02:16 AM	BCl3 MFC set to  0.000000
1/26/2011	8:02:16 AM	PHl3 MFC set to  0.000000
1/26/2011	8:02:16 AM	SiCl4 MFC set to  0.000000
1/26/2011	8:02:16 AM	Bypass solenoid MFC set to  0.000000
1/26/2011	8:02:16 AM	Tube furnace set to 0
1/26/2011	8:03:16 AM	Helium valve closed
1/26/2011	8:03:16 AM	H2 valve closed
1/26/2011	8:03:16 AM	BCl3 valve closed
1/26/2011	8:03:16 AM	PH3 valve closed
1/26/2011	8:03:16 AM	SiCl4 pre valve closed
1/26/2011	8:03:16 AM	SiCl4 post valve closed
1/26/2011	8:03:16 AM	Bubbler valve closed
1/26/2011	8:03:16 AM	Main Vac valve opened
1/26/2011	8:03:16 AM	Bypass valve opened
1/26/2011	8:03:16 AM	Helium MFC set to  0.000000
1/26/2011	8:03:16 AM	H2 MFC set to  0.000000
1/26/2011	8:03:16 AM	BCl3 MFC set to  0.000000
1/26/2011	8:03:16 AM	PHl3 MFC set to  0.000000
1/26/2011	8:03:16 AM	SiCl4 MFC set to  0.000000
1/26/2011	8:03:16 AM	Bypass solenoid MFC set to  0.000000
1/26/2011	8:03:16 AM	Tube furnace set to 0
1/26/2011	8:04:16 AM	H2 valve closed
1/26/2011	8:04:16 AM	BCl3 valve closed
1/26/2011	8:04:16 AM	PH3 valve closed
1/26/2011	8:04:16 AM	SiCl4 pre valve closed
1/26/2011	8:04:16 AM	SiCl4 post valve closed
1/26/2011	8:04:16 AM	Bubbler valve closed
1/26/2011	8:04:16 AM	Helium valve opened
1/26/2011	8:04:16 AM	Main Vac valve opened
1/26/2011	8:04:16 AM	Bypass valve opened
1/26/2011	8:04:16 AM	Helium MFC set to  100.000000
1/26/2011	8:04:16 AM	H2 MFC set to  0.000000
1/26/2011	8:04:16 AM	BCl3 MFC set to  0.000000
1/26/2011	8:04:16 AM	PHl3 MFC set to  0.000000
1/26/2011	8:04:16 AM	SiCl4 MFC set to  0.000000
1/26/2011	8:04:16 AM	Bypass solenoid MFC set to  0.000000
1/26/2011	8:04:17 AM	Tube furnace set to 0
1/26/2011	8:05:17 AM	Helium valve closed
1/26/2011	8:05:17 AM	H2 valve closed
1/26/2011	8:05:17 AM	BCl3 valve closed
1/26/2011	8:05:17 AM	PH3 valve closed
1/26/2011	8:05:17 AM	SiCl4 pre valve closed
1/26/2011	8:05:17 AM	SiCl4 post valve closed
1/26/2011	8:05:17 AM	Bubbler valve closed
1/26/2011	8:05:17 AM	Main Vac valve opened
1/26/2011	8:05:17 AM	Bypass valve opened
1/26/2011	8:05:17 AM	Helium MFC set to  0.000000
1/26/2011	8:05:17 AM	H2 MFC set to  0.000000
1/26/2011	8:05:17 AM	BCl3 MFC set to  0.000000
1/26/2011	8:05:17 AM	PHl3 MFC set to  0.000000
1/26/2011	8:05:17 AM	SiCl4 MFC set to  0.000000
1/26/2011	8:05:17 AM	Bypass solenoid MFC set to  0.000000
1/26/2011	8:05:17 AM	Tube furnace set to 0
1/26/2011	8:06:17 AM	H2 valve closed
1/26/2011	8:06:17 AM	BCl3 valve closed
1/26/2011	8:06:17 AM	PH3 valve closed
1/26/2011	8:06:17 AM	SiCl4 pre valve closed
1/26/2011	8:06:17 AM	SiCl4 post valve closed
1/26/2011	8:06:17 AM	Bubbler valve closed
1/26/2011	8:06:17 AM	Helium valve opened
1/26/2011	8:06:17 AM	Main Vac valve opened
1/26/2011	8:06:17 AM	Bypass valve opened
1/26/2011	8:06:17 AM	Helium MFC set to  100.000000
1/26/2011	8:06:17 AM	H2 MFC set to  0.000000
1/26/2011	8:06:17 AM	BCl3 MFC set to  0.000000
1/26/2011	8:06:17 AM	PHl3 MFC set to  0.000000
1/26/2011	8:06:17 AM	SiCl4 MFC set to  0.000000
1/26/2011	8:06:17 AM	Bypass solenoid MFC set to  0.000000
1/26/2011	8:06:17 AM	Tube furnace set to 0
1/26/2011	8:07:17 AM	Helium valve closed
1/26/2011	8:07:17 AM	H2 valve closed
1/26/2011	8:07:17 AM	BCl3 valve closed
1/26/2011	8:07:17 AM	PH3 valve closed
1/26/2011	8:07:17 AM	SiCl4 pre valve closed
1/26/2011	8:07:17 AM	SiCl4 post valve closed
1/26/2011	8:07:17 AM	Bubbler valve closed
1/26/2011	8:07:17 AM	Main Vac valve opened
1/26/2011	8:07:17 AM	Bypass valve opened
1/26/2011	8:07:17 AM	Helium MFC set to  0.000000
1/26/2011	8:07:17 AM	H2 MFC set to  0.000000
1/26/2011	8:07:17 AM	BCl3 MFC set to  0.000000
1/26/2011	8:07:17 AM	PHl3 MFC set to  0.000000
1/26/2011	8:07:17 AM	SiCl4 MFC set to  0.000000
1/26/2011	8:07:17 AM	Bypass solenoid MFC set to  0.000000
1/26/2011	8:07:17 AM	Tube furnace set to 0
1/26/2011	8:08:17 AM	H2 valve closed
1/26/2011	8:08:17 AM	BCl3 valve closed
1/26/2011	8:08:17 AM	PH3 valve closed
1/26/2011	8:08:17 AM	SiCl4 pre valve closed
1/26/2011	8:08:17 AM	SiCl4 post valve closed
1/26/2011	8:08:17 AM	Bubbler valve closed
1/26/2011	8:08:17 AM	Helium valve opened
1/26/2011	8:08:17 AM	Main Vac valve opened
1/26/2011	8:08:17 AM	Bypass valve opened
1/26/2011	8:08:17 AM	Helium MFC set to  100.000000
1/26/2011	8:08:17 AM	H2 MFC set to  0.000000
1/26/2011	8:08:17 AM	BCl3 MFC set to  0.000000
1/26/2011	8:08:17 AM	PHl3 MFC set to  0.000000
1/26/2011	8:08:17 AM	SiCl4 MFC set to  0.000000
1/26/2011	8:08:17 AM	Bypass solenoid MFC set to  0.000000
1/26/2011	8:08:17 AM	Tube furnace set to 0
1/26/2011	8:09:17 AM	Helium valve closed
1/26/2011	8:09:17 AM	H2 valve closed
1/26/2011	8:09:17 AM	BCl3 valve closed
1/26/2011	8:09:17 AM	PH3 valve closed
1/26/2011	8:09:17 AM	SiCl4 pre valve closed
1/26/2011	8:09:17 AM	SiCl4 post valve closed
1/26/2011	8:09:17 AM	Bubbler valve closed
1/26/2011	8:09:17 AM	Main Vac valve opened
1/26/2011	8:09:17 AM	Bypass valve opened
1/26/2011	8:09:17 AM	Helium MFC set to  0.000000
1/26/2011	8:09:17 AM	H2 MFC set to  0.000000
1/26/2011	8:09:17 AM	BCl3 MFC set to  0.000000
1/26/2011	8:09:17 AM	PHl3 MFC set to  0.000000
1/26/2011	8:09:17 AM	SiCl4 MFC set to  0.000000
1/26/2011	8:09:17 AM	Bypass solenoid MFC set to  0.000000
1/26/2011	8:09:18 AM	Tube furnace set to 0
1/26/2011	8:10:18 AM	H2 valve closed
1/26/2011	8:10:18 AM	BCl3 valve closed
1/26/2011	8:10:18 AM	PH3 valve closed
1/26/2011	8:10:18 AM	SiCl4 pre valve closed
1/26/2011	8:10:18 AM	SiCl4 post valve closed
1/26/2011	8:10:18 AM	Bubbler valve closed
1/26/2011	8:10:18 AM	Helium valve opened
1/26/2011	8:10:18 AM	Main Vac valve opened
1/26/2011	8:10:18 AM	Bypass valve opened
1/26/2011	8:10:18 AM	Helium MFC set to  100.000000
1/26/2011	8:10:18 AM	H2 MFC set to  0.000000
1/26/2011	8:10:18 AM	BCl3 MFC set to  0.000000
1/26/2011	8:10:18 AM	PHl3 MFC set to  0.000000
1/26/2011	8:10:18 AM	SiCl4 MFC set to  0.000000
1/26/2011	8:10:18 AM	Bypass solenoid MFC set to  0.000000
1/26/2011	8:10:18 AM	Tube furnace set to 0
1/26/2011	8:11:18 AM	Helium valve closed
1/26/2011	8:11:18 AM	H2 valve closed
1/26/2011	8:11:18 AM	BCl3 valve closed
1/26/2011	8:11:18 AM	PH3 valve closed
1/26/2011	8:11:18 AM	SiCl4 pre valve closed
1/26/2011	8:11:18 AM	SiCl4 post valve closed
1/26/2011	8:11:18 AM	Bubbler valve closed
1/26/2011	8:11:18 AM	Main Vac valve opened
1/26/2011	8:11:18 AM	Bypass valve opened
1/26/2011	8:11:18 AM	Helium MFC set to  0.000000
1/26/2011	8:11:18 AM	H2 MFC set to  0.000000
1/26/2011	8:11:18 AM	BCl3 MFC set to  0.000000
1/26/2011	8:11:18 AM	PHl3 MFC set to  0.000000
1/26/2011	8:11:18 AM	SiCl4 MFC set to  0.000000
1/26/2011	8:11:18 AM	Bypass solenoid MFC set to  0.000000
1/26/2011	8:11:18 AM	Tube furnace set to 0
1/26/2011	8:11:19 AM	Run finished at 8:11 AM
1/26/2011	8:11:19 AM	Completed task C:\Users\Si CVD\CVD_Control\tasks\10x_he_purgepump.xml
1/26/2011	9:39:32 AM	Helium MFC set to  100.000000
1/26/2011	9:39:33 AM	Helium valve opened
1/26/2011	9:40:11 AM	Tube furnace set to 100
1/26/2011	9:41:13 AM	Helium MFC set to  0.000000
1/26/2011	9:41:18 AM	Helium valve closed
1/26/2011	9:42:02 AM	Main Vac valve closed
1/26/2011	9:42:04 AM	Bypass valve closed
1/26/2011	9:42:12 AM	Bypass valve opened
1/26/2011	9:42:13 AM	Main Vac valve opened
1/26/2011	9:42:18 AM	Helium MFC set to  50.000000
1/26/2011	9:42:19 AM	Helium valve opened
1/26/2011	9:42:57 AM	Helium MFC set to  0.000000
1/26/2011	9:43:52 AM	Helium valve closed
1/26/2011	9:44:13 AM	Recipe started at 9:44 AM
1/26/2011	9:44:13 AM	Helium valve closed
1/26/2011	9:44:13 AM	BCl3 valve closed
1/26/2011	9:44:13 AM	PH3 valve closed
1/26/2011	9:44:13 AM	SiCl4 pre valve closed
1/26/2011	9:44:13 AM	SiCl4 post valve closed
1/26/2011	9:44:13 AM	Main Vac valve closed
1/26/2011	9:44:13 AM	Bypass valve closed
1/26/2011	9:44:13 AM	Bubbler valve closed
1/26/2011	9:44:13 AM	H2 valve opened
1/26/2011	9:44:13 AM	Helium MFC set to  0.000000
1/26/2011	9:44:13 AM	H2 MFC set to  500.000000
1/26/2011	9:44:13 AM	BCl3 MFC set to  0.000000
1/26/2011	9:44:14 AM	PHl3 MFC set to  0.000000
1/26/2011	9:44:14 AM	SiCl4 MFC set to  0.000000
1/26/2011	9:44:14 AM	Bypass solenoid MFC set to  0.000000
1/26/2011	9:44:14 AM	Tube furnace set to 200
1/26/2011	9:45:32 AM	Helium valve closed
1/26/2011	9:45:32 AM	BCl3 valve closed
1/26/2011	9:45:32 AM	PH3 valve closed
1/26/2011	9:45:32 AM	SiCl4 pre valve closed
1/26/2011	9:45:32 AM	SiCl4 post valve closed
1/26/2011	9:45:32 AM	Main Vac valve closed
1/26/2011	9:45:32 AM	Bypass valve closed
1/26/2011	9:45:32 AM	H2 valve opened
1/26/2011	9:45:32 AM	Bubbler valve opened
1/26/2011	9:45:32 AM	Helium MFC set to  0.000000
1/26/2011	9:45:32 AM	H2 MFC set to  400.000000
1/26/2011	9:45:32 AM	BCl3 MFC set to  0.000000
1/26/2011	9:45:32 AM	PHl3 MFC set to  0.000000
1/26/2011	9:45:32 AM	SiCl4 MFC set to  0.000000
1/26/2011	9:45:32 AM	Bypass solenoid MFC set to  0.000000
1/26/2011	9:45:32 AM	Tube furnace set to 1001
1/26/2011	10:06:32 AM	Helium valve closed
1/26/2011	10:06:32 AM	BCl3 valve closed
1/26/2011	10:06:32 AM	PH3 valve closed
1/26/2011	10:06:32 AM	Main Vac valve closed
1/26/2011	10:06:32 AM	Bypass valve closed
1/26/2011	10:06:32 AM	H2 valve opened
1/26/2011	10:06:32 AM	SiCl4 pre valve opened
1/26/2011	10:06:32 AM	SiCl4 post valve opened
1/26/2011	10:06:32 AM	Bubbler valve opened
1/26/2011	10:06:32 AM	Helium MFC set to  0.000000
1/26/2011	10:06:32 AM	H2 MFC set to  500.000000
1/26/2011	10:06:32 AM	BCl3 MFC set to  0.000000
1/26/2011	10:06:32 AM	PHl3 MFC set to  0.000000
1/26/2011	10:06:32 AM	SiCl4 MFC set to  50.000000
1/26/2011	10:06:32 AM	Bypass solenoid MFC set to  0.000000
1/26/2011	10:06:32 AM	Tube furnace set to 1000
1/26/2011	10:06:42 AM	Helium valve closed
1/26/2011	10:06:42 AM	PH3 valve closed
1/26/2011	10:06:42 AM	Main Vac valve closed
1/26/2011	10:06:42 AM	Bypass valve closed
1/26/2011	10:06:42 AM	H2 valve opened
1/26/2011	10:06:42 AM	BCl3 valve opened
1/26/2011	10:06:42 AM	SiCl4 pre valve opened
1/26/2011	10:06:42 AM	SiCl4 post valve opened
1/26/2011	10:06:42 AM	Bubbler valve opened
1/26/2011	10:06:42 AM	Helium MFC set to  0.000000
1/26/2011	10:06:42 AM	H2 MFC set to  400.000000
1/26/2011	10:06:42 AM	BCl3 MFC set to  3.000000
1/26/2011	10:06:42 AM	PHl3 MFC set to  0.000000
1/26/2011	10:06:42 AM	SiCl4 MFC set to  40.000000
1/26/2011	10:06:42 AM	Bypass solenoid MFC set to  0.000000
1/26/2011	10:06:42 AM	Tube furnace set to 1000
1/26/2011	10:26:42 AM	H2 valve closed
1/26/2011	10:26:42 AM	BCl3 valve closed
1/26/2011	10:26:42 AM	PH3 valve closed
1/26/2011	10:26:42 AM	SiCl4 pre valve closed
1/26/2011	10:26:42 AM	SiCl4 post valve closed
1/26/2011	10:26:42 AM	Main Vac valve closed
1/26/2011	10:26:42 AM	Bypass valve closed
1/26/2011	10:26:42 AM	Helium valve opened
1/26/2011	10:26:42 AM	Bubbler valve opened
1/26/2011	10:26:42 AM	Helium MFC set to  500.000000
1/26/2011	10:26:42 AM	H2 MFC set to  0.000000
1/26/2011	10:26:42 AM	BCl3 MFC set to  0.000000
1/26/2011	10:26:42 AM	PHl3 MFC set to  0.000000
1/26/2011	10:26:42 AM	SiCl4 MFC set to  0.000000
1/26/2011	10:26:42 AM	Bypass solenoid MFC set to  0.000000
1/26/2011	10:26:43 AM	Tube furnace set to 0
1/26/2011	10:46:43 AM	Helium valve closed
1/26/2011	10:46:43 AM	H2 valve closed
1/26/2011	10:46:43 AM	BCl3 valve closed
1/26/2011	10:46:43 AM	PH3 valve closed
1/26/2011	10:46:43 AM	SiCl4 pre valve closed
1/26/2011	10:46:43 AM	SiCl4 post valve closed
1/26/2011	10:46:43 AM	Main Vac valve closed
1/26/2011	10:46:43 AM	Bypass valve closed
1/26/2011	10:46:43 AM	Bubbler valve closed
1/26/2011	10:46:43 AM	Helium MFC set to  0.000000
1/26/2011	10:46:43 AM	H2 MFC set to  0.000000
1/26/2011	10:46:43 AM	BCl3 MFC set to  0.000000
1/26/2011	10:46:43 AM	PHl3 MFC set to  0.000000
1/26/2011	10:46:43 AM	SiCl4 MFC set to  0.000000
1/26/2011	10:46:43 AM	Bypass solenoid MFC set to  0.000000
1/26/2011	10:46:43 AM	Tube furnace set to 0
1/26/2011	10:46:43 AM	Run finished at 10:46 AM
1/26/2011	10:52:22 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
1/26/2011	10:52:23 AM	Recipe started at 10:52 AM
1/26/2011	10:52:23 AM	Helium valve closed
1/26/2011	10:52:23 AM	H2 valve closed
1/26/2011	10:52:23 AM	BCl3 valve closed
1/26/2011	10:52:23 AM	PH3 valve closed
1/26/2011	10:52:23 AM	SiCl4 pre valve closed
1/26/2011	10:52:23 AM	SiCl4 post valve closed
1/26/2011	10:52:23 AM	Main Vac valve closed
1/26/2011	10:52:23 AM	Bubbler valve closed
1/26/2011	10:52:23 AM	Bypass valve opened
1/26/2011	10:52:23 AM	Helium MFC set to  0.000000
1/26/2011	10:52:23 AM	H2 MFC set to  0.000000
1/26/2011	10:52:23 AM	BCl3 MFC set to  0.000000
1/26/2011	10:52:23 AM	PHl3 MFC set to  0.000000
1/26/2011	10:52:23 AM	SiCl4 MFC set to  0.000000
1/26/2011	10:52:23 AM	Bypass solenoid MFC set to  0.000000
1/26/2011	10:52:23 AM	Tube furnace set to 0
1/26/2011	10:52:55 AM	Helium valve closed
1/26/2011	10:52:55 AM	H2 valve closed
1/26/2011	10:52:55 AM	BCl3 valve closed
1/26/2011	10:52:55 AM	PH3 valve closed
1/26/2011	10:52:55 AM	SiCl4 pre valve closed
1/26/2011	10:52:55 AM	SiCl4 post valve closed
1/26/2011	10:52:55 AM	Bubbler valve closed
1/26/2011	10:52:55 AM	Main Vac valve opened
1/26/2011	10:52:55 AM	Bypass valve opened
1/26/2011	10:52:55 AM	Helium MFC set to  0.000000
1/26/2011	10:52:55 AM	H2 MFC set to  0.000000
1/26/2011	10:52:55 AM	BCl3 MFC set to  0.000000
1/26/2011	10:52:55 AM	PHl3 MFC set to  0.000000
1/26/2011	10:52:55 AM	SiCl4 MFC set to  0.000000
1/26/2011	10:52:55 AM	Bypass solenoid MFC set to  0.000000
1/26/2011	10:52:55 AM	Tube furnace set to 0
1/26/2011	10:52:55 AM	Run finished at 10:52 AM
1/26/2011	10:52:55 AM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
1/26/2011	11:00:14 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\10x_he_purgepump.xml
1/26/2011	11:00:29 AM	Recipe started at 11:00 AM
1/26/2011	11:00:29 AM	Helium valve closed
1/26/2011	11:00:29 AM	H2 valve closed
1/26/2011	11:00:29 AM	BCl3 valve closed
1/26/2011	11:00:29 AM	PH3 valve closed
1/26/2011	11:00:29 AM	SiCl4 pre valve closed
1/26/2011	11:00:29 AM	SiCl4 post valve closed
1/26/2011	11:00:29 AM	Main Vac valve closed
1/26/2011	11:00:29 AM	Bubbler valve closed
1/26/2011	11:00:29 AM	Bypass valve opened
1/26/2011	11:00:29 AM	Helium MFC set to  0.000000
1/26/2011	11:00:29 AM	H2 MFC set to  0.000000
1/26/2011	11:00:29 AM	BCl3 MFC set to  0.000000
1/26/2011	11:00:29 AM	PHl3 MFC set to  0.000000
1/26/2011	11:00:29 AM	SiCl4 MFC set to  0.000000
1/26/2011	11:00:29 AM	Bypass solenoid MFC set to  0.000000
1/26/2011	11:00:29 AM	Tube furnace set to 0
1/26/2011	11:00:29 AM	Helium valve closed
1/26/2011	11:00:29 AM	H2 valve closed
1/26/2011	11:00:29 AM	BCl3 valve closed
1/26/2011	11:00:29 AM	PH3 valve closed
1/26/2011	11:00:29 AM	SiCl4 pre valve closed
1/26/2011	11:00:29 AM	SiCl4 post valve closed
1/26/2011	11:00:29 AM	Bubbler valve closed
1/26/2011	11:00:29 AM	Main Vac valve opened
1/26/2011	11:00:29 AM	Bypass valve opened
1/26/2011	11:00:29 AM	Helium MFC set to  0.000000
1/26/2011	11:00:29 AM	H2 MFC set to  0.000000
1/26/2011	11:00:29 AM	BCl3 MFC set to  0.000000
1/26/2011	11:00:29 AM	PHl3 MFC set to  0.000000
1/26/2011	11:00:29 AM	SiCl4 MFC set to  0.000000
1/26/2011	11:00:29 AM	Bypass solenoid MFC set to  0.000000
1/26/2011	11:00:30 AM	Tube furnace set to 0
1/26/2011	11:01:30 AM	H2 valve closed
1/26/2011	11:01:30 AM	BCl3 valve closed
1/26/2011	11:01:30 AM	PH3 valve closed
1/26/2011	11:01:30 AM	SiCl4 pre valve closed
1/26/2011	11:01:30 AM	SiCl4 post valve closed
1/26/2011	11:01:30 AM	Bubbler valve closed
1/26/2011	11:01:30 AM	Helium valve opened
1/26/2011	11:01:30 AM	Main Vac valve opened
1/26/2011	11:01:30 AM	Bypass valve opened
1/26/2011	11:01:30 AM	Helium MFC set to  100.000000
1/26/2011	11:01:30 AM	H2 MFC set to  0.000000
1/26/2011	11:01:30 AM	BCl3 MFC set to  0.000000
1/26/2011	11:01:30 AM	PHl3 MFC set to  0.000000
1/26/2011	11:01:30 AM	SiCl4 MFC set to  0.000000
1/26/2011	11:01:30 AM	Bypass solenoid MFC set to  0.000000
1/26/2011	11:01:30 AM	Tube furnace set to 0
1/26/2011	11:02:30 AM	Helium valve closed
1/26/2011	11:02:30 AM	H2 valve closed
1/26/2011	11:02:30 AM	BCl3 valve closed
1/26/2011	11:02:30 AM	PH3 valve closed
1/26/2011	11:02:30 AM	SiCl4 pre valve closed
1/26/2011	11:02:30 AM	SiCl4 post valve closed
1/26/2011	11:02:30 AM	Bubbler valve closed
1/26/2011	11:02:30 AM	Main Vac valve opened
1/26/2011	11:02:30 AM	Bypass valve opened
1/26/2011	11:02:30 AM	Helium MFC set to  0.000000
1/26/2011	11:02:30 AM	H2 MFC set to  0.000000
1/26/2011	11:02:30 AM	BCl3 MFC set to  0.000000
1/26/2011	11:02:30 AM	PHl3 MFC set to  0.000000
1/26/2011	11:02:30 AM	SiCl4 MFC set to  0.000000
1/26/2011	11:02:30 AM	Bypass solenoid MFC set to  0.000000
1/26/2011	11:02:30 AM	Tube furnace set to 0
1/26/2011	11:03:30 AM	H2 valve closed
1/26/2011	11:03:30 AM	BCl3 valve closed
1/26/2011	11:03:30 AM	PH3 valve closed
1/26/2011	11:03:30 AM	SiCl4 pre valve closed
1/26/2011	11:03:30 AM	SiCl4 post valve closed
1/26/2011	11:03:30 AM	Bubbler valve closed
1/26/2011	11:03:30 AM	Helium valve opened
1/26/2011	11:03:30 AM	Main Vac valve opened
1/26/2011	11:03:30 AM	Bypass valve opened
1/26/2011	11:03:30 AM	Helium MFC set to  100.000000
1/26/2011	11:03:30 AM	H2 MFC set to  0.000000
1/26/2011	11:03:30 AM	BCl3 MFC set to  0.000000
1/26/2011	11:03:30 AM	PHl3 MFC set to  0.000000
1/26/2011	11:03:30 AM	SiCl4 MFC set to  0.000000
1/26/2011	11:03:30 AM	Bypass solenoid MFC set to  0.000000
1/26/2011	11:03:30 AM	Tube furnace set to 0
1/26/2011	11:04:30 AM	Helium valve closed
1/26/2011	11:04:30 AM	H2 valve closed
1/26/2011	11:04:30 AM	BCl3 valve closed
1/26/2011	11:04:30 AM	PH3 valve closed
1/26/2011	11:04:30 AM	SiCl4 pre valve closed
1/26/2011	11:04:30 AM	SiCl4 post valve closed
1/26/2011	11:04:30 AM	Bubbler valve closed
1/26/2011	11:04:30 AM	Main Vac valve opened
1/26/2011	11:04:30 AM	Bypass valve opened
1/26/2011	11:04:30 AM	Helium MFC set to  0.000000
1/26/2011	11:04:30 AM	H2 MFC set to  0.000000
1/26/2011	11:04:30 AM	BCl3 MFC set to  0.000000
1/26/2011	11:04:30 AM	PHl3 MFC set to  0.000000
1/26/2011	11:04:30 AM	SiCl4 MFC set to  0.000000
1/26/2011	11:04:30 AM	Bypass solenoid MFC set to  0.000000
1/26/2011	11:04:30 AM	Tube furnace set to 0
1/26/2011	11:05:30 AM	H2 valve closed
1/26/2011	11:05:30 AM	BCl3 valve closed
1/26/2011	11:05:30 AM	PH3 valve closed
1/26/2011	11:05:30 AM	SiCl4 pre valve closed
1/26/2011	11:05:30 AM	SiCl4 post valve closed
1/26/2011	11:05:30 AM	Bubbler valve closed
1/26/2011	11:05:30 AM	Helium valve opened
1/26/2011	11:05:30 AM	Main Vac valve opened
1/26/2011	11:05:30 AM	Bypass valve opened
1/26/2011	11:05:30 AM	Helium MFC set to  100.000000
1/26/2011	11:05:30 AM	H2 MFC set to  0.000000
1/26/2011	11:05:30 AM	BCl3 MFC set to  0.000000
1/26/2011	11:05:30 AM	PHl3 MFC set to  0.000000
1/26/2011	11:05:30 AM	SiCl4 MFC set to  0.000000
1/26/2011	11:05:30 AM	Bypass solenoid MFC set to  0.000000
1/26/2011	11:05:31 AM	Tube furnace set to 0
1/26/2011	11:06:31 AM	Helium valve closed
1/26/2011	11:06:31 AM	H2 valve closed
1/26/2011	11:06:31 AM	BCl3 valve closed
1/26/2011	11:06:31 AM	PH3 valve closed
1/26/2011	11:06:31 AM	SiCl4 pre valve closed
1/26/2011	11:06:31 AM	SiCl4 post valve closed
1/26/2011	11:06:31 AM	Bubbler valve closed
1/26/2011	11:06:31 AM	Main Vac valve opened
1/26/2011	11:06:31 AM	Bypass valve opened
1/26/2011	11:06:31 AM	Helium MFC set to  0.000000
1/26/2011	11:06:31 AM	H2 MFC set to  0.000000
1/26/2011	11:06:31 AM	BCl3 MFC set to  0.000000
1/26/2011	11:06:31 AM	PHl3 MFC set to  0.000000
1/26/2011	11:06:31 AM	SiCl4 MFC set to  0.000000
1/26/2011	11:06:31 AM	Bypass solenoid MFC set to  0.000000
1/26/2011	11:06:31 AM	Tube furnace set to 0
1/26/2011	11:07:31 AM	H2 valve closed
1/26/2011	11:07:31 AM	BCl3 valve closed
1/26/2011	11:07:31 AM	PH3 valve closed
1/26/2011	11:07:31 AM	SiCl4 pre valve closed
1/26/2011	11:07:31 AM	SiCl4 post valve closed
1/26/2011	11:07:31 AM	Bubbler valve closed
1/26/2011	11:07:31 AM	Helium valve opened
1/26/2011	11:07:31 AM	Main Vac valve opened
1/26/2011	11:07:31 AM	Bypass valve opened
1/26/2011	11:07:31 AM	Helium MFC set to  100.000000
1/26/2011	11:07:31 AM	H2 MFC set to  0.000000
1/26/2011	11:07:31 AM	BCl3 MFC set to  0.000000
1/26/2011	11:07:31 AM	PHl3 MFC set to  0.000000
1/26/2011	11:07:31 AM	SiCl4 MFC set to  0.000000
1/26/2011	11:07:31 AM	Bypass solenoid MFC set to  0.000000
1/26/2011	11:07:31 AM	Tube furnace set to 0
1/26/2011	11:08:31 AM	Helium valve closed
1/26/2011	11:08:31 AM	H2 valve closed
1/26/2011	11:08:31 AM	BCl3 valve closed
1/26/2011	11:08:31 AM	PH3 valve closed
1/26/2011	11:08:31 AM	SiCl4 pre valve closed
1/26/2011	11:08:31 AM	SiCl4 post valve closed
1/26/2011	11:08:31 AM	Bubbler valve closed
1/26/2011	11:08:31 AM	Main Vac valve opened
1/26/2011	11:08:31 AM	Bypass valve opened
1/26/2011	11:08:31 AM	Helium MFC set to  0.000000
1/26/2011	11:08:31 AM	H2 MFC set to  0.000000
1/26/2011	11:08:31 AM	BCl3 MFC set to  0.000000
1/26/2011	11:08:31 AM	PHl3 MFC set to  0.000000
1/26/2011	11:08:31 AM	SiCl4 MFC set to  0.000000
1/26/2011	11:08:31 AM	Bypass solenoid MFC set to  0.000000
1/26/2011	11:08:31 AM	Tube furnace set to 0
1/26/2011	11:09:31 AM	H2 valve closed
1/26/2011	11:09:31 AM	BCl3 valve closed
1/26/2011	11:09:31 AM	PH3 valve closed
1/26/2011	11:09:31 AM	SiCl4 pre valve closed
1/26/2011	11:09:31 AM	SiCl4 post valve closed
1/26/2011	11:09:31 AM	Bubbler valve closed
1/26/2011	11:09:31 AM	Helium valve opened
1/26/2011	11:09:31 AM	Main Vac valve opened
1/26/2011	11:09:31 AM	Bypass valve opened
1/26/2011	11:09:31 AM	Helium MFC set to  100.000000
1/26/2011	11:09:31 AM	H2 MFC set to  0.000000
1/26/2011	11:09:31 AM	BCl3 MFC set to  0.000000
1/26/2011	11:09:31 AM	PHl3 MFC set to  0.000000
1/26/2011	11:09:31 AM	SiCl4 MFC set to  0.000000
1/26/2011	11:09:31 AM	Bypass solenoid MFC set to  0.000000
1/26/2011	11:09:31 AM	Tube furnace set to 0
1/26/2011	11:10:31 AM	Helium valve closed
1/26/2011	11:10:31 AM	H2 valve closed
1/26/2011	11:10:31 AM	BCl3 valve closed
1/26/2011	11:10:31 AM	PH3 valve closed
1/26/2011	11:10:31 AM	SiCl4 pre valve closed
1/26/2011	11:10:31 AM	SiCl4 post valve closed
1/26/2011	11:10:31 AM	Bubbler valve closed
1/26/2011	11:10:31 AM	Main Vac valve opened
1/26/2011	11:10:31 AM	Bypass valve opened
1/26/2011	11:10:31 AM	Helium MFC set to  0.000000
1/26/2011	11:10:31 AM	H2 MFC set to  0.000000
1/26/2011	11:10:31 AM	BCl3 MFC set to  0.000000
1/26/2011	11:10:31 AM	PHl3 MFC set to  0.000000
1/26/2011	11:10:31 AM	SiCl4 MFC set to  0.000000
1/26/2011	11:10:31 AM	Bypass solenoid MFC set to  0.000000
1/26/2011	11:10:32 AM	Tube furnace set to 0
1/26/2011	11:11:32 AM	H2 valve closed
1/26/2011	11:11:32 AM	BCl3 valve closed
1/26/2011	11:11:32 AM	PH3 valve closed
1/26/2011	11:11:32 AM	SiCl4 pre valve closed
1/26/2011	11:11:32 AM	SiCl4 post valve closed
1/26/2011	11:11:32 AM	Bubbler valve closed
1/26/2011	11:11:32 AM	Helium valve opened
1/26/2011	11:11:32 AM	Main Vac valve opened
1/26/2011	11:11:32 AM	Bypass valve opened
1/26/2011	11:11:32 AM	Helium MFC set to  100.000000
1/26/2011	11:11:32 AM	H2 MFC set to  0.000000
1/26/2011	11:11:32 AM	BCl3 MFC set to  0.000000
1/26/2011	11:11:32 AM	PHl3 MFC set to  0.000000
1/26/2011	11:11:32 AM	SiCl4 MFC set to  0.000000
1/26/2011	11:11:32 AM	Bypass solenoid MFC set to  0.000000
1/26/2011	11:11:32 AM	Tube furnace set to 0
1/26/2011	11:12:32 AM	Helium valve closed
1/26/2011	11:12:32 AM	H2 valve closed
1/26/2011	11:12:32 AM	BCl3 valve closed
1/26/2011	11:12:32 AM	PH3 valve closed
1/26/2011	11:12:32 AM	SiCl4 pre valve closed
1/26/2011	11:12:32 AM	SiCl4 post valve closed
1/26/2011	11:12:32 AM	Bubbler valve closed
1/26/2011	11:12:32 AM	Main Vac valve opened
1/26/2011	11:12:32 AM	Bypass valve opened
1/26/2011	11:12:32 AM	Helium MFC set to  0.000000
1/26/2011	11:12:32 AM	H2 MFC set to  0.000000
1/26/2011	11:12:32 AM	BCl3 MFC set to  0.000000
1/26/2011	11:12:32 AM	PHl3 MFC set to  0.000000
1/26/2011	11:12:32 AM	SiCl4 MFC set to  0.000000
1/26/2011	11:12:32 AM	Bypass solenoid MFC set to  0.000000
1/26/2011	11:12:32 AM	Tube furnace set to 0
1/26/2011	11:13:32 AM	H2 valve closed
1/26/2011	11:13:32 AM	BCl3 valve closed
1/26/2011	11:13:32 AM	PH3 valve closed
1/26/2011	11:13:32 AM	SiCl4 pre valve closed
1/26/2011	11:13:32 AM	SiCl4 post valve closed
1/26/2011	11:13:32 AM	Bubbler valve closed
1/26/2011	11:13:32 AM	Helium valve opened
1/26/2011	11:13:32 AM	Main Vac valve opened
1/26/2011	11:13:32 AM	Bypass valve opened
1/26/2011	11:13:32 AM	Helium MFC set to  100.000000
1/26/2011	11:13:32 AM	H2 MFC set to  0.000000
1/26/2011	11:13:32 AM	BCl3 MFC set to  0.000000
1/26/2011	11:13:32 AM	PHl3 MFC set to  0.000000
1/26/2011	11:13:32 AM	SiCl4 MFC set to  0.000000
1/26/2011	11:13:32 AM	Bypass solenoid MFC set to  0.000000
1/26/2011	11:13:32 AM	Tube furnace set to 0
1/26/2011	11:14:32 AM	Helium valve closed
1/26/2011	11:14:32 AM	H2 valve closed
1/26/2011	11:14:32 AM	BCl3 valve closed
1/26/2011	11:14:32 AM	PH3 valve closed
1/26/2011	11:14:32 AM	SiCl4 pre valve closed
1/26/2011	11:14:32 AM	SiCl4 post valve closed
1/26/2011	11:14:32 AM	Bubbler valve closed
1/26/2011	11:14:32 AM	Main Vac valve opened
1/26/2011	11:14:32 AM	Bypass valve opened
1/26/2011	11:14:32 AM	Helium MFC set to  0.000000
1/26/2011	11:14:32 AM	H2 MFC set to  0.000000
1/26/2011	11:14:32 AM	BCl3 MFC set to  0.000000
1/26/2011	11:14:32 AM	PHl3 MFC set to  0.000000
1/26/2011	11:14:32 AM	SiCl4 MFC set to  0.000000
1/26/2011	11:14:32 AM	Bypass solenoid MFC set to  0.000000
1/26/2011	11:14:32 AM	Tube furnace set to 0
1/26/2011	11:15:33 AM	H2 valve closed
1/26/2011	11:15:33 AM	BCl3 valve closed
1/26/2011	11:15:33 AM	PH3 valve closed
1/26/2011	11:15:33 AM	SiCl4 pre valve closed
1/26/2011	11:15:33 AM	SiCl4 post valve closed
1/26/2011	11:15:33 AM	Bubbler valve closed
1/26/2011	11:15:33 AM	Helium valve opened
1/26/2011	11:15:33 AM	Main Vac valve opened
1/26/2011	11:15:33 AM	Bypass valve opened
1/26/2011	11:15:33 AM	Helium MFC set to  100.000000
1/26/2011	11:15:33 AM	H2 MFC set to  0.000000
1/26/2011	11:15:33 AM	BCl3 MFC set to  0.000000
1/26/2011	11:15:33 AM	PHl3 MFC set to  0.000000
1/26/2011	11:15:33 AM	SiCl4 MFC set to  0.000000
1/26/2011	11:15:33 AM	Bypass solenoid MFC set to  0.000000
1/26/2011	11:15:33 AM	Tube furnace set to 0
1/26/2011	11:16:33 AM	Helium valve closed
1/26/2011	11:16:33 AM	H2 valve closed
1/26/2011	11:16:33 AM	BCl3 valve closed
1/26/2011	11:16:33 AM	PH3 valve closed
1/26/2011	11:16:33 AM	SiCl4 pre valve closed
1/26/2011	11:16:33 AM	SiCl4 post valve closed
1/26/2011	11:16:33 AM	Bubbler valve closed
1/26/2011	11:16:33 AM	Main Vac valve opened
1/26/2011	11:16:33 AM	Bypass valve opened
1/26/2011	11:16:33 AM	Helium MFC set to  0.000000
1/26/2011	11:16:33 AM	H2 MFC set to  0.000000
1/26/2011	11:16:33 AM	BCl3 MFC set to  0.000000
1/26/2011	11:16:33 AM	PHl3 MFC set to  0.000000
1/26/2011	11:16:33 AM	SiCl4 MFC set to  0.000000
1/26/2011	11:16:33 AM	Bypass solenoid MFC set to  0.000000
1/26/2011	11:16:33 AM	Tube furnace set to 0
1/26/2011	11:17:33 AM	H2 valve closed
1/26/2011	11:17:33 AM	BCl3 valve closed
1/26/2011	11:17:33 AM	PH3 valve closed
1/26/2011	11:17:33 AM	SiCl4 pre valve closed
1/26/2011	11:17:33 AM	SiCl4 post valve closed
1/26/2011	11:17:33 AM	Bubbler valve closed
1/26/2011	11:17:33 AM	Helium valve opened
1/26/2011	11:17:33 AM	Main Vac valve opened
1/26/2011	11:17:33 AM	Bypass valve opened
1/26/2011	11:17:33 AM	Helium MFC set to  100.000000
1/26/2011	11:17:33 AM	H2 MFC set to  0.000000
1/26/2011	11:17:33 AM	BCl3 MFC set to  0.000000
1/26/2011	11:17:33 AM	PHl3 MFC set to  0.000000
1/26/2011	11:17:33 AM	SiCl4 MFC set to  0.000000
1/26/2011	11:17:33 AM	Bypass solenoid MFC set to  0.000000
1/26/2011	11:17:33 AM	Tube furnace set to 0
1/26/2011	11:18:33 AM	Helium valve closed
1/26/2011	11:18:33 AM	H2 valve closed
1/26/2011	11:18:33 AM	BCl3 valve closed
1/26/2011	11:18:33 AM	PH3 valve closed
1/26/2011	11:18:33 AM	SiCl4 pre valve closed
1/26/2011	11:18:33 AM	SiCl4 post valve closed
1/26/2011	11:18:33 AM	Bubbler valve closed
1/26/2011	11:18:33 AM	Main Vac valve opened
1/26/2011	11:18:33 AM	Bypass valve opened
1/26/2011	11:18:33 AM	Helium MFC set to  0.000000
1/26/2011	11:18:33 AM	H2 MFC set to  0.000000
1/26/2011	11:18:33 AM	BCl3 MFC set to  0.000000
1/26/2011	11:18:33 AM	PHl3 MFC set to  0.000000
1/26/2011	11:18:33 AM	SiCl4 MFC set to  0.000000
1/26/2011	11:18:33 AM	Bypass solenoid MFC set to  0.000000
1/26/2011	11:18:33 AM	Tube furnace set to 0
1/26/2011	11:19:33 AM	H2 valve closed
1/26/2011	11:19:33 AM	BCl3 valve closed
1/26/2011	11:19:33 AM	PH3 valve closed
1/26/2011	11:19:33 AM	SiCl4 pre valve closed
1/26/2011	11:19:33 AM	SiCl4 post valve closed
1/26/2011	11:19:33 AM	Bubbler valve closed
1/26/2011	11:19:33 AM	Helium valve opened
1/26/2011	11:19:33 AM	Main Vac valve opened
1/26/2011	11:19:33 AM	Bypass valve opened
1/26/2011	11:19:33 AM	Helium MFC set to  100.000000
1/26/2011	11:19:33 AM	H2 MFC set to  0.000000
1/26/2011	11:19:33 AM	BCl3 MFC set to  0.000000
1/26/2011	11:19:33 AM	PHl3 MFC set to  0.000000
1/26/2011	11:19:33 AM	SiCl4 MFC set to  0.000000
1/26/2011	11:19:33 AM	Bypass solenoid MFC set to  0.000000
1/26/2011	11:19:33 AM	Tube furnace set to 0
1/26/2011	11:20:34 AM	Helium valve closed
1/26/2011	11:20:34 AM	H2 valve closed
1/26/2011	11:20:34 AM	BCl3 valve closed
1/26/2011	11:20:34 AM	PH3 valve closed
1/26/2011	11:20:34 AM	SiCl4 pre valve closed
1/26/2011	11:20:34 AM	SiCl4 post valve closed
1/26/2011	11:20:34 AM	Bubbler valve closed
1/26/2011	11:20:34 AM	Main Vac valve opened
1/26/2011	11:20:34 AM	Bypass valve opened
1/26/2011	11:20:34 AM	Helium MFC set to  0.000000
1/26/2011	11:20:34 AM	H2 MFC set to  0.000000
1/26/2011	11:20:34 AM	BCl3 MFC set to  0.000000
1/26/2011	11:20:34 AM	PHl3 MFC set to  0.000000
1/26/2011	11:20:34 AM	SiCl4 MFC set to  0.000000
1/26/2011	11:20:34 AM	Bypass solenoid MFC set to  0.000000
1/26/2011	11:20:34 AM	Tube furnace set to 0
1/26/2011	11:20:35 AM	Run finished at 11:20 AM
1/26/2011	11:20:35 AM	Completed task C:\Users\Si CVD\CVD_Control\tasks\10x_he_purgepump.xml
1/26/2011	11:37:37 AM	Main Vac valve closed
1/26/2011	11:37:38 AM	Bypass valve closed
1/26/2011	11:37:59 AM	Bypass valve opened
1/26/2011	11:38:01 AM	Main Vac valve opened
1/26/2011	11:38:13 AM	Helium MFC set to  100.000000
1/26/2011	11:38:15 AM	Helium valve opened
1/26/2011	11:38:47 AM	Helium MFC set to  0.000000
1/26/2011	11:38:48 AM	Helium valve closed
1/26/2011	11:39:44 AM	Tube furnace set to 200
1/26/2011	11:40:01 AM	Recipe started at 11:40 AM
1/26/2011	11:40:02 AM	Helium valve closed
1/26/2011	11:40:02 AM	BCl3 valve closed
1/26/2011	11:40:02 AM	PH3 valve closed
1/26/2011	11:40:02 AM	SiCl4 pre valve closed
1/26/2011	11:40:02 AM	SiCl4 post valve closed
1/26/2011	11:40:02 AM	Main Vac valve closed
1/26/2011	11:40:02 AM	Bypass valve closed
1/26/2011	11:40:02 AM	Bubbler valve closed
1/26/2011	11:40:02 AM	H2 valve opened
1/26/2011	11:40:02 AM	Helium MFC set to  0.000000
1/26/2011	11:40:02 AM	H2 MFC set to  500.000000
1/26/2011	11:40:02 AM	BCl3 MFC set to  0.000000
1/26/2011	11:40:02 AM	PHl3 MFC set to  0.000000
1/26/2011	11:40:02 AM	SiCl4 MFC set to  0.000000
1/26/2011	11:40:02 AM	Bypass solenoid MFC set to  0.000000
1/26/2011	11:40:02 AM	Tube furnace set to 200
1/26/2011	11:41:21 AM	Helium valve closed
1/26/2011	11:41:21 AM	BCl3 valve closed
1/26/2011	11:41:21 AM	PH3 valve closed
1/26/2011	11:41:21 AM	SiCl4 pre valve closed
1/26/2011	11:41:21 AM	SiCl4 post valve closed
1/26/2011	11:41:21 AM	Main Vac valve closed
1/26/2011	11:41:21 AM	Bypass valve closed
1/26/2011	11:41:21 AM	H2 valve opened
1/26/2011	11:41:21 AM	Bubbler valve opened
1/26/2011	11:41:21 AM	Helium MFC set to  0.000000
1/26/2011	11:41:21 AM	H2 MFC set to  400.000000
1/26/2011	11:41:21 AM	BCl3 MFC set to  0.000000
1/26/2011	11:41:21 AM	PHl3 MFC set to  0.000000
1/26/2011	11:41:21 AM	SiCl4 MFC set to  0.000000
1/26/2011	11:41:21 AM	Bypass solenoid MFC set to  0.000000
1/26/2011	11:41:21 AM	Tube furnace set to 1001
1/26/2011	12:02:21 PM	Helium valve closed
1/26/2011	12:02:21 PM	BCl3 valve closed
1/26/2011	12:02:21 PM	PH3 valve closed
1/26/2011	12:02:21 PM	Main Vac valve closed
1/26/2011	12:02:21 PM	Bypass valve closed
1/26/2011	12:02:21 PM	H2 valve opened
1/26/2011	12:02:21 PM	SiCl4 pre valve opened
1/26/2011	12:02:21 PM	SiCl4 post valve opened
1/26/2011	12:02:21 PM	Bubbler valve opened
1/26/2011	12:02:21 PM	Helium MFC set to  0.000000
1/26/2011	12:02:21 PM	H2 MFC set to  500.000000
1/26/2011	12:02:21 PM	BCl3 MFC set to  0.000000
1/26/2011	12:02:21 PM	PHl3 MFC set to  0.000000
1/26/2011	12:02:21 PM	SiCl4 MFC set to  50.000000
1/26/2011	12:02:21 PM	Bypass solenoid MFC set to  0.000000
1/26/2011	12:02:21 PM	Tube furnace set to 1000
1/26/2011	12:02:31 PM	Helium valve closed
1/26/2011	12:02:31 PM	PH3 valve closed
1/26/2011	12:02:31 PM	Main Vac valve closed
1/26/2011	12:02:31 PM	Bypass valve closed
1/26/2011	12:02:31 PM	H2 valve opened
1/26/2011	12:02:31 PM	BCl3 valve opened
1/26/2011	12:02:31 PM	SiCl4 pre valve opened
1/26/2011	12:02:31 PM	SiCl4 post valve opened
1/26/2011	12:02:31 PM	Bubbler valve opened
1/26/2011	12:02:31 PM	Helium MFC set to  0.000000
1/26/2011	12:02:31 PM	H2 MFC set to  500.000000
1/26/2011	12:02:31 PM	BCl3 MFC set to  10.000000
1/26/2011	12:02:31 PM	PHl3 MFC set to  0.000000
1/26/2011	12:02:31 PM	SiCl4 MFC set to  50.000000
1/26/2011	12:02:31 PM	Bypass solenoid MFC set to  0.000000
1/26/2011	12:02:32 PM	Tube furnace set to 1000
1/26/2011	12:22:32 PM	H2 valve closed
1/26/2011	12:22:32 PM	BCl3 valve closed
1/26/2011	12:22:32 PM	PH3 valve closed
1/26/2011	12:22:32 PM	SiCl4 pre valve closed
1/26/2011	12:22:32 PM	SiCl4 post valve closed
1/26/2011	12:22:32 PM	Main Vac valve closed
1/26/2011	12:22:32 PM	Bypass valve closed
1/26/2011	12:22:32 PM	Helium valve opened
1/26/2011	12:22:32 PM	Bubbler valve opened
1/26/2011	12:22:32 PM	Helium MFC set to  500.000000
1/26/2011	12:22:32 PM	H2 MFC set to  0.000000
1/26/2011	12:22:32 PM	BCl3 MFC set to  0.000000
1/26/2011	12:22:32 PM	PHl3 MFC set to  0.000000
1/26/2011	12:22:32 PM	SiCl4 MFC set to  0.000000
1/26/2011	12:22:32 PM	Bypass solenoid MFC set to  0.000000
1/26/2011	12:22:32 PM	Tube furnace set to 0
1/26/2011	12:42:32 PM	Helium valve closed
1/26/2011	12:42:32 PM	H2 valve closed
1/26/2011	12:42:32 PM	BCl3 valve closed
1/26/2011	12:42:32 PM	PH3 valve closed
1/26/2011	12:42:32 PM	SiCl4 pre valve closed
1/26/2011	12:42:32 PM	SiCl4 post valve closed
1/26/2011	12:42:32 PM	Main Vac valve closed
1/26/2011	12:42:32 PM	Bypass valve closed
1/26/2011	12:42:32 PM	Bubbler valve closed
1/26/2011	12:42:32 PM	Helium MFC set to  0.000000
1/26/2011	12:42:32 PM	H2 MFC set to  0.000000
1/26/2011	12:42:32 PM	BCl3 MFC set to  0.000000
1/26/2011	12:42:32 PM	PHl3 MFC set to  0.000000
1/26/2011	12:42:32 PM	SiCl4 MFC set to  0.000000
1/26/2011	12:42:32 PM	Bypass solenoid MFC set to  0.000000
1/26/2011	12:42:32 PM	Tube furnace set to 0
1/26/2011	12:42:32 PM	Run finished at 12:42 PM
1/26/2011	12:50:12 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
1/26/2011	12:50:13 PM	Recipe started at 12:50 PM
1/26/2011	12:50:13 PM	H2 valve closed
1/26/2011	12:50:13 PM	BCl3 valve closed
1/26/2011	12:50:13 PM	PH3 valve closed
1/26/2011	12:50:13 PM	SiCl4 pre valve closed
1/26/2011	12:50:13 PM	SiCl4 post valve closed
1/26/2011	12:50:13 PM	Main Vac valve closed
1/26/2011	12:50:13 PM	Bypass valve closed
1/26/2011	12:50:13 PM	Bubbler valve closed
1/26/2011	12:50:13 PM	Helium valve opened
1/26/2011	12:50:13 PM	Helium MFC set to  500.000000
1/26/2011	12:50:13 PM	H2 MFC set to  0.000000
1/26/2011	12:50:13 PM	BCl3 MFC set to  0.000000
1/26/2011	12:50:13 PM	PHl3 MFC set to  0.000000
1/26/2011	12:50:13 PM	SiCl4 MFC set to  0.000000
1/26/2011	12:50:13 PM	Bypass solenoid MFC set to  0.000000
1/26/2011	12:50:13 PM	Tube furnace set to 0
1/26/2011	12:50:13 PM	Helium valve closed
1/26/2011	12:50:13 PM	H2 valve closed
1/26/2011	12:50:13 PM	BCl3 valve closed
1/26/2011	12:50:13 PM	PH3 valve closed
1/26/2011	12:50:13 PM	SiCl4 pre valve closed
1/26/2011	12:50:13 PM	SiCl4 post valve closed
1/26/2011	12:50:13 PM	Main Vac valve closed
1/26/2011	12:50:13 PM	Bypass valve closed
1/26/2011	12:50:13 PM	Bubbler valve closed
1/26/2011	12:50:13 PM	Helium MFC set to  0.000000
1/26/2011	12:50:13 PM	H2 MFC set to  0.000000
1/26/2011	12:50:13 PM	BCl3 MFC set to  0.000000
1/26/2011	12:50:13 PM	PHl3 MFC set to  0.000000
1/26/2011	12:50:13 PM	SiCl4 MFC set to  0.000000
1/26/2011	12:50:13 PM	Bypass solenoid MFC set to  0.000000
1/26/2011	12:50:14 PM	Tube furnace set to 0
1/26/2011	12:50:14 PM	Run finished at 12:50 PM
1/26/2011	12:50:14 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
1/26/2011	12:53:21 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\10x_he_purgepump.xml
1/26/2011	12:53:34 PM	Recipe started at 12:53 PM
1/26/2011	12:53:34 PM	Helium valve closed
1/26/2011	12:53:34 PM	H2 valve closed
1/26/2011	12:53:34 PM	BCl3 valve closed
1/26/2011	12:53:34 PM	PH3 valve closed
1/26/2011	12:53:34 PM	SiCl4 pre valve closed
1/26/2011	12:53:34 PM	SiCl4 post valve closed
1/26/2011	12:53:34 PM	Main Vac valve closed
1/26/2011	12:53:34 PM	Bubbler valve closed
1/26/2011	12:53:34 PM	Bypass valve opened
1/26/2011	12:53:34 PM	Helium MFC set to  0.000000
1/26/2011	12:53:34 PM	H2 MFC set to  0.000000
1/26/2011	12:53:34 PM	BCl3 MFC set to  0.000000
1/26/2011	12:53:34 PM	PHl3 MFC set to  0.000000
1/26/2011	12:53:34 PM	SiCl4 MFC set to  0.000000
1/26/2011	12:53:34 PM	Bypass solenoid MFC set to  0.000000
1/26/2011	12:53:34 PM	Tube furnace set to 0
1/26/2011	12:54:05 PM	Helium valve closed
1/26/2011	12:54:05 PM	H2 valve closed
1/26/2011	12:54:05 PM	BCl3 valve closed
1/26/2011	12:54:05 PM	PH3 valve closed
1/26/2011	12:54:05 PM	SiCl4 pre valve closed
1/26/2011	12:54:05 PM	SiCl4 post valve closed
1/26/2011	12:54:05 PM	Bubbler valve closed
1/26/2011	12:54:05 PM	Main Vac valve opened
1/26/2011	12:54:05 PM	Bypass valve opened
1/26/2011	12:54:05 PM	Helium MFC set to  0.000000
1/26/2011	12:54:05 PM	H2 MFC set to  0.000000
1/26/2011	12:54:05 PM	BCl3 MFC set to  0.000000
1/26/2011	12:54:05 PM	PHl3 MFC set to  0.000000
1/26/2011	12:54:05 PM	SiCl4 MFC set to  0.000000
1/26/2011	12:54:05 PM	Bypass solenoid MFC set to  0.000000
1/26/2011	12:54:06 PM	Tube furnace set to 0
1/26/2011	12:55:06 PM	H2 valve closed
1/26/2011	12:55:06 PM	BCl3 valve closed
1/26/2011	12:55:06 PM	PH3 valve closed
1/26/2011	12:55:06 PM	SiCl4 pre valve closed
1/26/2011	12:55:06 PM	SiCl4 post valve closed
1/26/2011	12:55:06 PM	Bubbler valve closed
1/26/2011	12:55:06 PM	Helium valve opened
1/26/2011	12:55:06 PM	Main Vac valve opened
1/26/2011	12:55:06 PM	Bypass valve opened
1/26/2011	12:55:06 PM	Helium MFC set to  100.000000
1/26/2011	12:55:06 PM	H2 MFC set to  0.000000
1/26/2011	12:55:06 PM	BCl3 MFC set to  0.000000
1/26/2011	12:55:06 PM	PHl3 MFC set to  0.000000
1/26/2011	12:55:06 PM	SiCl4 MFC set to  0.000000
1/26/2011	12:55:06 PM	Bypass solenoid MFC set to  0.000000
1/26/2011	12:55:06 PM	Tube furnace set to 0
1/26/2011	12:56:06 PM	Helium valve closed
1/26/2011	12:56:06 PM	H2 valve closed
1/26/2011	12:56:06 PM	BCl3 valve closed
1/26/2011	12:56:06 PM	PH3 valve closed
1/26/2011	12:56:06 PM	SiCl4 pre valve closed
1/26/2011	12:56:06 PM	SiCl4 post valve closed
1/26/2011	12:56:06 PM	Bubbler valve closed
1/26/2011	12:56:06 PM	Main Vac valve opened
1/26/2011	12:56:06 PM	Bypass valve opened
1/26/2011	12:56:06 PM	Helium MFC set to  0.000000
1/26/2011	12:56:06 PM	H2 MFC set to  0.000000
1/26/2011	12:56:06 PM	BCl3 MFC set to  0.000000
1/26/2011	12:56:06 PM	PHl3 MFC set to  0.000000
1/26/2011	12:56:06 PM	SiCl4 MFC set to  0.000000
1/26/2011	12:56:06 PM	Bypass solenoid MFC set to  0.000000
1/26/2011	12:56:06 PM	Tube furnace set to 0
1/26/2011	12:57:06 PM	H2 valve closed
1/26/2011	12:57:06 PM	BCl3 valve closed
1/26/2011	12:57:06 PM	PH3 valve closed
1/26/2011	12:57:06 PM	SiCl4 pre valve closed
1/26/2011	12:57:06 PM	SiCl4 post valve closed
1/26/2011	12:57:06 PM	Bubbler valve closed
1/26/2011	12:57:06 PM	Helium valve opened
1/26/2011	12:57:06 PM	Main Vac valve opened
1/26/2011	12:57:06 PM	Bypass valve opened
1/26/2011	12:57:06 PM	Helium MFC set to  100.000000
1/26/2011	12:57:06 PM	H2 MFC set to  0.000000
1/26/2011	12:57:06 PM	BCl3 MFC set to  0.000000
1/26/2011	12:57:06 PM	PHl3 MFC set to  0.000000
1/26/2011	12:57:06 PM	SiCl4 MFC set to  0.000000
1/26/2011	12:57:06 PM	Bypass solenoid MFC set to  0.000000
1/26/2011	12:57:06 PM	Tube furnace set to 0
1/26/2011	12:58:06 PM	Helium valve closed
1/26/2011	12:58:06 PM	H2 valve closed
1/26/2011	12:58:06 PM	BCl3 valve closed
1/26/2011	12:58:06 PM	PH3 valve closed
1/26/2011	12:58:06 PM	SiCl4 pre valve closed
1/26/2011	12:58:06 PM	SiCl4 post valve closed
1/26/2011	12:58:06 PM	Bubbler valve closed
1/26/2011	12:58:06 PM	Main Vac valve opened
1/26/2011	12:58:06 PM	Bypass valve opened
1/26/2011	12:58:06 PM	Helium MFC set to  0.000000
1/26/2011	12:58:06 PM	H2 MFC set to  0.000000
1/26/2011	12:58:06 PM	BCl3 MFC set to  0.000000
1/26/2011	12:58:06 PM	PHl3 MFC set to  0.000000
1/26/2011	12:58:06 PM	SiCl4 MFC set to  0.000000
1/26/2011	12:58:06 PM	Bypass solenoid MFC set to  0.000000
1/26/2011	12:58:06 PM	Tube furnace set to 0
1/26/2011	12:59:06 PM	H2 valve closed
1/26/2011	12:59:06 PM	BCl3 valve closed
1/26/2011	12:59:06 PM	PH3 valve closed
1/26/2011	12:59:06 PM	SiCl4 pre valve closed
1/26/2011	12:59:06 PM	SiCl4 post valve closed
1/26/2011	12:59:06 PM	Bubbler valve closed
1/26/2011	12:59:06 PM	Helium valve opened
1/26/2011	12:59:06 PM	Main Vac valve opened
1/26/2011	12:59:06 PM	Bypass valve opened
1/26/2011	12:59:06 PM	Helium MFC set to  100.000000
1/26/2011	12:59:06 PM	H2 MFC set to  0.000000
1/26/2011	12:59:06 PM	BCl3 MFC set to  0.000000
1/26/2011	12:59:06 PM	PHl3 MFC set to  0.000000
1/26/2011	12:59:06 PM	SiCl4 MFC set to  0.000000
1/26/2011	12:59:06 PM	Bypass solenoid MFC set to  0.000000
1/26/2011	12:59:07 PM	Tube furnace set to 0
1/26/2011	1:00:07 PM	Helium valve closed
1/26/2011	1:00:07 PM	H2 valve closed
1/26/2011	1:00:07 PM	BCl3 valve closed
1/26/2011	1:00:07 PM	PH3 valve closed
1/26/2011	1:00:07 PM	SiCl4 pre valve closed
1/26/2011	1:00:07 PM	SiCl4 post valve closed
1/26/2011	1:00:07 PM	Bubbler valve closed
1/26/2011	1:00:07 PM	Main Vac valve opened
1/26/2011	1:00:07 PM	Bypass valve opened
1/26/2011	1:00:07 PM	Helium MFC set to  0.000000
1/26/2011	1:00:07 PM	H2 MFC set to  0.000000
1/26/2011	1:00:07 PM	BCl3 MFC set to  0.000000
1/26/2011	1:00:07 PM	PHl3 MFC set to  0.000000
1/26/2011	1:00:07 PM	SiCl4 MFC set to  0.000000
1/26/2011	1:00:07 PM	Bypass solenoid MFC set to  0.000000
1/26/2011	1:00:07 PM	Tube furnace set to 0
1/26/2011	1:01:07 PM	H2 valve closed
1/26/2011	1:01:07 PM	BCl3 valve closed
1/26/2011	1:01:07 PM	PH3 valve closed
1/26/2011	1:01:07 PM	SiCl4 pre valve closed
1/26/2011	1:01:07 PM	SiCl4 post valve closed
1/26/2011	1:01:07 PM	Bubbler valve closed
1/26/2011	1:01:07 PM	Helium valve opened
1/26/2011	1:01:07 PM	Main Vac valve opened
1/26/2011	1:01:07 PM	Bypass valve opened
1/26/2011	1:01:07 PM	Helium MFC set to  100.000000
1/26/2011	1:01:07 PM	H2 MFC set to  0.000000
1/26/2011	1:01:07 PM	BCl3 MFC set to  0.000000
1/26/2011	1:01:07 PM	PHl3 MFC set to  0.000000
1/26/2011	1:01:07 PM	SiCl4 MFC set to  0.000000
1/26/2011	1:01:07 PM	Bypass solenoid MFC set to  0.000000
1/26/2011	1:01:07 PM	Tube furnace set to 0
1/26/2011	1:02:07 PM	Helium valve closed
1/26/2011	1:02:07 PM	H2 valve closed
1/26/2011	1:02:07 PM	BCl3 valve closed
1/26/2011	1:02:07 PM	PH3 valve closed
1/26/2011	1:02:07 PM	SiCl4 pre valve closed
1/26/2011	1:02:07 PM	SiCl4 post valve closed
1/26/2011	1:02:07 PM	Bubbler valve closed
1/26/2011	1:02:07 PM	Main Vac valve opened
1/26/2011	1:02:07 PM	Bypass valve opened
1/26/2011	1:02:07 PM	Helium MFC set to  0.000000
1/26/2011	1:02:07 PM	H2 MFC set to  0.000000
1/26/2011	1:02:07 PM	BCl3 MFC set to  0.000000
1/26/2011	1:02:07 PM	PHl3 MFC set to  0.000000
1/26/2011	1:02:07 PM	SiCl4 MFC set to  0.000000
1/26/2011	1:02:07 PM	Bypass solenoid MFC set to  0.000000
1/26/2011	1:02:07 PM	Tube furnace set to 0
1/26/2011	1:03:07 PM	H2 valve closed
1/26/2011	1:03:07 PM	BCl3 valve closed
1/26/2011	1:03:07 PM	PH3 valve closed
1/26/2011	1:03:07 PM	SiCl4 pre valve closed
1/26/2011	1:03:07 PM	SiCl4 post valve closed
1/26/2011	1:03:07 PM	Bubbler valve closed
1/26/2011	1:03:07 PM	Helium valve opened
1/26/2011	1:03:07 PM	Main Vac valve opened
1/26/2011	1:03:07 PM	Bypass valve opened
1/26/2011	1:03:07 PM	Helium MFC set to  100.000000
1/26/2011	1:03:07 PM	H2 MFC set to  0.000000
1/26/2011	1:03:07 PM	BCl3 MFC set to  0.000000
1/26/2011	1:03:07 PM	PHl3 MFC set to  0.000000
1/26/2011	1:03:07 PM	SiCl4 MFC set to  0.000000
1/26/2011	1:03:07 PM	Bypass solenoid MFC set to  0.000000
1/26/2011	1:03:07 PM	Tube furnace set to 0
1/26/2011	1:04:07 PM	Helium valve closed
1/26/2011	1:04:07 PM	H2 valve closed
1/26/2011	1:04:07 PM	BCl3 valve closed
1/26/2011	1:04:07 PM	PH3 valve closed
1/26/2011	1:04:07 PM	SiCl4 pre valve closed
1/26/2011	1:04:07 PM	SiCl4 post valve closed
1/26/2011	1:04:07 PM	Bubbler valve closed
1/26/2011	1:04:07 PM	Main Vac valve opened
1/26/2011	1:04:07 PM	Bypass valve opened
1/26/2011	1:04:07 PM	Helium MFC set to  0.000000
1/26/2011	1:04:07 PM	H2 MFC set to  0.000000
1/26/2011	1:04:07 PM	BCl3 MFC set to  0.000000
1/26/2011	1:04:07 PM	PHl3 MFC set to  0.000000
1/26/2011	1:04:07 PM	SiCl4 MFC set to  0.000000
1/26/2011	1:04:07 PM	Bypass solenoid MFC set to  0.000000
1/26/2011	1:04:08 PM	Tube furnace set to 0
1/26/2011	1:05:08 PM	H2 valve closed
1/26/2011	1:05:08 PM	BCl3 valve closed
1/26/2011	1:05:08 PM	PH3 valve closed
1/26/2011	1:05:08 PM	SiCl4 pre valve closed
1/26/2011	1:05:08 PM	SiCl4 post valve closed
1/26/2011	1:05:08 PM	Bubbler valve closed
1/26/2011	1:05:08 PM	Helium valve opened
1/26/2011	1:05:08 PM	Main Vac valve opened
1/26/2011	1:05:08 PM	Bypass valve opened
1/26/2011	1:05:08 PM	Helium MFC set to  100.000000
1/26/2011	1:05:08 PM	H2 MFC set to  0.000000
1/26/2011	1:05:08 PM	BCl3 MFC set to  0.000000
1/26/2011	1:05:08 PM	PHl3 MFC set to  0.000000
1/26/2011	1:05:08 PM	SiCl4 MFC set to  0.000000
1/26/2011	1:05:08 PM	Bypass solenoid MFC set to  0.000000
1/26/2011	1:05:08 PM	Tube furnace set to 0
1/26/2011	1:06:08 PM	Helium valve closed
1/26/2011	1:06:08 PM	H2 valve closed
1/26/2011	1:06:08 PM	BCl3 valve closed
1/26/2011	1:06:08 PM	PH3 valve closed
1/26/2011	1:06:08 PM	SiCl4 pre valve closed
1/26/2011	1:06:08 PM	SiCl4 post valve closed
1/26/2011	1:06:08 PM	Bubbler valve closed
1/26/2011	1:06:08 PM	Main Vac valve opened
1/26/2011	1:06:08 PM	Bypass valve opened
1/26/2011	1:06:08 PM	Helium MFC set to  0.000000
1/26/2011	1:06:08 PM	H2 MFC set to  0.000000
1/26/2011	1:06:08 PM	BCl3 MFC set to  0.000000
1/26/2011	1:06:08 PM	PHl3 MFC set to  0.000000
1/26/2011	1:06:08 PM	SiCl4 MFC set to  0.000000
1/26/2011	1:06:08 PM	Bypass solenoid MFC set to  0.000000
1/26/2011	1:06:08 PM	Tube furnace set to 0
1/26/2011	1:07:08 PM	H2 valve closed
1/26/2011	1:07:08 PM	BCl3 valve closed
1/26/2011	1:07:08 PM	PH3 valve closed
1/26/2011	1:07:08 PM	SiCl4 pre valve closed
1/26/2011	1:07:08 PM	SiCl4 post valve closed
1/26/2011	1:07:08 PM	Bubbler valve closed
1/26/2011	1:07:08 PM	Helium valve opened
1/26/2011	1:07:08 PM	Main Vac valve opened
1/26/2011	1:07:08 PM	Bypass valve opened
1/26/2011	1:07:08 PM	Helium MFC set to  100.000000
1/26/2011	1:07:08 PM	H2 MFC set to  0.000000
1/26/2011	1:07:08 PM	BCl3 MFC set to  0.000000
1/26/2011	1:07:08 PM	PHl3 MFC set to  0.000000
1/26/2011	1:07:08 PM	SiCl4 MFC set to  0.000000
1/26/2011	1:07:08 PM	Bypass solenoid MFC set to  0.000000
1/26/2011	1:07:08 PM	Tube furnace set to 0
1/26/2011	1:08:08 PM	Helium valve closed
1/26/2011	1:08:08 PM	H2 valve closed
1/26/2011	1:08:08 PM	BCl3 valve closed
1/26/2011	1:08:08 PM	PH3 valve closed
1/26/2011	1:08:08 PM	SiCl4 pre valve closed
1/26/2011	1:08:08 PM	SiCl4 post valve closed
1/26/2011	1:08:08 PM	Bubbler valve closed
1/26/2011	1:08:08 PM	Main Vac valve opened
1/26/2011	1:08:08 PM	Bypass valve opened
1/26/2011	1:08:08 PM	Helium MFC set to  0.000000
1/26/2011	1:08:08 PM	H2 MFC set to  0.000000
1/26/2011	1:08:08 PM	BCl3 MFC set to  0.000000
1/26/2011	1:08:08 PM	PHl3 MFC set to  0.000000
1/26/2011	1:08:08 PM	SiCl4 MFC set to  0.000000
1/26/2011	1:08:08 PM	Bypass solenoid MFC set to  0.000000
1/26/2011	1:08:08 PM	Tube furnace set to 0
1/26/2011	1:09:08 PM	H2 valve closed
1/26/2011	1:09:08 PM	BCl3 valve closed
1/26/2011	1:09:08 PM	PH3 valve closed
1/26/2011	1:09:08 PM	SiCl4 pre valve closed
1/26/2011	1:09:08 PM	SiCl4 post valve closed
1/26/2011	1:09:08 PM	Bubbler valve closed
1/26/2011	1:09:08 PM	Helium valve opened
1/26/2011	1:09:08 PM	Main Vac valve opened
1/26/2011	1:09:08 PM	Bypass valve opened
1/26/2011	1:09:08 PM	Helium MFC set to  100.000000
1/26/2011	1:09:08 PM	H2 MFC set to  0.000000
1/26/2011	1:09:08 PM	BCl3 MFC set to  0.000000
1/26/2011	1:09:08 PM	PHl3 MFC set to  0.000000
1/26/2011	1:09:08 PM	SiCl4 MFC set to  0.000000
1/26/2011	1:09:08 PM	Bypass solenoid MFC set to  0.000000
1/26/2011	1:09:09 PM	Tube furnace set to 0
1/26/2011	1:10:09 PM	Helium valve closed
1/26/2011	1:10:09 PM	H2 valve closed
1/26/2011	1:10:09 PM	BCl3 valve closed
1/26/2011	1:10:09 PM	PH3 valve closed
1/26/2011	1:10:09 PM	SiCl4 pre valve closed
1/26/2011	1:10:09 PM	SiCl4 post valve closed
1/26/2011	1:10:09 PM	Bubbler valve closed
1/26/2011	1:10:09 PM	Main Vac valve opened
1/26/2011	1:10:09 PM	Bypass valve opened
1/26/2011	1:10:09 PM	Helium MFC set to  0.000000
1/26/2011	1:10:09 PM	H2 MFC set to  0.000000
1/26/2011	1:10:09 PM	BCl3 MFC set to  0.000000
1/26/2011	1:10:09 PM	PHl3 MFC set to  0.000000
1/26/2011	1:10:09 PM	SiCl4 MFC set to  0.000000
1/26/2011	1:10:09 PM	Bypass solenoid MFC set to  0.000000
1/26/2011	1:10:09 PM	Tube furnace set to 0
1/26/2011	1:11:09 PM	H2 valve closed
1/26/2011	1:11:09 PM	BCl3 valve closed
1/26/2011	1:11:09 PM	PH3 valve closed
1/26/2011	1:11:09 PM	SiCl4 pre valve closed
1/26/2011	1:11:09 PM	SiCl4 post valve closed
1/26/2011	1:11:09 PM	Bubbler valve closed
1/26/2011	1:11:09 PM	Helium valve opened
1/26/2011	1:11:09 PM	Main Vac valve opened
1/26/2011	1:11:09 PM	Bypass valve opened
1/26/2011	1:11:09 PM	Helium MFC set to  100.000000
1/26/2011	1:11:09 PM	H2 MFC set to  0.000000
1/26/2011	1:11:09 PM	BCl3 MFC set to  0.000000
1/26/2011	1:11:09 PM	PHl3 MFC set to  0.000000
1/26/2011	1:11:09 PM	SiCl4 MFC set to  0.000000
1/26/2011	1:11:09 PM	Bypass solenoid MFC set to  0.000000
1/26/2011	1:11:09 PM	Tube furnace set to 0
1/26/2011	1:12:09 PM	Helium valve closed
1/26/2011	1:12:09 PM	H2 valve closed
1/26/2011	1:12:09 PM	BCl3 valve closed
1/26/2011	1:12:09 PM	PH3 valve closed
1/26/2011	1:12:09 PM	SiCl4 pre valve closed
1/26/2011	1:12:09 PM	SiCl4 post valve closed
1/26/2011	1:12:09 PM	Bubbler valve closed
1/26/2011	1:12:09 PM	Main Vac valve opened
1/26/2011	1:12:09 PM	Bypass valve opened
1/26/2011	1:12:09 PM	Helium MFC set to  0.000000
1/26/2011	1:12:09 PM	H2 MFC set to  0.000000
1/26/2011	1:12:09 PM	BCl3 MFC set to  0.000000
1/26/2011	1:12:09 PM	PHl3 MFC set to  0.000000
1/26/2011	1:12:09 PM	SiCl4 MFC set to  0.000000
1/26/2011	1:12:09 PM	Bypass solenoid MFC set to  0.000000
1/26/2011	1:12:09 PM	Tube furnace set to 0
1/26/2011	1:13:09 PM	H2 valve closed
1/26/2011	1:13:09 PM	BCl3 valve closed
1/26/2011	1:13:09 PM	PH3 valve closed
1/26/2011	1:13:09 PM	SiCl4 pre valve closed
1/26/2011	1:13:09 PM	SiCl4 post valve closed
1/26/2011	1:13:09 PM	Bubbler valve closed
1/26/2011	1:13:09 PM	Helium valve opened
1/26/2011	1:13:09 PM	Main Vac valve opened
1/26/2011	1:13:09 PM	Bypass valve opened
1/26/2011	1:13:09 PM	Helium MFC set to  100.000000
1/26/2011	1:13:09 PM	H2 MFC set to  0.000000
1/26/2011	1:13:09 PM	BCl3 MFC set to  0.000000
1/26/2011	1:13:09 PM	PHl3 MFC set to  0.000000
1/26/2011	1:13:09 PM	SiCl4 MFC set to  0.000000
1/26/2011	1:13:09 PM	Bypass solenoid MFC set to  0.000000
1/26/2011	1:13:09 PM	Tube furnace set to 0
1/26/2011	1:14:09 PM	Helium valve closed
1/26/2011	1:14:09 PM	H2 valve closed
1/26/2011	1:14:09 PM	BCl3 valve closed
1/26/2011	1:14:10 PM	PH3 valve closed
1/26/2011	1:14:10 PM	SiCl4 pre valve closed
1/26/2011	1:14:10 PM	SiCl4 post valve closed
1/26/2011	1:14:10 PM	Bubbler valve closed
1/26/2011	1:14:10 PM	Main Vac valve opened
1/26/2011	1:14:10 PM	Bypass valve opened
1/26/2011	1:14:10 PM	Helium MFC set to  0.000000
1/26/2011	1:14:10 PM	H2 MFC set to  0.000000
1/26/2011	1:14:10 PM	BCl3 MFC set to  0.000000
1/26/2011	1:14:10 PM	PHl3 MFC set to  0.000000
1/26/2011	1:14:10 PM	SiCl4 MFC set to  0.000000
1/26/2011	1:14:10 PM	Bypass solenoid MFC set to  0.000000
1/26/2011	1:14:10 PM	Tube furnace set to 0
1/26/2011	1:14:11 PM	Run finished at 1:14 PM
1/26/2011	1:14:11 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\10x_he_purgepump.xml
1/26/2011	1:22:45 PM	Helium MFC set to  10.000000
1/26/2011	1:22:48 PM	Helium valve opened
1/26/2011	1:22:53 PM	Helium MFC set to  50.000000
1/26/2011	1:24:31 PM	Helium MFC set to  0.000000
1/26/2011	1:33:48 PM	Helium valve closed
1/26/2011	1:33:49 PM	Main Vac valve closed
1/26/2011	1:33:50 PM	Bypass valve closed
1/26/2011	1:34:01 PM	Bypass valve opened
1/26/2011	1:34:01 PM	Main Vac valve opened
1/26/2011	1:34:07 PM	Helium MFC set to  100.000000
1/26/2011	1:34:07 PM	Helium valve opened
1/26/2011	1:35:38 PM	Helium MFC set to  0.000000
1/26/2011	1:36:22 PM	Tube furnace set to 200
1/26/2011	1:36:43 PM	Recipe started at 1:36 PM
1/26/2011	1:36:43 PM	Helium valve closed
1/26/2011	1:36:43 PM	BCl3 valve closed
1/26/2011	1:36:43 PM	PH3 valve closed
1/26/2011	1:36:43 PM	SiCl4 pre valve closed
1/26/2011	1:36:43 PM	SiCl4 post valve closed
1/26/2011	1:36:43 PM	Main Vac valve closed
1/26/2011	1:36:43 PM	Bypass valve closed
1/26/2011	1:36:43 PM	Bubbler valve closed
1/26/2011	1:36:43 PM	H2 valve opened
1/26/2011	1:36:43 PM	Helium MFC set to  0.000000
1/26/2011	1:36:43 PM	H2 MFC set to  500.000000
1/26/2011	1:36:43 PM	BCl3 MFC set to  0.000000
1/26/2011	1:36:43 PM	PHl3 MFC set to  0.000000
1/26/2011	1:36:43 PM	SiCl4 MFC set to  0.000000
1/26/2011	1:36:43 PM	Bypass solenoid MFC set to  0.000000
1/26/2011	1:36:44 PM	Tube furnace set to 200
1/26/2011	1:38:02 PM	Helium valve closed
1/26/2011	1:38:02 PM	BCl3 valve closed
1/26/2011	1:38:02 PM	PH3 valve closed
1/26/2011	1:38:02 PM	SiCl4 pre valve closed
1/26/2011	1:38:02 PM	SiCl4 post valve closed
1/26/2011	1:38:02 PM	Main Vac valve closed
1/26/2011	1:38:02 PM	Bypass valve closed
1/26/2011	1:38:02 PM	H2 valve opened
1/26/2011	1:38:02 PM	Bubbler valve opened
1/26/2011	1:38:02 PM	Helium MFC set to  0.000000
1/26/2011	1:38:02 PM	H2 MFC set to  400.000000
1/26/2011	1:38:02 PM	BCl3 MFC set to  0.000000
1/26/2011	1:38:02 PM	PHl3 MFC set to  0.000000
1/26/2011	1:38:02 PM	SiCl4 MFC set to  0.000000
1/26/2011	1:38:02 PM	Bypass solenoid MFC set to  0.000000
1/26/2011	1:38:02 PM	Tube furnace set to 1001
1/26/2011	1:59:02 PM	Helium valve closed
1/26/2011	1:59:02 PM	BCl3 valve closed
1/26/2011	1:59:02 PM	PH3 valve closed
1/26/2011	1:59:02 PM	Main Vac valve closed
1/26/2011	1:59:02 PM	Bypass valve closed
1/26/2011	1:59:02 PM	H2 valve opened
1/26/2011	1:59:02 PM	SiCl4 pre valve opened
1/26/2011	1:59:02 PM	SiCl4 post valve opened
1/26/2011	1:59:02 PM	Bubbler valve opened
1/26/2011	1:59:02 PM	Helium MFC set to  0.000000
1/26/2011	1:59:02 PM	H2 MFC set to  500.000000
1/26/2011	1:59:02 PM	BCl3 MFC set to  0.000000
1/26/2011	1:59:02 PM	PHl3 MFC set to  0.000000
1/26/2011	1:59:02 PM	SiCl4 MFC set to  50.000000
1/26/2011	1:59:02 PM	Bypass solenoid MFC set to  0.000000
1/26/2011	1:59:02 PM	Tube furnace set to 1000
1/26/2011	1:59:12 PM	Helium valve closed
1/26/2011	1:59:12 PM	PH3 valve closed
1/26/2011	1:59:12 PM	Main Vac valve closed
1/26/2011	1:59:12 PM	Bypass valve closed
1/26/2011	1:59:12 PM	H2 valve opened
1/26/2011	1:59:12 PM	BCl3 valve opened
1/26/2011	1:59:12 PM	SiCl4 pre valve opened
1/26/2011	1:59:12 PM	SiCl4 post valve opened
1/26/2011	1:59:12 PM	Bubbler valve opened
1/26/2011	1:59:12 PM	Helium MFC set to  0.000000
1/26/2011	1:59:12 PM	H2 MFC set to  500.000000
1/26/2011	1:59:12 PM	BCl3 MFC set to  10.000000
1/26/2011	1:59:12 PM	PHl3 MFC set to  0.000000
1/26/2011	1:59:12 PM	SiCl4 MFC set to  50.000000
1/26/2011	1:59:12 PM	Bypass solenoid MFC set to  0.000000
1/26/2011	1:59:12 PM	Tube furnace set to 1000
1/26/2011	2:17:12 PM	H2 valve closed
1/26/2011	2:17:12 PM	BCl3 valve closed
1/26/2011	2:17:12 PM	PH3 valve closed
1/26/2011	2:17:12 PM	SiCl4 pre valve closed
1/26/2011	2:17:12 PM	SiCl4 post valve closed
1/26/2011	2:17:12 PM	Main Vac valve closed
1/26/2011	2:17:12 PM	Bypass valve closed
1/26/2011	2:17:12 PM	Helium valve opened
1/26/2011	2:17:12 PM	Bubbler valve opened
1/26/2011	2:17:12 PM	Helium MFC set to  500.000000
1/26/2011	2:17:12 PM	H2 MFC set to  0.000000
1/26/2011	2:17:12 PM	BCl3 MFC set to  0.000000
1/26/2011	2:17:12 PM	PHl3 MFC set to  0.000000
1/26/2011	2:17:12 PM	SiCl4 MFC set to  0.000000
1/26/2011	2:17:12 PM	Bypass solenoid MFC set to  0.000000
1/26/2011	2:17:12 PM	Tube furnace set to 0
1/26/2011	2:37:12 PM	Helium valve closed
1/26/2011	2:37:12 PM	H2 valve closed
1/26/2011	2:37:12 PM	BCl3 valve closed
1/26/2011	2:37:12 PM	PH3 valve closed
1/26/2011	2:37:12 PM	SiCl4 pre valve closed
1/26/2011	2:37:12 PM	SiCl4 post valve closed
1/26/2011	2:37:12 PM	Main Vac valve closed
1/26/2011	2:37:12 PM	Bypass valve closed
1/26/2011	2:37:12 PM	Bubbler valve closed
1/26/2011	2:37:12 PM	Helium MFC set to  0.000000
1/26/2011	2:37:12 PM	H2 MFC set to  0.000000
1/26/2011	2:37:13 PM	BCl3 MFC set to  0.000000
1/26/2011	2:37:13 PM	PHl3 MFC set to  0.000000
1/26/2011	2:37:13 PM	SiCl4 MFC set to  0.000000
1/26/2011	2:37:13 PM	Bypass solenoid MFC set to  0.000000
1/26/2011	2:37:13 PM	Tube furnace set to 0
1/26/2011	2:37:13 PM	Run finished at 2:37 PM
1/26/2011	2:41:53 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
1/26/2011	2:41:54 PM	Recipe started at 2:41 PM
1/26/2011	2:41:54 PM	Helium valve closed
1/26/2011	2:41:54 PM	H2 valve closed
1/26/2011	2:41:54 PM	BCl3 valve closed
1/26/2011	2:41:54 PM	PH3 valve closed
1/26/2011	2:41:54 PM	SiCl4 pre valve closed
1/26/2011	2:41:54 PM	SiCl4 post valve closed
1/26/2011	2:41:54 PM	Main Vac valve closed
1/26/2011	2:41:54 PM	Bubbler valve closed
1/26/2011	2:41:54 PM	Bypass valve opened
1/26/2011	2:41:54 PM	Helium MFC set to  0.000000
1/26/2011	2:41:54 PM	H2 MFC set to  0.000000
1/26/2011	2:41:54 PM	BCl3 MFC set to  0.000000
1/26/2011	2:41:54 PM	PHl3 MFC set to  0.000000
1/26/2011	2:41:54 PM	SiCl4 MFC set to  0.000000
1/26/2011	2:41:54 PM	Bypass solenoid MFC set to  0.000000
1/26/2011	2:41:54 PM	Tube furnace set to 0
1/26/2011	2:42:25 PM	Helium valve closed
1/26/2011	2:42:25 PM	H2 valve closed
1/26/2011	2:42:25 PM	BCl3 valve closed
1/26/2011	2:42:25 PM	PH3 valve closed
1/26/2011	2:42:25 PM	SiCl4 pre valve closed
1/26/2011	2:42:25 PM	SiCl4 post valve closed
1/26/2011	2:42:25 PM	Bubbler valve closed
1/26/2011	2:42:25 PM	Main Vac valve opened
1/26/2011	2:42:25 PM	Bypass valve opened
1/26/2011	2:42:25 PM	Helium MFC set to  0.000000
1/26/2011	2:42:25 PM	H2 MFC set to  0.000000
1/26/2011	2:42:25 PM	BCl3 MFC set to  0.000000
1/26/2011	2:42:25 PM	PHl3 MFC set to  0.000000
1/26/2011	2:42:25 PM	SiCl4 MFC set to  0.000000
1/26/2011	2:42:25 PM	Bypass solenoid MFC set to  0.000000
1/26/2011	2:42:25 PM	Tube furnace set to 0
1/26/2011	2:42:26 PM	Run finished at 2:42 PM
1/26/2011	2:42:26 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
1/26/2011	2:48:37 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\10x_he_purgepump.xml
1/26/2011	2:48:49 PM	Recipe started at 2:48 PM
1/26/2011	2:48:49 PM	Helium valve closed
1/26/2011	2:48:49 PM	H2 valve closed
1/26/2011	2:48:49 PM	BCl3 valve closed
1/26/2011	2:48:49 PM	PH3 valve closed
1/26/2011	2:48:49 PM	SiCl4 pre valve closed
1/26/2011	2:48:49 PM	SiCl4 post valve closed
1/26/2011	2:48:49 PM	Main Vac valve closed
1/26/2011	2:48:49 PM	Bubbler valve closed
1/26/2011	2:48:49 PM	Bypass valve opened
1/26/2011	2:48:49 PM	Helium MFC set to  0.000000
1/26/2011	2:48:49 PM	H2 MFC set to  0.000000
1/26/2011	2:48:49 PM	BCl3 MFC set to  0.000000
1/26/2011	2:48:49 PM	PHl3 MFC set to  0.000000
1/26/2011	2:48:49 PM	SiCl4 MFC set to  0.000000
1/26/2011	2:48:49 PM	Bypass solenoid MFC set to  0.000000
1/26/2011	2:48:50 PM	Tube furnace set to 0
1/26/2011	2:48:50 PM	Helium valve closed
1/26/2011	2:48:50 PM	H2 valve closed
1/26/2011	2:48:50 PM	BCl3 valve closed
1/26/2011	2:48:50 PM	PH3 valve closed
1/26/2011	2:48:50 PM	SiCl4 pre valve closed
1/26/2011	2:48:50 PM	SiCl4 post valve closed
1/26/2011	2:48:50 PM	Bubbler valve closed
1/26/2011	2:48:50 PM	Main Vac valve opened
1/26/2011	2:48:50 PM	Bypass valve opened
1/26/2011	2:48:50 PM	Helium MFC set to  0.000000
1/26/2011	2:48:50 PM	H2 MFC set to  0.000000
1/26/2011	2:48:50 PM	BCl3 MFC set to  0.000000
1/26/2011	2:48:50 PM	PHl3 MFC set to  0.000000
1/26/2011	2:48:50 PM	SiCl4 MFC set to  0.000000
1/26/2011	2:48:50 PM	Bypass solenoid MFC set to  0.000000
1/26/2011	2:48:50 PM	Tube furnace set to 0
1/26/2011	2:49:50 PM	H2 valve closed
1/26/2011	2:49:50 PM	BCl3 valve closed
1/26/2011	2:49:50 PM	PH3 valve closed
1/26/2011	2:49:50 PM	SiCl4 pre valve closed
1/26/2011	2:49:50 PM	SiCl4 post valve closed
1/26/2011	2:49:50 PM	Bubbler valve closed
1/26/2011	2:49:50 PM	Helium valve opened
1/26/2011	2:49:50 PM	Main Vac valve opened
1/26/2011	2:49:50 PM	Bypass valve opened
1/26/2011	2:49:50 PM	Helium MFC set to  100.000000
1/26/2011	2:49:50 PM	H2 MFC set to  0.000000
1/26/2011	2:49:50 PM	BCl3 MFC set to  0.000000
1/26/2011	2:49:50 PM	PHl3 MFC set to  0.000000
1/26/2011	2:49:50 PM	SiCl4 MFC set to  0.000000
1/26/2011	2:49:50 PM	Bypass solenoid MFC set to  0.000000
1/26/2011	2:49:50 PM	Tube furnace set to 0
1/26/2011	2:50:50 PM	Helium valve closed
1/26/2011	2:50:50 PM	H2 valve closed
1/26/2011	2:50:50 PM	BCl3 valve closed
1/26/2011	2:50:50 PM	PH3 valve closed
1/26/2011	2:50:50 PM	SiCl4 pre valve closed
1/26/2011	2:50:50 PM	SiCl4 post valve closed
1/26/2011	2:50:50 PM	Bubbler valve closed
1/26/2011	2:50:50 PM	Main Vac valve opened
1/26/2011	2:50:50 PM	Bypass valve opened
1/26/2011	2:50:50 PM	Helium MFC set to  0.000000
1/26/2011	2:50:50 PM	H2 MFC set to  0.000000
1/26/2011	2:50:50 PM	BCl3 MFC set to  0.000000
1/26/2011	2:50:50 PM	PHl3 MFC set to  0.000000
1/26/2011	2:50:50 PM	SiCl4 MFC set to  0.000000
1/26/2011	2:50:50 PM	Bypass solenoid MFC set to  0.000000
1/26/2011	2:50:50 PM	Tube furnace set to 0
1/26/2011	2:51:50 PM	H2 valve closed
1/26/2011	2:51:50 PM	BCl3 valve closed
1/26/2011	2:51:50 PM	PH3 valve closed
1/26/2011	2:51:50 PM	SiCl4 pre valve closed
1/26/2011	2:51:50 PM	SiCl4 post valve closed
1/26/2011	2:51:50 PM	Bubbler valve closed
1/26/2011	2:51:50 PM	Helium valve opened
1/26/2011	2:51:50 PM	Main Vac valve opened
1/26/2011	2:51:50 PM	Bypass valve opened
1/26/2011	2:51:50 PM	Helium MFC set to  100.000000
1/26/2011	2:51:50 PM	H2 MFC set to  0.000000
1/26/2011	2:51:50 PM	BCl3 MFC set to  0.000000
1/26/2011	2:51:50 PM	PHl3 MFC set to  0.000000
1/26/2011	2:51:50 PM	SiCl4 MFC set to  0.000000
1/26/2011	2:51:50 PM	Bypass solenoid MFC set to  0.000000
1/26/2011	2:51:51 PM	Tube furnace set to 0
1/26/2011	2:52:51 PM	Helium valve closed
1/26/2011	2:52:51 PM	H2 valve closed
1/26/2011	2:52:51 PM	BCl3 valve closed
1/26/2011	2:52:51 PM	PH3 valve closed
1/26/2011	2:52:51 PM	SiCl4 pre valve closed
1/26/2011	2:52:51 PM	SiCl4 post valve closed
1/26/2011	2:52:51 PM	Bubbler valve closed
1/26/2011	2:52:51 PM	Main Vac valve opened
1/26/2011	2:52:51 PM	Bypass valve opened
1/26/2011	2:52:51 PM	Helium MFC set to  0.000000
1/26/2011	2:52:51 PM	H2 MFC set to  0.000000
1/26/2011	2:52:51 PM	BCl3 MFC set to  0.000000
1/26/2011	2:52:51 PM	PHl3 MFC set to  0.000000
1/26/2011	2:52:51 PM	SiCl4 MFC set to  0.000000
1/26/2011	2:52:51 PM	Bypass solenoid MFC set to  0.000000
1/26/2011	2:52:51 PM	Tube furnace set to 0
1/26/2011	2:53:51 PM	H2 valve closed
1/26/2011	2:53:51 PM	BCl3 valve closed
1/26/2011	2:53:51 PM	PH3 valve closed
1/26/2011	2:53:51 PM	SiCl4 pre valve closed
1/26/2011	2:53:51 PM	SiCl4 post valve closed
1/26/2011	2:53:51 PM	Bubbler valve closed
1/26/2011	2:53:51 PM	Helium valve opened
1/26/2011	2:53:51 PM	Main Vac valve opened
1/26/2011	2:53:51 PM	Bypass valve opened
1/26/2011	2:53:51 PM	Helium MFC set to  100.000000
1/26/2011	2:53:51 PM	H2 MFC set to  0.000000
1/26/2011	2:53:51 PM	BCl3 MFC set to  0.000000
1/26/2011	2:53:51 PM	PHl3 MFC set to  0.000000
1/26/2011	2:53:51 PM	SiCl4 MFC set to  0.000000
1/26/2011	2:53:51 PM	Bypass solenoid MFC set to  0.000000
1/26/2011	2:53:51 PM	Tube furnace set to 0
1/26/2011	2:54:51 PM	Helium valve closed
1/26/2011	2:54:51 PM	H2 valve closed
1/26/2011	2:54:51 PM	BCl3 valve closed
1/26/2011	2:54:51 PM	PH3 valve closed
1/26/2011	2:54:51 PM	SiCl4 pre valve closed
1/26/2011	2:54:51 PM	SiCl4 post valve closed
1/26/2011	2:54:51 PM	Bubbler valve closed
1/26/2011	2:54:51 PM	Main Vac valve opened
1/26/2011	2:54:51 PM	Bypass valve opened
1/26/2011	2:54:51 PM	Helium MFC set to  0.000000
1/26/2011	2:54:51 PM	H2 MFC set to  0.000000
1/26/2011	2:54:51 PM	BCl3 MFC set to  0.000000
1/26/2011	2:54:51 PM	PHl3 MFC set to  0.000000
1/26/2011	2:54:51 PM	SiCl4 MFC set to  0.000000
1/26/2011	2:54:51 PM	Bypass solenoid MFC set to  0.000000
1/26/2011	2:54:51 PM	Tube furnace set to 0
1/26/2011	2:55:51 PM	H2 valve closed
1/26/2011	2:55:51 PM	BCl3 valve closed
1/26/2011	2:55:51 PM	PH3 valve closed
1/26/2011	2:55:51 PM	SiCl4 pre valve closed
1/26/2011	2:55:51 PM	SiCl4 post valve closed
1/26/2011	2:55:51 PM	Bubbler valve closed
1/26/2011	2:55:51 PM	Helium valve opened
1/26/2011	2:55:51 PM	Main Vac valve opened
1/26/2011	2:55:51 PM	Bypass valve opened
1/26/2011	2:55:51 PM	Helium MFC set to  100.000000
1/26/2011	2:55:51 PM	H2 MFC set to  0.000000
1/26/2011	2:55:51 PM	BCl3 MFC set to  0.000000
1/26/2011	2:55:51 PM	PHl3 MFC set to  0.000000
1/26/2011	2:55:51 PM	SiCl4 MFC set to  0.000000
1/26/2011	2:55:51 PM	Bypass solenoid MFC set to  0.000000
1/26/2011	2:55:51 PM	Tube furnace set to 0
1/26/2011	2:56:51 PM	Helium valve closed
1/26/2011	2:56:51 PM	H2 valve closed
1/26/2011	2:56:51 PM	BCl3 valve closed
1/26/2011	2:56:51 PM	PH3 valve closed
1/26/2011	2:56:51 PM	SiCl4 pre valve closed
1/26/2011	2:56:51 PM	SiCl4 post valve closed
1/26/2011	2:56:51 PM	Bubbler valve closed
1/26/2011	2:56:51 PM	Main Vac valve opened
1/26/2011	2:56:51 PM	Bypass valve opened
1/26/2011	2:56:51 PM	Helium MFC set to  0.000000
1/26/2011	2:56:51 PM	H2 MFC set to  0.000000
1/26/2011	2:56:51 PM	BCl3 MFC set to  0.000000
1/26/2011	2:56:51 PM	PHl3 MFC set to  0.000000
1/26/2011	2:56:51 PM	SiCl4 MFC set to  0.000000
1/26/2011	2:56:51 PM	Bypass solenoid MFC set to  0.000000
1/26/2011	2:56:52 PM	Tube furnace set to 0
1/26/2011	2:57:52 PM	H2 valve closed
1/26/2011	2:57:52 PM	BCl3 valve closed
1/26/2011	2:57:52 PM	PH3 valve closed
1/26/2011	2:57:52 PM	SiCl4 pre valve closed
1/26/2011	2:57:52 PM	SiCl4 post valve closed
1/26/2011	2:57:52 PM	Bubbler valve closed
1/26/2011	2:57:52 PM	Helium valve opened
1/26/2011	2:57:52 PM	Main Vac valve opened
1/26/2011	2:57:52 PM	Bypass valve opened
1/26/2011	2:57:52 PM	Helium MFC set to  100.000000
1/26/2011	2:57:52 PM	H2 MFC set to  0.000000
1/26/2011	2:57:52 PM	BCl3 MFC set to  0.000000
1/26/2011	2:57:52 PM	PHl3 MFC set to  0.000000
1/26/2011	2:57:52 PM	SiCl4 MFC set to  0.000000
1/26/2011	2:57:52 PM	Bypass solenoid MFC set to  0.000000
1/26/2011	2:57:52 PM	Tube furnace set to 0
1/26/2011	2:58:52 PM	Helium valve closed
1/26/2011	2:58:52 PM	H2 valve closed
1/26/2011	2:58:52 PM	BCl3 valve closed
1/26/2011	2:58:52 PM	PH3 valve closed
1/26/2011	2:58:52 PM	SiCl4 pre valve closed
1/26/2011	2:58:52 PM	SiCl4 post valve closed
1/26/2011	2:58:52 PM	Bubbler valve closed
1/26/2011	2:58:52 PM	Main Vac valve opened
1/26/2011	2:58:52 PM	Bypass valve opened
1/26/2011	2:58:52 PM	Helium MFC set to  0.000000
1/26/2011	2:58:52 PM	H2 MFC set to  0.000000
1/26/2011	2:58:52 PM	BCl3 MFC set to  0.000000
1/26/2011	2:58:52 PM	PHl3 MFC set to  0.000000
1/26/2011	2:58:52 PM	SiCl4 MFC set to  0.000000
1/26/2011	2:58:52 PM	Bypass solenoid MFC set to  0.000000
1/26/2011	2:58:52 PM	Tube furnace set to 0
1/26/2011	2:59:52 PM	H2 valve closed
1/26/2011	2:59:52 PM	BCl3 valve closed
1/26/2011	2:59:52 PM	PH3 valve closed
1/26/2011	2:59:52 PM	SiCl4 pre valve closed
1/26/2011	2:59:52 PM	SiCl4 post valve closed
1/26/2011	2:59:52 PM	Bubbler valve closed
1/26/2011	2:59:52 PM	Helium valve opened
1/26/2011	2:59:52 PM	Main Vac valve opened
1/26/2011	2:59:52 PM	Bypass valve opened
1/26/2011	2:59:52 PM	Helium MFC set to  100.000000
1/26/2011	2:59:52 PM	H2 MFC set to  0.000000
1/26/2011	2:59:52 PM	BCl3 MFC set to  0.000000
1/26/2011	2:59:52 PM	PHl3 MFC set to  0.000000
1/26/2011	2:59:52 PM	SiCl4 MFC set to  0.000000
1/26/2011	2:59:52 PM	Bypass solenoid MFC set to  0.000000
1/26/2011	2:59:52 PM	Tube furnace set to 0
1/26/2011	3:00:52 PM	Helium valve closed
1/26/2011	3:00:52 PM	H2 valve closed
1/26/2011	3:00:52 PM	BCl3 valve closed
1/26/2011	3:00:52 PM	PH3 valve closed
1/26/2011	3:00:52 PM	SiCl4 pre valve closed
1/26/2011	3:00:52 PM	SiCl4 post valve closed
1/26/2011	3:00:52 PM	Bubbler valve closed
1/26/2011	3:00:52 PM	Main Vac valve opened
1/26/2011	3:00:52 PM	Bypass valve opened
1/26/2011	3:00:52 PM	Helium MFC set to  0.000000
1/26/2011	3:00:52 PM	H2 MFC set to  0.000000
1/26/2011	3:00:52 PM	BCl3 MFC set to  0.000000
1/26/2011	3:00:52 PM	PHl3 MFC set to  0.000000
1/26/2011	3:00:52 PM	SiCl4 MFC set to  0.000000
1/26/2011	3:00:52 PM	Bypass solenoid MFC set to  0.000000
1/26/2011	3:00:52 PM	Tube furnace set to 0
1/26/2011	3:01:53 PM	H2 valve closed
1/26/2011	3:01:53 PM	BCl3 valve closed
1/26/2011	3:01:53 PM	PH3 valve closed
1/26/2011	3:01:53 PM	SiCl4 pre valve closed
1/26/2011	3:01:53 PM	SiCl4 post valve closed
1/26/2011	3:01:53 PM	Bubbler valve closed
1/26/2011	3:01:53 PM	Helium valve opened
1/26/2011	3:01:53 PM	Main Vac valve opened
1/26/2011	3:01:53 PM	Bypass valve opened
1/26/2011	3:01:53 PM	Helium MFC set to  100.000000
1/26/2011	3:01:53 PM	H2 MFC set to  0.000000
1/26/2011	3:01:53 PM	BCl3 MFC set to  0.000000
1/26/2011	3:01:53 PM	PHl3 MFC set to  0.000000
1/26/2011	3:01:53 PM	SiCl4 MFC set to  0.000000
1/26/2011	3:01:53 PM	Bypass solenoid MFC set to  0.000000
1/26/2011	3:01:53 PM	Tube furnace set to 0
1/26/2011	3:02:53 PM	Helium valve closed
1/26/2011	3:02:53 PM	H2 valve closed
1/26/2011	3:02:53 PM	BCl3 valve closed
1/26/2011	3:02:53 PM	PH3 valve closed
1/26/2011	3:02:53 PM	SiCl4 pre valve closed
1/26/2011	3:02:53 PM	SiCl4 post valve closed
1/26/2011	3:02:53 PM	Bubbler valve closed
1/26/2011	3:02:53 PM	Main Vac valve opened
1/26/2011	3:02:53 PM	Bypass valve opened
1/26/2011	3:02:53 PM	Helium MFC set to  0.000000
1/26/2011	3:02:53 PM	H2 MFC set to  0.000000
1/26/2011	3:02:53 PM	BCl3 MFC set to  0.000000
1/26/2011	3:02:53 PM	PHl3 MFC set to  0.000000
1/26/2011	3:02:53 PM	SiCl4 MFC set to  0.000000
1/26/2011	3:02:53 PM	Bypass solenoid MFC set to  0.000000
1/26/2011	3:02:53 PM	Tube furnace set to 0
1/26/2011	3:03:53 PM	H2 valve closed
1/26/2011	3:03:53 PM	BCl3 valve closed
1/26/2011	3:03:53 PM	PH3 valve closed
1/26/2011	3:03:53 PM	SiCl4 pre valve closed
1/26/2011	3:03:53 PM	SiCl4 post valve closed
1/26/2011	3:03:53 PM	Bubbler valve closed
1/26/2011	3:03:53 PM	Helium valve opened
1/26/2011	3:03:53 PM	Main Vac valve opened
1/26/2011	3:03:53 PM	Bypass valve opened
1/26/2011	3:03:53 PM	Helium MFC set to  100.000000
1/26/2011	3:03:53 PM	H2 MFC set to  0.000000
1/26/2011	3:03:53 PM	BCl3 MFC set to  0.000000
1/26/2011	3:03:53 PM	PHl3 MFC set to  0.000000
1/26/2011	3:03:53 PM	SiCl4 MFC set to  0.000000
1/26/2011	3:03:53 PM	Bypass solenoid MFC set to  0.000000
1/26/2011	3:03:53 PM	Tube furnace set to 0
1/26/2011	3:04:53 PM	Helium valve closed
1/26/2011	3:04:53 PM	H2 valve closed
1/26/2011	3:04:53 PM	BCl3 valve closed
1/26/2011	3:04:53 PM	PH3 valve closed
1/26/2011	3:04:53 PM	SiCl4 pre valve closed
1/26/2011	3:04:53 PM	SiCl4 post valve closed
1/26/2011	3:04:53 PM	Bubbler valve closed
1/26/2011	3:04:53 PM	Main Vac valve opened
1/26/2011	3:04:53 PM	Bypass valve opened
1/26/2011	3:04:53 PM	Helium MFC set to  0.000000
1/26/2011	3:04:53 PM	H2 MFC set to  0.000000
1/26/2011	3:04:53 PM	BCl3 MFC set to  0.000000
1/26/2011	3:04:53 PM	PHl3 MFC set to  0.000000
1/26/2011	3:04:53 PM	SiCl4 MFC set to  0.000000
1/26/2011	3:04:53 PM	Bypass solenoid MFC set to  0.000000
1/26/2011	3:04:53 PM	Tube furnace set to 0
1/26/2011	3:05:53 PM	H2 valve closed
1/26/2011	3:05:53 PM	BCl3 valve closed
1/26/2011	3:05:53 PM	PH3 valve closed
1/26/2011	3:05:53 PM	SiCl4 pre valve closed
1/26/2011	3:05:53 PM	SiCl4 post valve closed
1/26/2011	3:05:53 PM	Bubbler valve closed
1/26/2011	3:05:53 PM	Helium valve opened
1/26/2011	3:05:53 PM	Main Vac valve opened
1/26/2011	3:05:53 PM	Bypass valve opened
1/26/2011	3:05:53 PM	Helium MFC set to  100.000000
1/26/2011	3:05:53 PM	H2 MFC set to  0.000000
1/26/2011	3:05:53 PM	BCl3 MFC set to  0.000000
1/26/2011	3:05:53 PM	PHl3 MFC set to  0.000000
1/26/2011	3:05:53 PM	SiCl4 MFC set to  0.000000
1/26/2011	3:05:53 PM	Bypass solenoid MFC set to  0.000000
1/26/2011	3:05:54 PM	Tube furnace set to 0
1/26/2011	3:06:54 PM	Helium valve closed
1/26/2011	3:06:54 PM	H2 valve closed
1/26/2011	3:06:54 PM	BCl3 valve closed
1/26/2011	3:06:54 PM	PH3 valve closed
1/26/2011	3:06:54 PM	SiCl4 pre valve closed
1/26/2011	3:06:54 PM	SiCl4 post valve closed
1/26/2011	3:06:54 PM	Bubbler valve closed
1/26/2011	3:06:54 PM	Main Vac valve opened
1/26/2011	3:06:54 PM	Bypass valve opened
1/26/2011	3:06:54 PM	Helium MFC set to  0.000000
1/26/2011	3:06:54 PM	H2 MFC set to  0.000000
1/26/2011	3:06:54 PM	BCl3 MFC set to  0.000000
1/26/2011	3:06:54 PM	PHl3 MFC set to  0.000000
1/26/2011	3:06:54 PM	SiCl4 MFC set to  0.000000
1/26/2011	3:06:54 PM	Bypass solenoid MFC set to  0.000000
1/26/2011	3:06:54 PM	Tube furnace set to 0
1/26/2011	3:07:54 PM	H2 valve closed
1/26/2011	3:07:54 PM	BCl3 valve closed
1/26/2011	3:07:54 PM	PH3 valve closed
1/26/2011	3:07:54 PM	SiCl4 pre valve closed
1/26/2011	3:07:54 PM	SiCl4 post valve closed
1/26/2011	3:07:54 PM	Bubbler valve closed
1/26/2011	3:07:54 PM	Helium valve opened
1/26/2011	3:07:54 PM	Main Vac valve opened
1/26/2011	3:07:54 PM	Bypass valve opened
1/26/2011	3:07:54 PM	Helium MFC set to  100.000000
1/26/2011	3:07:54 PM	H2 MFC set to  0.000000
1/26/2011	3:07:54 PM	BCl3 MFC set to  0.000000
1/26/2011	3:07:54 PM	PHl3 MFC set to  0.000000
1/26/2011	3:07:54 PM	SiCl4 MFC set to  0.000000
1/26/2011	3:07:54 PM	Bypass solenoid MFC set to  0.000000
1/26/2011	3:07:54 PM	Tube furnace set to 0
1/26/2011	3:08:54 PM	Helium valve closed
1/26/2011	3:08:54 PM	H2 valve closed
1/26/2011	3:08:54 PM	BCl3 valve closed
1/26/2011	3:08:54 PM	PH3 valve closed
1/26/2011	3:08:54 PM	SiCl4 pre valve closed
1/26/2011	3:08:54 PM	SiCl4 post valve closed
1/26/2011	3:08:54 PM	Bubbler valve closed
1/26/2011	3:08:54 PM	Main Vac valve opened
1/26/2011	3:08:54 PM	Bypass valve opened
1/26/2011	3:08:54 PM	Helium MFC set to  0.000000
1/26/2011	3:08:54 PM	H2 MFC set to  0.000000
1/26/2011	3:08:54 PM	BCl3 MFC set to  0.000000
1/26/2011	3:08:54 PM	PHl3 MFC set to  0.000000
1/26/2011	3:08:54 PM	SiCl4 MFC set to  0.000000
1/26/2011	3:08:54 PM	Bypass solenoid MFC set to  0.000000
1/26/2011	3:08:54 PM	Tube furnace set to 0
1/26/2011	3:08:55 PM	Run finished at 3:08 PM
1/26/2011	3:08:55 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\10x_he_purgepump.xml
1/26/2011	3:31:52 PM	Main Vac valve closed
1/26/2011	3:31:54 PM	Bypass valve closed
1/26/2011	3:32:12 PM	Bypass valve opened
1/26/2011	3:32:13 PM	Main Vac valve opened
1/26/2011	3:32:17 PM	Recipe started at 3:32 PM
1/26/2011	3:32:17 PM	Helium valve closed
1/26/2011	3:32:17 PM	BCl3 valve closed
1/26/2011	3:32:17 PM	PH3 valve closed
1/26/2011	3:32:17 PM	SiCl4 pre valve closed
1/26/2011	3:32:17 PM	SiCl4 post valve closed
1/26/2011	3:32:17 PM	Main Vac valve closed
1/26/2011	3:32:17 PM	Bypass valve closed
1/26/2011	3:32:17 PM	Bubbler valve closed
1/26/2011	3:32:17 PM	H2 valve opened
1/26/2011	3:32:17 PM	Helium MFC set to  0.000000
1/26/2011	3:32:17 PM	H2 MFC set to  500.000000
1/26/2011	3:32:17 PM	BCl3 MFC set to  0.000000
1/26/2011	3:32:17 PM	PHl3 MFC set to  0.000000
1/26/2011	3:32:17 PM	SiCl4 MFC set to  0.000000
1/26/2011	3:32:17 PM	Bypass solenoid MFC set to  0.000000
1/26/2011	3:32:17 PM	Tube furnace set to 200
1/26/2011	3:33:33 PM	Helium valve closed
1/26/2011	3:33:33 PM	BCl3 valve closed
1/26/2011	3:33:33 PM	PH3 valve closed
1/26/2011	3:33:33 PM	SiCl4 pre valve closed
1/26/2011	3:33:33 PM	SiCl4 post valve closed
1/26/2011	3:33:33 PM	Main Vac valve closed
1/26/2011	3:33:33 PM	Bypass valve closed
1/26/2011	3:33:33 PM	H2 valve opened
1/26/2011	3:33:33 PM	Bubbler valve opened
1/26/2011	3:33:33 PM	Helium MFC set to  0.000000
1/26/2011	3:33:33 PM	H2 MFC set to  400.000000
1/26/2011	3:33:33 PM	BCl3 MFC set to  0.000000
1/26/2011	3:33:33 PM	PHl3 MFC set to  0.000000
1/26/2011	3:33:33 PM	SiCl4 MFC set to  0.000000
1/26/2011	3:33:33 PM	Bypass solenoid MFC set to  0.000000
1/26/2011	3:33:33 PM	Tube furnace set to 1001
1/26/2011	3:55:33 PM	Helium valve closed
1/26/2011	3:55:33 PM	PH3 valve closed
1/26/2011	3:55:33 PM	Main Vac valve closed
1/26/2011	3:55:33 PM	Bypass valve closed
1/26/2011	3:55:33 PM	H2 valve opened
1/26/2011	3:55:33 PM	BCl3 valve opened
1/26/2011	3:55:33 PM	SiCl4 pre valve opened
1/26/2011	3:55:33 PM	SiCl4 post valve opened
1/26/2011	3:55:33 PM	Bubbler valve opened
1/26/2011	3:55:33 PM	Helium MFC set to  0.000000
1/26/2011	3:55:33 PM	H2 MFC set to  500.000000
1/26/2011	3:55:33 PM	BCl3 MFC set to  10.000000
1/26/2011	3:55:33 PM	PHl3 MFC set to  0.000000
1/26/2011	3:55:33 PM	SiCl4 MFC set to  50.000000
1/26/2011	3:55:33 PM	Bypass solenoid MFC set to  0.000000
1/26/2011	3:55:33 PM	Tube furnace set to 1000
1/26/2011	4:15:33 PM	Helium valve closed
1/26/2011	4:15:33 PM	BCl3 valve closed
1/26/2011	4:15:33 PM	PH3 valve closed
1/26/2011	4:15:33 PM	SiCl4 pre valve closed
1/26/2011	4:15:33 PM	SiCl4 post valve closed
1/26/2011	4:15:33 PM	Main Vac valve closed
1/26/2011	4:15:33 PM	Bypass valve closed
1/26/2011	4:15:33 PM	H2 valve opened
1/26/2011	4:15:33 PM	Bubbler valve opened
1/26/2011	4:15:33 PM	Helium MFC set to  0.000000
1/26/2011	4:15:33 PM	H2 MFC set to  500.000000
1/26/2011	4:15:33 PM	BCl3 MFC set to  0.000000
1/26/2011	4:15:33 PM	PHl3 MFC set to  0.000000
1/26/2011	4:15:33 PM	SiCl4 MFC set to  0.000000
1/26/2011	4:15:33 PM	Bypass solenoid MFC set to  0.000000
1/26/2011	4:15:33 PM	Tube furnace set to 0
1/26/2011	4:15:53 PM	H2 valve closed
1/26/2011	4:15:53 PM	BCl3 valve closed
1/26/2011	4:15:53 PM	PH3 valve closed
1/26/2011	4:15:53 PM	SiCl4 pre valve closed
1/26/2011	4:15:53 PM	SiCl4 post valve closed
1/26/2011	4:15:53 PM	Main Vac valve closed
1/26/2011	4:15:53 PM	Bypass valve closed
1/26/2011	4:15:53 PM	Helium valve opened
1/26/2011	4:15:53 PM	Bubbler valve opened
1/26/2011	4:15:53 PM	Helium MFC set to  400.000000
1/26/2011	4:15:53 PM	H2 MFC set to  0.000000
1/26/2011	4:15:53 PM	BCl3 MFC set to  0.000000
1/26/2011	4:15:53 PM	PHl3 MFC set to  0.000000
1/26/2011	4:15:53 PM	SiCl4 MFC set to  0.000000
1/26/2011	4:15:53 PM	Bypass solenoid MFC set to  0.000000
1/26/2011	4:15:54 PM	Tube furnace set to 0
1/26/2011	4:35:54 PM	Helium valve closed
1/26/2011	4:35:54 PM	H2 valve closed
1/26/2011	4:35:54 PM	BCl3 valve closed
1/26/2011	4:35:54 PM	PH3 valve closed
1/26/2011	4:35:54 PM	SiCl4 pre valve closed
1/26/2011	4:35:54 PM	SiCl4 post valve closed
1/26/2011	4:35:54 PM	Main Vac valve closed
1/26/2011	4:35:54 PM	Bypass valve closed
1/26/2011	4:35:54 PM	Bubbler valve closed
1/26/2011	4:35:54 PM	Helium MFC set to  0.000000
1/26/2011	4:35:54 PM	H2 MFC set to  0.000000
1/26/2011	4:35:54 PM	BCl3 MFC set to  0.000000
1/26/2011	4:35:54 PM	PHl3 MFC set to  0.000000
1/26/2011	4:35:54 PM	SiCl4 MFC set to  0.000000
1/26/2011	4:35:54 PM	Bypass solenoid MFC set to  0.000000
1/26/2011	4:35:54 PM	Tube furnace set to 0
1/26/2011	4:35:54 PM	Run finished at 4:35 PM
1/26/2011	4:46:36 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\10x_he_purgepump.xml
1/26/2011	4:46:48 PM	Recipe started at 4:46 PM
1/26/2011	4:46:48 PM	Helium valve closed
1/26/2011	4:46:48 PM	H2 valve closed
1/26/2011	4:46:48 PM	BCl3 valve closed
1/26/2011	4:46:48 PM	PH3 valve closed
1/26/2011	4:46:48 PM	SiCl4 pre valve closed
1/26/2011	4:46:48 PM	SiCl4 post valve closed
1/26/2011	4:46:48 PM	Main Vac valve closed
1/26/2011	4:46:48 PM	Bubbler valve closed
1/26/2011	4:46:48 PM	Bypass valve opened
1/26/2011	4:46:48 PM	Helium MFC set to  0.000000
1/26/2011	4:46:48 PM	H2 MFC set to  0.000000
1/26/2011	4:46:48 PM	BCl3 MFC set to  0.000000
1/26/2011	4:46:48 PM	PHl3 MFC set to  0.000000
1/26/2011	4:46:48 PM	SiCl4 MFC set to  0.000000
1/26/2011	4:46:48 PM	Bypass solenoid MFC set to  0.000000
1/26/2011	4:46:48 PM	Tube furnace set to 0
1/26/2011	4:47:20 PM	Helium valve closed
1/26/2011	4:47:20 PM	H2 valve closed
1/26/2011	4:47:20 PM	BCl3 valve closed
1/26/2011	4:47:20 PM	PH3 valve closed
1/26/2011	4:47:20 PM	SiCl4 pre valve closed
1/26/2011	4:47:20 PM	SiCl4 post valve closed
1/26/2011	4:47:20 PM	Bubbler valve closed
1/26/2011	4:47:20 PM	Main Vac valve opened
1/26/2011	4:47:20 PM	Bypass valve opened
1/26/2011	4:47:20 PM	Helium MFC set to  0.000000
1/26/2011	4:47:20 PM	H2 MFC set to  0.000000
1/26/2011	4:47:20 PM	BCl3 MFC set to  0.000000
1/26/2011	4:47:20 PM	PHl3 MFC set to  0.000000
1/26/2011	4:47:20 PM	SiCl4 MFC set to  0.000000
1/26/2011	4:47:20 PM	Bypass solenoid MFC set to  0.000000
1/26/2011	4:47:20 PM	Tube furnace set to 0
1/26/2011	4:48:20 PM	H2 valve closed
1/26/2011	4:48:20 PM	BCl3 valve closed
1/26/2011	4:48:20 PM	PH3 valve closed
1/26/2011	4:48:20 PM	SiCl4 pre valve closed
1/26/2011	4:48:20 PM	SiCl4 post valve closed
1/26/2011	4:48:20 PM	Bubbler valve closed
1/26/2011	4:48:20 PM	Helium valve opened
1/26/2011	4:48:20 PM	Main Vac valve opened
1/26/2011	4:48:20 PM	Bypass valve opened
1/26/2011	4:48:20 PM	Helium MFC set to  100.000000
1/26/2011	4:48:20 PM	H2 MFC set to  0.000000
1/26/2011	4:48:20 PM	BCl3 MFC set to  0.000000
1/26/2011	4:48:20 PM	PHl3 MFC set to  0.000000
1/26/2011	4:48:20 PM	SiCl4 MFC set to  0.000000
1/26/2011	4:48:20 PM	Bypass solenoid MFC set to  0.000000
1/26/2011	4:48:20 PM	Tube furnace set to 0
1/26/2011	4:49:20 PM	Helium valve closed
1/26/2011	4:49:20 PM	H2 valve closed
1/26/2011	4:49:20 PM	BCl3 valve closed
1/26/2011	4:49:20 PM	PH3 valve closed
1/26/2011	4:49:20 PM	SiCl4 pre valve closed
1/26/2011	4:49:20 PM	SiCl4 post valve closed
1/26/2011	4:49:20 PM	Bubbler valve closed
1/26/2011	4:49:20 PM	Main Vac valve opened
1/26/2011	4:49:20 PM	Bypass valve opened
1/26/2011	4:49:20 PM	Helium MFC set to  0.000000
1/26/2011	4:49:20 PM	H2 MFC set to  0.000000
1/26/2011	4:49:20 PM	BCl3 MFC set to  0.000000
1/26/2011	4:49:20 PM	PHl3 MFC set to  0.000000
1/26/2011	4:49:20 PM	SiCl4 MFC set to  0.000000
1/26/2011	4:49:20 PM	Bypass solenoid MFC set to  0.000000
1/26/2011	4:49:21 PM	Tube furnace set to 0
1/26/2011	4:50:21 PM	H2 valve closed
1/26/2011	4:50:21 PM	BCl3 valve closed
1/26/2011	4:50:21 PM	PH3 valve closed
1/26/2011	4:50:21 PM	SiCl4 pre valve closed
1/26/2011	4:50:21 PM	SiCl4 post valve closed
1/26/2011	4:50:21 PM	Bubbler valve closed
1/26/2011	4:50:21 PM	Helium valve opened
1/26/2011	4:50:21 PM	Main Vac valve opened
1/26/2011	4:50:21 PM	Bypass valve opened
1/26/2011	4:50:21 PM	Helium MFC set to  100.000000
1/26/2011	4:50:21 PM	H2 MFC set to  0.000000
1/26/2011	4:50:21 PM	BCl3 MFC set to  0.000000
1/26/2011	4:50:21 PM	PHl3 MFC set to  0.000000
1/26/2011	4:50:21 PM	SiCl4 MFC set to  0.000000
1/26/2011	4:50:21 PM	Bypass solenoid MFC set to  0.000000
1/26/2011	4:50:21 PM	Tube furnace set to 0
1/26/2011	4:51:21 PM	Helium valve closed
1/26/2011	4:51:21 PM	H2 valve closed
1/26/2011	4:51:21 PM	BCl3 valve closed
1/26/2011	4:51:21 PM	PH3 valve closed
1/26/2011	4:51:21 PM	SiCl4 pre valve closed
1/26/2011	4:51:21 PM	SiCl4 post valve closed
1/26/2011	4:51:21 PM	Bubbler valve closed
1/26/2011	4:51:21 PM	Main Vac valve opened
1/26/2011	4:51:21 PM	Bypass valve opened
1/26/2011	4:51:21 PM	Helium MFC set to  0.000000
1/26/2011	4:51:21 PM	H2 MFC set to  0.000000
1/26/2011	4:51:21 PM	BCl3 MFC set to  0.000000
1/26/2011	4:51:21 PM	PHl3 MFC set to  0.000000
1/26/2011	4:51:21 PM	SiCl4 MFC set to  0.000000
1/26/2011	4:51:21 PM	Bypass solenoid MFC set to  0.000000
1/26/2011	4:51:21 PM	Tube furnace set to 0
1/26/2011	4:52:21 PM	H2 valve closed
1/26/2011	4:52:21 PM	BCl3 valve closed
1/26/2011	4:52:21 PM	PH3 valve closed
1/26/2011	4:52:21 PM	SiCl4 pre valve closed
1/26/2011	4:52:21 PM	SiCl4 post valve closed
1/26/2011	4:52:21 PM	Bubbler valve closed
1/26/2011	4:52:21 PM	Helium valve opened
1/26/2011	4:52:21 PM	Main Vac valve opened
1/26/2011	4:52:21 PM	Bypass valve opened
1/26/2011	4:52:21 PM	Helium MFC set to  100.000000
1/26/2011	4:52:21 PM	H2 MFC set to  0.000000
1/26/2011	4:52:21 PM	BCl3 MFC set to  0.000000
1/26/2011	4:52:21 PM	PHl3 MFC set to  0.000000
1/26/2011	4:52:21 PM	SiCl4 MFC set to  0.000000
1/26/2011	4:52:21 PM	Bypass solenoid MFC set to  0.000000
1/26/2011	4:52:21 PM	Tube furnace set to 0
1/26/2011	4:53:21 PM	Helium valve closed
1/26/2011	4:53:21 PM	H2 valve closed
1/26/2011	4:53:21 PM	BCl3 valve closed
1/26/2011	4:53:21 PM	PH3 valve closed
1/26/2011	4:53:21 PM	SiCl4 pre valve closed
1/26/2011	4:53:21 PM	SiCl4 post valve closed
1/26/2011	4:53:21 PM	Bubbler valve closed
1/26/2011	4:53:21 PM	Main Vac valve opened
1/26/2011	4:53:21 PM	Bypass valve opened
1/26/2011	4:53:21 PM	Helium MFC set to  0.000000
1/26/2011	4:53:21 PM	H2 MFC set to  0.000000
1/26/2011	4:53:21 PM	BCl3 MFC set to  0.000000
1/26/2011	4:53:21 PM	PHl3 MFC set to  0.000000
1/26/2011	4:53:21 PM	SiCl4 MFC set to  0.000000
1/26/2011	4:53:21 PM	Bypass solenoid MFC set to  0.000000
1/26/2011	4:53:21 PM	Tube furnace set to 0
1/26/2011	4:54:21 PM	H2 valve closed
1/26/2011	4:54:21 PM	BCl3 valve closed
1/26/2011	4:54:21 PM	PH3 valve closed
1/26/2011	4:54:21 PM	SiCl4 pre valve closed
1/26/2011	4:54:21 PM	SiCl4 post valve closed
1/26/2011	4:54:21 PM	Bubbler valve closed
1/26/2011	4:54:21 PM	Helium valve opened
1/26/2011	4:54:21 PM	Main Vac valve opened
1/26/2011	4:54:21 PM	Bypass valve opened
1/26/2011	4:54:21 PM	Helium MFC set to  100.000000
1/26/2011	4:54:21 PM	H2 MFC set to  0.000000
1/26/2011	4:54:21 PM	BCl3 MFC set to  0.000000
1/26/2011	4:54:21 PM	PHl3 MFC set to  0.000000
1/26/2011	4:54:21 PM	SiCl4 MFC set to  0.000000
1/26/2011	4:54:21 PM	Bypass solenoid MFC set to  0.000000
1/26/2011	4:54:22 PM	Tube furnace set to 0
1/26/2011	4:55:22 PM	Helium valve closed
1/26/2011	4:55:22 PM	H2 valve closed
1/26/2011	4:55:22 PM	BCl3 valve closed
1/26/2011	4:55:22 PM	PH3 valve closed
1/26/2011	4:55:22 PM	SiCl4 pre valve closed
1/26/2011	4:55:22 PM	SiCl4 post valve closed
1/26/2011	4:55:22 PM	Bubbler valve closed
1/26/2011	4:55:22 PM	Main Vac valve opened
1/26/2011	4:55:22 PM	Bypass valve opened
1/26/2011	4:55:22 PM	Helium MFC set to  0.000000
1/26/2011	4:55:22 PM	H2 MFC set to  0.000000
1/26/2011	4:55:22 PM	BCl3 MFC set to  0.000000
1/26/2011	4:55:22 PM	PHl3 MFC set to  0.000000
1/26/2011	4:55:22 PM	SiCl4 MFC set to  0.000000
1/26/2011	4:55:22 PM	Bypass solenoid MFC set to  0.000000
1/26/2011	4:55:22 PM	Tube furnace set to 0
1/26/2011	4:56:22 PM	H2 valve closed
1/26/2011	4:56:22 PM	BCl3 valve closed
1/26/2011	4:56:22 PM	PH3 valve closed
1/26/2011	4:56:22 PM	SiCl4 pre valve closed
1/26/2011	4:56:22 PM	SiCl4 post valve closed
1/26/2011	4:56:22 PM	Bubbler valve closed
1/26/2011	4:56:22 PM	Helium valve opened
1/26/2011	4:56:22 PM	Main Vac valve opened
1/26/2011	4:56:22 PM	Bypass valve opened
1/26/2011	4:56:22 PM	Helium MFC set to  100.000000
1/26/2011	4:56:22 PM	H2 MFC set to  0.000000
1/26/2011	4:56:22 PM	BCl3 MFC set to  0.000000
1/26/2011	4:56:22 PM	PHl3 MFC set to  0.000000
1/26/2011	4:56:22 PM	SiCl4 MFC set to  0.000000
1/26/2011	4:56:22 PM	Bypass solenoid MFC set to  0.000000
1/26/2011	4:56:22 PM	Tube furnace set to 0
1/26/2011	4:57:22 PM	Helium valve closed
1/26/2011	4:57:22 PM	H2 valve closed
1/26/2011	4:57:22 PM	BCl3 valve closed
1/26/2011	4:57:22 PM	PH3 valve closed
1/26/2011	4:57:22 PM	SiCl4 pre valve closed
1/26/2011	4:57:22 PM	SiCl4 post valve closed
1/26/2011	4:57:22 PM	Bubbler valve closed
1/26/2011	4:57:22 PM	Main Vac valve opened
1/26/2011	4:57:22 PM	Bypass valve opened
1/26/2011	4:57:22 PM	Helium MFC set to  0.000000
1/26/2011	4:57:22 PM	H2 MFC set to  0.000000
1/26/2011	4:57:22 PM	BCl3 MFC set to  0.000000
1/26/2011	4:57:22 PM	PHl3 MFC set to  0.000000
1/26/2011	4:57:22 PM	SiCl4 MFC set to  0.000000
1/26/2011	4:57:22 PM	Bypass solenoid MFC set to  0.000000
1/26/2011	4:57:22 PM	Tube furnace set to 0
1/26/2011	4:58:22 PM	H2 valve closed
1/26/2011	4:58:22 PM	BCl3 valve closed
1/26/2011	4:58:22 PM	PH3 valve closed
1/26/2011	4:58:22 PM	SiCl4 pre valve closed
1/26/2011	4:58:22 PM	SiCl4 post valve closed
1/26/2011	4:58:22 PM	Bubbler valve closed
1/26/2011	4:58:22 PM	Helium valve opened
1/26/2011	4:58:22 PM	Main Vac valve opened
1/26/2011	4:58:22 PM	Bypass valve opened
1/26/2011	4:58:22 PM	Helium MFC set to  100.000000
1/26/2011	4:58:22 PM	H2 MFC set to  0.000000
1/26/2011	4:58:22 PM	BCl3 MFC set to  0.000000
1/26/2011	4:58:22 PM	PHl3 MFC set to  0.000000
1/26/2011	4:58:22 PM	SiCl4 MFC set to  0.000000
1/26/2011	4:58:22 PM	Bypass solenoid MFC set to  0.000000
1/26/2011	4:58:22 PM	Tube furnace set to 0
1/26/2011	4:59:22 PM	Helium valve closed
1/26/2011	4:59:22 PM	H2 valve closed
1/26/2011	4:59:22 PM	BCl3 valve closed
1/26/2011	4:59:22 PM	PH3 valve closed
1/26/2011	4:59:22 PM	SiCl4 pre valve closed
1/26/2011	4:59:22 PM	SiCl4 post valve closed
1/26/2011	4:59:22 PM	Bubbler valve closed
1/26/2011	4:59:22 PM	Main Vac valve opened
1/26/2011	4:59:22 PM	Bypass valve opened
1/26/2011	4:59:22 PM	Helium MFC set to  0.000000
1/26/2011	4:59:22 PM	H2 MFC set to  0.000000
1/26/2011	4:59:22 PM	BCl3 MFC set to  0.000000
1/26/2011	4:59:22 PM	PHl3 MFC set to  0.000000
1/26/2011	4:59:22 PM	SiCl4 MFC set to  0.000000
1/26/2011	4:59:22 PM	Bypass solenoid MFC set to  0.000000
1/26/2011	4:59:23 PM	Tube furnace set to 0
1/26/2011	5:00:05 PM	H2 valve closed
1/26/2011	5:00:05 PM	BCl3 valve closed
1/26/2011	5:00:05 PM	PH3 valve closed
1/26/2011	5:00:05 PM	SiCl4 pre valve closed
1/26/2011	5:00:05 PM	SiCl4 post valve closed
1/26/2011	5:00:05 PM	Bubbler valve closed
1/26/2011	5:00:05 PM	Helium valve opened
1/26/2011	5:00:05 PM	Main Vac valve opened
1/26/2011	5:00:05 PM	Bypass valve opened
1/26/2011	5:00:05 PM	Helium MFC set to  100.000000
1/26/2011	5:00:05 PM	H2 MFC set to  0.000000
1/26/2011	5:00:05 PM	BCl3 MFC set to  0.000000
1/26/2011	5:00:05 PM	PHl3 MFC set to  0.000000
1/26/2011	5:00:05 PM	SiCl4 MFC set to  0.000000
1/26/2011	5:00:05 PM	Bypass solenoid MFC set to  0.000000
1/26/2011	5:00:06 PM	Tube furnace set to 0
1/26/2011	5:00:11 PM	Helium valve closed
1/26/2011	5:00:11 PM	H2 valve closed
1/26/2011	5:00:11 PM	BCl3 valve closed
1/26/2011	5:00:11 PM	PH3 valve closed
1/26/2011	5:00:11 PM	SiCl4 pre valve closed
1/26/2011	5:00:11 PM	SiCl4 post valve closed
1/26/2011	5:00:11 PM	Bubbler valve closed
1/26/2011	5:00:11 PM	Main Vac valve opened
1/26/2011	5:00:11 PM	Bypass valve opened
1/26/2011	5:00:11 PM	Helium MFC set to  0.000000
1/26/2011	5:00:11 PM	H2 MFC set to  0.000000
1/26/2011	5:00:11 PM	BCl3 MFC set to  0.000000
1/26/2011	5:00:11 PM	PHl3 MFC set to  0.000000
1/26/2011	5:00:11 PM	SiCl4 MFC set to  0.000000
1/26/2011	5:00:11 PM	Bypass solenoid MFC set to  0.000000
1/26/2011	5:00:11 PM	Tube furnace set to 0
1/26/2011	5:01:07 PM	H2 valve closed
1/26/2011	5:01:07 PM	BCl3 valve closed
1/26/2011	5:01:07 PM	PH3 valve closed
1/26/2011	5:01:07 PM	SiCl4 pre valve closed
1/26/2011	5:01:07 PM	SiCl4 post valve closed
1/26/2011	5:01:07 PM	Bubbler valve closed
1/26/2011	5:01:07 PM	Helium valve opened
1/26/2011	5:01:07 PM	Main Vac valve opened
1/26/2011	5:01:07 PM	Bypass valve opened
1/26/2011	5:01:07 PM	Helium MFC set to  100.000000
1/26/2011	5:01:07 PM	H2 MFC set to  0.000000
1/26/2011	5:01:07 PM	BCl3 MFC set to  0.000000
1/26/2011	5:01:07 PM	PHl3 MFC set to  0.000000
1/26/2011	5:01:07 PM	SiCl4 MFC set to  0.000000
1/26/2011	5:01:07 PM	Bypass solenoid MFC set to  0.000000
1/26/2011	5:01:07 PM	Tube furnace set to 0
1/26/2011	5:01:07 PM	Helium valve closed
1/26/2011	5:01:07 PM	H2 valve closed
1/26/2011	5:01:07 PM	BCl3 valve closed
1/26/2011	5:01:07 PM	PH3 valve closed
1/26/2011	5:01:07 PM	SiCl4 pre valve closed
1/26/2011	5:01:07 PM	SiCl4 post valve closed
1/26/2011	5:01:07 PM	Bubbler valve closed
1/26/2011	5:01:07 PM	Main Vac valve opened
1/26/2011	5:01:07 PM	Bypass valve opened
1/26/2011	5:01:07 PM	Helium MFC set to  0.000000
1/26/2011	5:01:07 PM	H2 MFC set to  0.000000
1/26/2011	5:01:07 PM	BCl3 MFC set to  0.000000
1/26/2011	5:01:07 PM	PHl3 MFC set to  0.000000
1/26/2011	5:01:07 PM	SiCl4 MFC set to  0.000000
1/26/2011	5:01:07 PM	Bypass solenoid MFC set to  0.000000
1/26/2011	5:01:08 PM	Tube furnace set to 0
1/26/2011	5:01:10 PM	H2 valve closed
1/26/2011	5:01:10 PM	BCl3 valve closed
1/26/2011	5:01:10 PM	PH3 valve closed
1/26/2011	5:01:10 PM	SiCl4 pre valve closed
1/26/2011	5:01:10 PM	SiCl4 post valve closed
1/26/2011	5:01:10 PM	Bubbler valve closed
1/26/2011	5:01:10 PM	Helium valve opened
1/26/2011	5:01:10 PM	Main Vac valve opened
1/26/2011	5:01:10 PM	Bypass valve opened
1/26/2011	5:01:10 PM	Helium MFC set to  100.000000
1/26/2011	5:01:10 PM	H2 MFC set to  0.000000
1/26/2011	5:01:10 PM	BCl3 MFC set to  0.000000
1/26/2011	5:01:10 PM	PHl3 MFC set to  0.000000
1/26/2011	5:01:10 PM	SiCl4 MFC set to  0.000000
1/26/2011	5:01:10 PM	Bypass solenoid MFC set to  0.000000
1/26/2011	5:01:10 PM	Tube furnace set to 0
1/26/2011	5:01:11 PM	Helium valve closed
1/26/2011	5:01:11 PM	H2 valve closed
1/26/2011	5:01:11 PM	BCl3 valve closed
1/26/2011	5:01:11 PM	PH3 valve closed
1/26/2011	5:01:11 PM	SiCl4 pre valve closed
1/26/2011	5:01:11 PM	SiCl4 post valve closed
1/26/2011	5:01:11 PM	Bubbler valve closed
1/26/2011	5:01:11 PM	Main Vac valve opened
1/26/2011	5:01:11 PM	Bypass valve opened
1/26/2011	5:01:11 PM	Helium MFC set to  0.000000
1/26/2011	5:01:11 PM	H2 MFC set to  0.000000
1/26/2011	5:01:11 PM	BCl3 MFC set to  0.000000
1/26/2011	5:01:11 PM	PHl3 MFC set to  0.000000
1/26/2011	5:01:11 PM	SiCl4 MFC set to  0.000000
1/26/2011	5:01:11 PM	Bypass solenoid MFC set to  0.000000
1/26/2011	5:01:11 PM	Tube furnace set to 0
1/26/2011	5:01:14 PM	H2 valve closed
1/26/2011	5:01:14 PM	BCl3 valve closed
1/26/2011	5:01:14 PM	PH3 valve closed
1/26/2011	5:01:14 PM	SiCl4 pre valve closed
1/26/2011	5:01:14 PM	SiCl4 post valve closed
1/26/2011	5:01:14 PM	Bubbler valve closed
1/26/2011	5:01:14 PM	Helium valve opened
1/26/2011	5:01:14 PM	Main Vac valve opened
1/26/2011	5:01:14 PM	Bypass valve opened
1/26/2011	5:01:14 PM	Helium MFC set to  100.000000
1/26/2011	5:01:14 PM	H2 MFC set to  0.000000
1/26/2011	5:01:14 PM	BCl3 MFC set to  0.000000
1/26/2011	5:01:14 PM	PHl3 MFC set to  0.000000
1/26/2011	5:01:14 PM	SiCl4 MFC set to  0.000000
1/26/2011	5:01:14 PM	Bypass solenoid MFC set to  0.000000
1/26/2011	5:01:14 PM	Tube furnace set to 0
1/26/2011	5:02:14 PM	Helium valve closed
1/26/2011	5:02:14 PM	H2 valve closed
1/26/2011	5:02:14 PM	BCl3 valve closed
1/26/2011	5:02:14 PM	PH3 valve closed
1/26/2011	5:02:14 PM	SiCl4 pre valve closed
1/26/2011	5:02:14 PM	SiCl4 post valve closed
1/26/2011	5:02:14 PM	Bubbler valve closed
1/26/2011	5:02:14 PM	Main Vac valve opened
1/26/2011	5:02:14 PM	Bypass valve opened
1/26/2011	5:02:14 PM	Helium MFC set to  0.000000
1/26/2011	5:02:14 PM	H2 MFC set to  0.000000
1/26/2011	5:02:14 PM	BCl3 MFC set to  0.000000
1/26/2011	5:02:14 PM	PHl3 MFC set to  0.000000
1/26/2011	5:02:14 PM	SiCl4 MFC set to  0.000000
1/26/2011	5:02:14 PM	Bypass solenoid MFC set to  0.000000
1/26/2011	5:02:14 PM	Tube furnace set to 0
1/26/2011	5:02:15 PM	Run finished at 5:02 PM
1/26/2011	5:02:15 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\10x_he_purgepump.xml
1/26/2011	5:03:14 PM	Main Vac valve closed
1/26/2011	5:03:16 PM	Bypass valve closed
1/26/2011	5:03:20 PM	Bypass valve opened
1/26/2011	5:03:21 PM	Main Vac valve opened
1/26/2011	5:03:57 PM	Recipe started at 5:03 PM
1/26/2011	5:03:57 PM	Helium valve closed
1/26/2011	5:03:57 PM	BCl3 valve closed
1/26/2011	5:03:57 PM	PH3 valve closed
1/26/2011	5:03:57 PM	SiCl4 pre valve closed
1/26/2011	5:03:57 PM	SiCl4 post valve closed
1/26/2011	5:03:57 PM	Main Vac valve closed
1/26/2011	5:03:57 PM	Bypass valve closed
1/26/2011	5:03:57 PM	Bubbler valve closed
1/26/2011	5:03:57 PM	H2 valve opened
1/26/2011	5:03:57 PM	Helium MFC set to  0.000000
1/26/2011	5:03:57 PM	H2 MFC set to  500.000000
1/26/2011	5:03:57 PM	BCl3 MFC set to  0.000000
1/26/2011	5:03:57 PM	PHl3 MFC set to  0.000000
1/26/2011	5:03:57 PM	SiCl4 MFC set to  0.000000
1/26/2011	5:03:57 PM	Bypass solenoid MFC set to  0.000000
1/26/2011	5:03:57 PM	Tube furnace set to 200
1/26/2011	5:05:16 PM	Helium valve closed
1/26/2011	5:05:16 PM	BCl3 valve closed
1/26/2011	5:05:16 PM	PH3 valve closed
1/26/2011	5:05:16 PM	SiCl4 pre valve closed
1/26/2011	5:05:16 PM	SiCl4 post valve closed
1/26/2011	5:05:16 PM	Main Vac valve closed
1/26/2011	5:05:16 PM	Bypass valve closed
1/26/2011	5:05:16 PM	H2 valve opened
1/26/2011	5:05:16 PM	Bubbler valve opened
1/26/2011	5:05:16 PM	Helium MFC set to  0.000000
1/26/2011	5:05:16 PM	H2 MFC set to  400.000000
1/26/2011	5:05:16 PM	BCl3 MFC set to  0.000000
1/26/2011	5:05:16 PM	PHl3 MFC set to  0.000000
1/26/2011	5:05:16 PM	SiCl4 MFC set to  0.000000
1/26/2011	5:05:16 PM	Bypass solenoid MFC set to  0.000000
1/26/2011	5:05:16 PM	Tube furnace set to 1001
1/26/2011	5:26:16 PM	Helium valve closed
1/26/2011	5:26:16 PM	BCl3 valve closed
1/26/2011	5:26:16 PM	PH3 valve closed
1/26/2011	5:26:16 PM	Main Vac valve closed
1/26/2011	5:26:16 PM	Bypass valve closed
1/26/2011	5:26:16 PM	H2 valve opened
1/26/2011	5:26:16 PM	SiCl4 pre valve opened
1/26/2011	5:26:16 PM	SiCl4 post valve opened
1/26/2011	5:26:16 PM	Bubbler valve opened
1/26/2011	5:26:16 PM	Helium MFC set to  0.000000
1/26/2011	5:26:16 PM	H2 MFC set to  500.000000
1/26/2011	5:26:16 PM	BCl3 MFC set to  0.000000
1/26/2011	5:26:16 PM	PHl3 MFC set to  0.000000
1/26/2011	5:26:16 PM	SiCl4 MFC set to  50.000000
1/26/2011	5:26:16 PM	Bypass solenoid MFC set to  0.000000
1/26/2011	5:26:16 PM	Tube furnace set to 1000
1/26/2011	5:26:26 PM	Helium valve closed
1/26/2011	5:26:26 PM	PH3 valve closed
1/26/2011	5:26:26 PM	Main Vac valve closed
1/26/2011	5:26:26 PM	Bypass valve closed
1/26/2011	5:26:26 PM	H2 valve opened
1/26/2011	5:26:26 PM	BCl3 valve opened
1/26/2011	5:26:26 PM	SiCl4 pre valve opened
1/26/2011	5:26:26 PM	SiCl4 post valve opened
1/26/2011	5:26:26 PM	Bubbler valve opened
1/26/2011	5:26:26 PM	Helium MFC set to  0.000000
1/26/2011	5:26:26 PM	H2 MFC set to  500.000000
1/26/2011	5:26:26 PM	BCl3 MFC set to  9.000000
1/26/2011	5:26:26 PM	PHl3 MFC set to  0.000000
1/26/2011	5:26:26 PM	SiCl4 MFC set to  50.000000
1/26/2011	5:26:26 PM	Bypass solenoid MFC set to  0.000000
1/26/2011	5:26:26 PM	Tube furnace set to 1000
1/26/2011	5:44:26 PM	H2 valve closed
1/26/2011	5:44:26 PM	BCl3 valve closed
1/26/2011	5:44:26 PM	PH3 valve closed
1/26/2011	5:44:26 PM	SiCl4 pre valve closed
1/26/2011	5:44:26 PM	SiCl4 post valve closed
1/26/2011	5:44:26 PM	Main Vac valve closed
1/26/2011	5:44:26 PM	Bypass valve closed
1/26/2011	5:44:26 PM	Helium valve opened
1/26/2011	5:44:26 PM	Bubbler valve opened
1/26/2011	5:44:26 PM	Helium MFC set to  500.000000
1/26/2011	5:44:26 PM	H2 MFC set to  0.000000
1/26/2011	5:44:26 PM	BCl3 MFC set to  0.000000
1/26/2011	5:44:26 PM	PHl3 MFC set to  0.000000
1/26/2011	5:44:26 PM	SiCl4 MFC set to  0.000000
1/26/2011	5:44:26 PM	Bypass solenoid MFC set to  0.000000
1/26/2011	5:44:26 PM	Tube furnace set to 0
1/26/2011	6:04:26 PM	Helium valve closed
1/26/2011	6:04:26 PM	H2 valve closed
1/26/2011	6:04:26 PM	BCl3 valve closed
1/26/2011	6:04:26 PM	PH3 valve closed
1/26/2011	6:04:26 PM	SiCl4 pre valve closed
1/26/2011	6:04:26 PM	SiCl4 post valve closed
1/26/2011	6:04:26 PM	Main Vac valve closed
1/26/2011	6:04:26 PM	Bypass valve closed
1/26/2011	6:04:26 PM	Bubbler valve closed
1/26/2011	6:04:26 PM	Helium MFC set to  0.000000
1/26/2011	6:04:26 PM	H2 MFC set to  0.000000
1/26/2011	6:04:26 PM	BCl3 MFC set to  0.000000
1/26/2011	6:04:26 PM	PHl3 MFC set to  0.000000
1/26/2011	6:04:26 PM	SiCl4 MFC set to  0.000000
1/26/2011	6:04:26 PM	Bypass solenoid MFC set to  0.000000
1/26/2011	6:04:27 PM	Tube furnace set to 0
1/26/2011	6:04:27 PM	Run finished at 6:04 PM
1/26/2011	6:31:03 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
1/26/2011	6:31:04 PM	Recipe started at 6:31 PM
1/26/2011	6:31:04 PM	H2 valve closed
1/26/2011	6:31:04 PM	BCl3 valve closed
1/26/2011	6:31:04 PM	PH3 valve closed
1/26/2011	6:31:04 PM	SiCl4 pre valve closed
1/26/2011	6:31:04 PM	SiCl4 post valve closed
1/26/2011	6:31:04 PM	Main Vac valve closed
1/26/2011	6:31:04 PM	Bypass valve closed
1/26/2011	6:31:04 PM	Bubbler valve closed
1/26/2011	6:31:04 PM	Helium valve opened
1/26/2011	6:31:04 PM	Helium MFC set to  500.000000
1/26/2011	6:31:04 PM	H2 MFC set to  0.000000
1/26/2011	6:31:04 PM	BCl3 MFC set to  0.000000
1/26/2011	6:31:04 PM	PHl3 MFC set to  0.000000
1/26/2011	6:31:04 PM	SiCl4 MFC set to  0.000000
1/26/2011	6:31:04 PM	Bypass solenoid MFC set to  0.000000
1/26/2011	6:31:04 PM	Tube furnace set to 0
1/26/2011	6:31:12 PM	Helium valve closed
1/26/2011	6:31:12 PM	H2 valve closed
1/26/2011	6:31:12 PM	BCl3 valve closed
1/26/2011	6:31:12 PM	PH3 valve closed
1/26/2011	6:31:12 PM	SiCl4 pre valve closed
1/26/2011	6:31:12 PM	SiCl4 post valve closed
1/26/2011	6:31:12 PM	Main Vac valve closed
1/26/2011	6:31:12 PM	Bypass valve closed
1/26/2011	6:31:12 PM	Bubbler valve closed
1/26/2011	6:31:12 PM	Helium MFC set to  0.000000
1/26/2011	6:31:12 PM	H2 MFC set to  0.000000
1/26/2011	6:31:12 PM	BCl3 MFC set to  0.000000
1/26/2011	6:31:12 PM	PHl3 MFC set to  0.000000
1/26/2011	6:31:12 PM	SiCl4 MFC set to  0.000000
1/26/2011	6:31:12 PM	Bypass solenoid MFC set to  0.000000
1/26/2011	6:31:12 PM	Tube furnace set to 0
1/26/2011	6:31:13 PM	Run finished at 6:31 PM
1/26/2011	6:31:13 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
1/26/2011	6:36:15 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
1/26/2011	6:36:15 PM	Recipe started at 6:36 PM
1/26/2011	6:36:15 PM	Helium valve closed
1/26/2011	6:36:15 PM	H2 valve closed
1/26/2011	6:36:15 PM	BCl3 valve closed
1/26/2011	6:36:15 PM	PH3 valve closed
1/26/2011	6:36:15 PM	SiCl4 pre valve closed
1/26/2011	6:36:15 PM	SiCl4 post valve closed
1/26/2011	6:36:15 PM	Main Vac valve closed
1/26/2011	6:36:15 PM	Bubbler valve closed
1/26/2011	6:36:15 PM	Bypass valve opened
1/26/2011	6:36:15 PM	Helium MFC set to  0.000000
1/26/2011	6:36:15 PM	H2 MFC set to  0.000000
1/26/2011	6:36:15 PM	BCl3 MFC set to  0.000000
1/26/2011	6:36:15 PM	PHl3 MFC set to  0.000000
1/26/2011	6:36:15 PM	SiCl4 MFC set to  0.000000
1/26/2011	6:36:15 PM	Bypass solenoid MFC set to  0.000000
1/26/2011	6:36:15 PM	Tube furnace set to 0
1/26/2011	6:36:48 PM	Helium valve closed
1/26/2011	6:36:48 PM	H2 valve closed
1/26/2011	6:36:48 PM	BCl3 valve closed
1/26/2011	6:36:48 PM	PH3 valve closed
1/26/2011	6:36:48 PM	SiCl4 pre valve closed
1/26/2011	6:36:48 PM	SiCl4 post valve closed
1/26/2011	6:36:48 PM	Bubbler valve closed
1/26/2011	6:36:48 PM	Main Vac valve opened
1/26/2011	6:36:48 PM	Bypass valve opened
1/26/2011	6:36:48 PM	Helium MFC set to  0.000000
1/26/2011	6:36:48 PM	H2 MFC set to  0.000000
1/26/2011	6:36:48 PM	BCl3 MFC set to  0.000000
1/26/2011	6:36:48 PM	PHl3 MFC set to  0.000000
1/26/2011	6:36:48 PM	SiCl4 MFC set to  0.000000
1/26/2011	6:36:48 PM	Bypass solenoid MFC set to  0.000000
1/26/2011	6:36:48 PM	Tube furnace set to 0
1/26/2011	6:36:48 PM	Run finished at 6:36 PM
1/26/2011	6:36:48 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
1/26/2011	6:37:06 PM	Helium MFC set to  100.000000
1/26/2011	6:37:07 PM	Helium valve opened
1/26/2011	6:37:35 PM	Helium MFC set to  0.000000
1/26/2011	6:37:36 PM	Helium valve closed
1/26/2011	7:40:11 PM	Tube furnace set to 200
1/26/2011	7:40:29 PM	Helium MFC set to  50.000000
1/26/2011	7:40:30 PM	Helium valve opened
1/26/2011	7:40:59 PM	Helium MFC set to  0.000000
1/26/2011	7:41:00 PM	Helium valve closed
1/26/2011	7:42:10 PM	Main Vac valve closed
1/26/2011	7:42:11 PM	Bypass valve closed
1/26/2011	7:42:27 PM	Bypass valve opened
1/26/2011	7:42:28 PM	Main Vac valve opened
1/26/2011	7:43:05 PM	Recipe started at 7:43 PM
1/26/2011	7:43:05 PM	Helium valve closed
1/26/2011	7:43:05 PM	BCl3 valve closed
1/26/2011	7:43:05 PM	PH3 valve closed
1/26/2011	7:43:05 PM	SiCl4 pre valve closed
1/26/2011	7:43:05 PM	SiCl4 post valve closed
1/26/2011	7:43:05 PM	Main Vac valve closed
1/26/2011	7:43:05 PM	Bypass valve closed
1/26/2011	7:43:05 PM	Bubbler valve closed
1/26/2011	7:43:05 PM	H2 valve opened
1/26/2011	7:43:05 PM	Helium MFC set to  0.000000
1/26/2011	7:43:05 PM	H2 MFC set to  500.000000
1/26/2011	7:43:05 PM	BCl3 MFC set to  0.000000
1/26/2011	7:43:05 PM	PHl3 MFC set to  0.000000
1/26/2011	7:43:05 PM	SiCl4 MFC set to  0.000000
1/26/2011	7:43:05 PM	Bypass solenoid MFC set to  0.000000
1/26/2011	7:43:05 PM	Tube furnace set to 200
1/26/2011	7:44:21 PM	Helium valve closed
1/26/2011	7:44:21 PM	BCl3 valve closed
1/26/2011	7:44:21 PM	PH3 valve closed
1/26/2011	7:44:21 PM	SiCl4 pre valve closed
1/26/2011	7:44:21 PM	SiCl4 post valve closed
1/26/2011	7:44:21 PM	Main Vac valve closed
1/26/2011	7:44:21 PM	Bypass valve closed
1/26/2011	7:44:21 PM	H2 valve opened
1/26/2011	7:44:21 PM	Bubbler valve opened
1/26/2011	7:44:21 PM	Helium MFC set to  0.000000
1/26/2011	7:44:21 PM	H2 MFC set to  400.000000
1/26/2011	7:44:21 PM	BCl3 MFC set to  0.000000
1/26/2011	7:44:21 PM	PHl3 MFC set to  0.000000
1/26/2011	7:44:21 PM	SiCl4 MFC set to  0.000000
1/26/2011	7:44:21 PM	Bypass solenoid MFC set to  0.000000
1/26/2011	7:44:22 PM	Tube furnace set to 1001
1/26/2011	8:06:22 PM	Helium valve closed
1/26/2011	8:06:22 PM	PH3 valve closed
1/26/2011	8:06:22 PM	Main Vac valve closed
1/26/2011	8:06:22 PM	Bypass valve closed
1/26/2011	8:06:22 PM	H2 valve opened
1/26/2011	8:06:22 PM	BCl3 valve opened
1/26/2011	8:06:22 PM	SiCl4 pre valve opened
1/26/2011	8:06:22 PM	SiCl4 post valve opened
1/26/2011	8:06:22 PM	Bubbler valve opened
1/26/2011	8:06:22 PM	Helium MFC set to  0.000000
1/26/2011	8:06:22 PM	H2 MFC set to  500.000000
1/26/2011	8:06:22 PM	BCl3 MFC set to  8.000000
1/26/2011	8:06:22 PM	PHl3 MFC set to  0.000000
1/26/2011	8:06:22 PM	SiCl4 MFC set to  50.000000
1/26/2011	8:06:22 PM	Bypass solenoid MFC set to  0.000000
1/26/2011	8:06:22 PM	Tube furnace set to 1000
1/26/2011	8:26:22 PM	Helium valve closed
1/26/2011	8:26:22 PM	BCl3 valve closed
1/26/2011	8:26:22 PM	PH3 valve closed
1/26/2011	8:26:22 PM	SiCl4 pre valve closed
1/26/2011	8:26:22 PM	SiCl4 post valve closed
1/26/2011	8:26:22 PM	Main Vac valve closed
1/26/2011	8:26:22 PM	Bypass valve closed
1/26/2011	8:26:22 PM	H2 valve opened
1/26/2011	8:26:22 PM	Bubbler valve opened
1/26/2011	8:26:22 PM	Helium MFC set to  0.000000
1/26/2011	8:26:22 PM	H2 MFC set to  500.000000
1/26/2011	8:26:22 PM	BCl3 MFC set to  0.000000
1/26/2011	8:26:22 PM	PHl3 MFC set to  0.000000
1/26/2011	8:26:22 PM	SiCl4 MFC set to  0.000000
1/26/2011	8:26:22 PM	Bypass solenoid MFC set to  0.000000
1/26/2011	8:26:22 PM	Tube furnace set to 0
1/26/2011	8:26:42 PM	H2 valve closed
1/26/2011	8:26:42 PM	BCl3 valve closed
1/26/2011	8:26:42 PM	PH3 valve closed
1/26/2011	8:26:42 PM	SiCl4 pre valve closed
1/26/2011	8:26:42 PM	SiCl4 post valve closed
1/26/2011	8:26:42 PM	Main Vac valve closed
1/26/2011	8:26:42 PM	Bypass valve closed
1/26/2011	8:26:42 PM	Helium valve opened
1/26/2011	8:26:42 PM	Bubbler valve opened
1/26/2011	8:26:42 PM	Helium MFC set to  400.000000
1/26/2011	8:26:42 PM	H2 MFC set to  0.000000
1/26/2011	8:26:42 PM	BCl3 MFC set to  0.000000
1/26/2011	8:26:42 PM	PHl3 MFC set to  0.000000
1/26/2011	8:26:42 PM	SiCl4 MFC set to  0.000000
1/26/2011	8:26:42 PM	Bypass solenoid MFC set to  0.000000
1/26/2011	8:26:42 PM	Tube furnace set to 0
1/26/2011	8:46:42 PM	Helium valve closed
1/26/2011	8:46:42 PM	H2 valve closed
1/26/2011	8:46:42 PM	BCl3 valve closed
1/26/2011	8:46:42 PM	PH3 valve closed
1/26/2011	8:46:42 PM	SiCl4 pre valve closed
1/26/2011	8:46:42 PM	SiCl4 post valve closed
1/26/2011	8:46:42 PM	Main Vac valve closed
1/26/2011	8:46:42 PM	Bypass valve closed
1/26/2011	8:46:42 PM	Bubbler valve closed
1/26/2011	8:46:42 PM	Helium MFC set to  0.000000
1/26/2011	8:46:42 PM	H2 MFC set to  0.000000
1/26/2011	8:46:42 PM	BCl3 MFC set to  0.000000
1/26/2011	8:46:42 PM	PHl3 MFC set to  0.000000
1/26/2011	8:46:42 PM	SiCl4 MFC set to  0.000000
1/26/2011	8:46:42 PM	Bypass solenoid MFC set to  0.000000
1/26/2011	8:46:43 PM	Tube furnace set to 0
1/26/2011	8:46:43 PM	Run finished at 8:46 PM
1/26/2011	9:06:23 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
1/26/2011	9:06:24 PM	Recipe started at 9:06 PM
1/26/2011	9:06:24 PM	H2 valve closed
1/26/2011	9:06:24 PM	BCl3 valve closed
1/26/2011	9:06:24 PM	PH3 valve closed
1/26/2011	9:06:24 PM	SiCl4 pre valve closed
1/26/2011	9:06:24 PM	SiCl4 post valve closed
1/26/2011	9:06:24 PM	Main Vac valve closed
1/26/2011	9:06:24 PM	Bypass valve closed
1/26/2011	9:06:24 PM	Bubbler valve closed
1/26/2011	9:06:24 PM	Helium valve opened
1/26/2011	9:06:24 PM	Helium MFC set to  500.000000
1/26/2011	9:06:24 PM	H2 MFC set to  0.000000
1/26/2011	9:06:24 PM	BCl3 MFC set to  0.000000
1/26/2011	9:06:24 PM	PHl3 MFC set to  0.000000
1/26/2011	9:06:24 PM	SiCl4 MFC set to  0.000000
1/26/2011	9:06:24 PM	Bypass solenoid MFC set to  0.000000
1/26/2011	9:06:24 PM	Tube furnace set to 0
1/26/2011	9:06:24 PM	Helium valve closed
1/26/2011	9:06:24 PM	H2 valve closed
1/26/2011	9:06:24 PM	BCl3 valve closed
1/26/2011	9:06:24 PM	PH3 valve closed
1/26/2011	9:06:24 PM	SiCl4 pre valve closed
1/26/2011	9:06:24 PM	SiCl4 post valve closed
1/26/2011	9:06:24 PM	Main Vac valve closed
1/26/2011	9:06:24 PM	Bypass valve closed
1/26/2011	9:06:24 PM	Bubbler valve closed
1/26/2011	9:06:24 PM	Helium MFC set to  0.000000
1/26/2011	9:06:24 PM	H2 MFC set to  0.000000
1/26/2011	9:06:24 PM	BCl3 MFC set to  0.000000
1/26/2011	9:06:24 PM	PHl3 MFC set to  0.000000
1/26/2011	9:06:24 PM	SiCl4 MFC set to  0.000000
1/26/2011	9:06:24 PM	Bypass solenoid MFC set to  0.000000
1/26/2011	9:06:25 PM	Tube furnace set to 0
1/26/2011	9:06:25 PM	Run finished at 9:06 PM
1/26/2011	9:06:25 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
1/26/2011	9:10:29 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\10x_he_purgepump.xml
1/26/2011	9:10:41 PM	Recipe started at 9:10 PM
1/26/2011	9:10:41 PM	Helium valve closed
1/26/2011	9:10:41 PM	H2 valve closed
1/26/2011	9:10:41 PM	BCl3 valve closed
1/26/2011	9:10:41 PM	PH3 valve closed
1/26/2011	9:10:41 PM	SiCl4 pre valve closed
1/26/2011	9:10:41 PM	SiCl4 post valve closed
1/26/2011	9:10:41 PM	Main Vac valve closed
1/26/2011	9:10:41 PM	Bubbler valve closed
1/26/2011	9:10:41 PM	Bypass valve opened
1/26/2011	9:10:41 PM	Helium MFC set to  0.000000
1/26/2011	9:10:41 PM	H2 MFC set to  0.000000
1/26/2011	9:10:41 PM	BCl3 MFC set to  0.000000
1/26/2011	9:10:41 PM	PHl3 MFC set to  0.000000
1/26/2011	9:10:41 PM	SiCl4 MFC set to  0.000000
1/26/2011	9:10:41 PM	Bypass solenoid MFC set to  0.000000
1/26/2011	9:10:41 PM	Tube furnace set to 0
1/26/2011	9:11:12 PM	Helium valve closed
1/26/2011	9:11:12 PM	H2 valve closed
1/26/2011	9:11:12 PM	BCl3 valve closed
1/26/2011	9:11:12 PM	PH3 valve closed
1/26/2011	9:11:12 PM	SiCl4 pre valve closed
1/26/2011	9:11:12 PM	SiCl4 post valve closed
1/26/2011	9:11:12 PM	Bubbler valve closed
1/26/2011	9:11:12 PM	Main Vac valve opened
1/26/2011	9:11:12 PM	Bypass valve opened
1/26/2011	9:11:12 PM	Helium MFC set to  0.000000
1/26/2011	9:11:12 PM	H2 MFC set to  0.000000
1/26/2011	9:11:12 PM	BCl3 MFC set to  0.000000
1/26/2011	9:11:12 PM	PHl3 MFC set to  0.000000
1/26/2011	9:11:12 PM	SiCl4 MFC set to  0.000000
1/26/2011	9:11:12 PM	Bypass solenoid MFC set to  0.000000
1/26/2011	9:11:12 PM	Tube furnace set to 0
1/26/2011	9:12:12 PM	H2 valve closed
1/26/2011	9:12:12 PM	BCl3 valve closed
1/26/2011	9:12:12 PM	PH3 valve closed
1/26/2011	9:12:12 PM	SiCl4 pre valve closed
1/26/2011	9:12:12 PM	SiCl4 post valve closed
1/26/2011	9:12:12 PM	Bubbler valve closed
1/26/2011	9:12:12 PM	Helium valve opened
1/26/2011	9:12:12 PM	Main Vac valve opened
1/26/2011	9:12:12 PM	Bypass valve opened
1/26/2011	9:12:12 PM	Helium MFC set to  100.000000
1/26/2011	9:12:12 PM	H2 MFC set to  0.000000
1/26/2011	9:12:12 PM	BCl3 MFC set to  0.000000
1/26/2011	9:12:12 PM	PHl3 MFC set to  0.000000
1/26/2011	9:12:12 PM	SiCl4 MFC set to  0.000000
1/26/2011	9:12:12 PM	Bypass solenoid MFC set to  0.000000
1/26/2011	9:12:12 PM	Tube furnace set to 0
1/26/2011	9:13:09 PM	Helium valve closed
1/26/2011	9:13:09 PM	H2 valve closed
1/26/2011	9:13:09 PM	BCl3 valve closed
1/26/2011	9:13:09 PM	PH3 valve closed
1/26/2011	9:13:09 PM	SiCl4 pre valve closed
1/26/2011	9:13:09 PM	SiCl4 post valve closed
1/26/2011	9:13:09 PM	Bubbler valve closed
1/26/2011	9:13:09 PM	Main Vac valve opened
1/26/2011	9:13:09 PM	Bypass valve opened
1/26/2011	9:13:09 PM	Helium MFC set to  0.000000
1/26/2011	9:13:09 PM	H2 MFC set to  0.000000
1/26/2011	9:13:09 PM	BCl3 MFC set to  0.000000
1/26/2011	9:13:09 PM	PHl3 MFC set to  0.000000
1/26/2011	9:13:09 PM	SiCl4 MFC set to  0.000000
1/26/2011	9:13:09 PM	Bypass solenoid MFC set to  0.000000
1/26/2011	9:13:09 PM	Tube furnace set to 0
1/26/2011	9:14:09 PM	H2 valve closed
1/26/2011	9:14:09 PM	BCl3 valve closed
1/26/2011	9:14:09 PM	PH3 valve closed
1/26/2011	9:14:09 PM	SiCl4 pre valve closed
1/26/2011	9:14:09 PM	SiCl4 post valve closed
1/26/2011	9:14:09 PM	Bubbler valve closed
1/26/2011	9:14:09 PM	Helium valve opened
1/26/2011	9:14:09 PM	Main Vac valve opened
1/26/2011	9:14:09 PM	Bypass valve opened
1/26/2011	9:14:09 PM	Helium MFC set to  100.000000
1/26/2011	9:14:09 PM	H2 MFC set to  0.000000
1/26/2011	9:14:09 PM	BCl3 MFC set to  0.000000
1/26/2011	9:14:09 PM	PHl3 MFC set to  0.000000
1/26/2011	9:14:09 PM	SiCl4 MFC set to  0.000000
1/26/2011	9:14:09 PM	Bypass solenoid MFC set to  0.000000
1/26/2011	9:14:09 PM	Tube furnace set to 0
1/26/2011	9:15:09 PM	Helium valve closed
1/26/2011	9:15:09 PM	H2 valve closed
1/26/2011	9:15:09 PM	BCl3 valve closed
1/26/2011	9:15:09 PM	PH3 valve closed
1/26/2011	9:15:09 PM	SiCl4 pre valve closed
1/26/2011	9:15:09 PM	SiCl4 post valve closed
1/26/2011	9:15:09 PM	Bubbler valve closed
1/26/2011	9:15:09 PM	Main Vac valve opened
1/26/2011	9:15:09 PM	Bypass valve opened
1/26/2011	9:15:09 PM	Helium MFC set to  0.000000
1/26/2011	9:15:09 PM	H2 MFC set to  0.000000
1/26/2011	9:15:09 PM	BCl3 MFC set to  0.000000
1/26/2011	9:15:09 PM	PHl3 MFC set to  0.000000
1/26/2011	9:15:09 PM	SiCl4 MFC set to  0.000000
1/26/2011	9:15:09 PM	Bypass solenoid MFC set to  0.000000
1/26/2011	9:15:09 PM	Tube furnace set to 0
1/26/2011	9:16:09 PM	H2 valve closed
1/26/2011	9:16:09 PM	BCl3 valve closed
1/26/2011	9:16:09 PM	PH3 valve closed
1/26/2011	9:16:09 PM	SiCl4 pre valve closed
1/26/2011	9:16:09 PM	SiCl4 post valve closed
1/26/2011	9:16:09 PM	Bubbler valve closed
1/26/2011	9:16:09 PM	Helium valve opened
1/26/2011	9:16:09 PM	Main Vac valve opened
1/26/2011	9:16:09 PM	Bypass valve opened
1/26/2011	9:16:09 PM	Helium MFC set to  100.000000
1/26/2011	9:16:09 PM	H2 MFC set to  0.000000
1/26/2011	9:16:09 PM	BCl3 MFC set to  0.000000
1/26/2011	9:16:09 PM	PHl3 MFC set to  0.000000
1/26/2011	9:16:09 PM	SiCl4 MFC set to  0.000000
1/26/2011	9:16:09 PM	Bypass solenoid MFC set to  0.000000
1/26/2011	9:16:10 PM	Tube furnace set to 0
1/26/2011	9:17:10 PM	Helium valve closed
1/26/2011	9:17:10 PM	H2 valve closed
1/26/2011	9:17:10 PM	BCl3 valve closed
1/26/2011	9:17:10 PM	PH3 valve closed
1/26/2011	9:17:10 PM	SiCl4 pre valve closed
1/26/2011	9:17:10 PM	SiCl4 post valve closed
1/26/2011	9:17:10 PM	Bubbler valve closed
1/26/2011	9:17:10 PM	Main Vac valve opened
1/26/2011	9:17:10 PM	Bypass valve opened
1/26/2011	9:17:10 PM	Helium MFC set to  0.000000
1/26/2011	9:17:10 PM	H2 MFC set to  0.000000
1/26/2011	9:17:10 PM	BCl3 MFC set to  0.000000
1/26/2011	9:17:10 PM	PHl3 MFC set to  0.000000
1/26/2011	9:17:10 PM	SiCl4 MFC set to  0.000000
1/26/2011	9:17:10 PM	Bypass solenoid MFC set to  0.000000
1/26/2011	9:17:10 PM	Tube furnace set to 0
1/26/2011	9:18:10 PM	H2 valve closed
1/26/2011	9:18:10 PM	BCl3 valve closed
1/26/2011	9:18:10 PM	PH3 valve closed
1/26/2011	9:18:10 PM	SiCl4 pre valve closed
1/26/2011	9:18:10 PM	SiCl4 post valve closed
1/26/2011	9:18:10 PM	Bubbler valve closed
1/26/2011	9:18:10 PM	Helium valve opened
1/26/2011	9:18:10 PM	Main Vac valve opened
1/26/2011	9:18:10 PM	Bypass valve opened
1/26/2011	9:18:10 PM	Helium MFC set to  100.000000
1/26/2011	9:18:10 PM	H2 MFC set to  0.000000
1/26/2011	9:18:10 PM	BCl3 MFC set to  0.000000
1/26/2011	9:18:10 PM	PHl3 MFC set to  0.000000
1/26/2011	9:18:10 PM	SiCl4 MFC set to  0.000000
1/26/2011	9:18:10 PM	Bypass solenoid MFC set to  0.000000
1/26/2011	9:18:10 PM	Tube furnace set to 0
1/26/2011	9:19:10 PM	Helium valve closed
1/26/2011	9:19:10 PM	H2 valve closed
1/26/2011	9:19:10 PM	BCl3 valve closed
1/26/2011	9:19:10 PM	PH3 valve closed
1/26/2011	9:19:10 PM	SiCl4 pre valve closed
1/26/2011	9:19:10 PM	SiCl4 post valve closed
1/26/2011	9:19:10 PM	Bubbler valve closed
1/26/2011	9:19:10 PM	Main Vac valve opened
1/26/2011	9:19:10 PM	Bypass valve opened
1/26/2011	9:19:10 PM	Helium MFC set to  0.000000
1/26/2011	9:19:10 PM	H2 MFC set to  0.000000
1/26/2011	9:19:10 PM	BCl3 MFC set to  0.000000
1/26/2011	9:19:10 PM	PHl3 MFC set to  0.000000
1/26/2011	9:19:10 PM	SiCl4 MFC set to  0.000000
1/26/2011	9:19:10 PM	Bypass solenoid MFC set to  0.000000
1/26/2011	9:19:10 PM	Tube furnace set to 0
1/26/2011	9:20:10 PM	H2 valve closed
1/26/2011	9:20:10 PM	BCl3 valve closed
1/26/2011	9:20:10 PM	PH3 valve closed
1/26/2011	9:20:10 PM	SiCl4 pre valve closed
1/26/2011	9:20:10 PM	SiCl4 post valve closed
1/26/2011	9:20:10 PM	Bubbler valve closed
1/26/2011	9:20:10 PM	Helium valve opened
1/26/2011	9:20:10 PM	Main Vac valve opened
1/26/2011	9:20:10 PM	Bypass valve opened
1/26/2011	9:20:10 PM	Helium MFC set to  100.000000
1/26/2011	9:20:10 PM	H2 MFC set to  0.000000
1/26/2011	9:20:10 PM	BCl3 MFC set to  0.000000
1/26/2011	9:20:10 PM	PHl3 MFC set to  0.000000
1/26/2011	9:20:10 PM	SiCl4 MFC set to  0.000000
1/26/2011	9:20:10 PM	Bypass solenoid MFC set to  0.000000
1/26/2011	9:20:11 PM	Tube furnace set to 0
1/26/2011	9:21:11 PM	Helium valve closed
1/26/2011	9:21:11 PM	H2 valve closed
1/26/2011	9:21:11 PM	BCl3 valve closed
1/26/2011	9:21:11 PM	PH3 valve closed
1/26/2011	9:21:11 PM	SiCl4 pre valve closed
1/26/2011	9:21:11 PM	SiCl4 post valve closed
1/26/2011	9:21:11 PM	Bubbler valve closed
1/26/2011	9:21:11 PM	Main Vac valve opened
1/26/2011	9:21:11 PM	Bypass valve opened
1/26/2011	9:21:11 PM	Helium MFC set to  0.000000
1/26/2011	9:21:11 PM	H2 MFC set to  0.000000
1/26/2011	9:21:11 PM	BCl3 MFC set to  0.000000
1/26/2011	9:21:11 PM	PHl3 MFC set to  0.000000
1/26/2011	9:21:11 PM	SiCl4 MFC set to  0.000000
1/26/2011	9:21:11 PM	Bypass solenoid MFC set to  0.000000
1/26/2011	9:21:11 PM	Tube furnace set to 0
1/26/2011	9:22:11 PM	H2 valve closed
1/26/2011	9:22:11 PM	BCl3 valve closed
1/26/2011	9:22:11 PM	PH3 valve closed
1/26/2011	9:22:11 PM	SiCl4 pre valve closed
1/26/2011	9:22:11 PM	SiCl4 post valve closed
1/26/2011	9:22:11 PM	Bubbler valve closed
1/26/2011	9:22:11 PM	Helium valve opened
1/26/2011	9:22:11 PM	Main Vac valve opened
1/26/2011	9:22:11 PM	Bypass valve opened
1/26/2011	9:22:11 PM	Helium MFC set to  100.000000
1/26/2011	9:22:11 PM	H2 MFC set to  0.000000
1/26/2011	9:22:11 PM	BCl3 MFC set to  0.000000
1/26/2011	9:22:11 PM	PHl3 MFC set to  0.000000
1/26/2011	9:22:11 PM	SiCl4 MFC set to  0.000000
1/26/2011	9:22:11 PM	Bypass solenoid MFC set to  0.000000
1/26/2011	9:22:11 PM	Tube furnace set to 0
1/26/2011	9:23:11 PM	Helium valve closed
1/26/2011	9:23:11 PM	H2 valve closed
1/26/2011	9:23:11 PM	BCl3 valve closed
1/26/2011	9:23:11 PM	PH3 valve closed
1/26/2011	9:23:11 PM	SiCl4 pre valve closed
1/26/2011	9:23:11 PM	SiCl4 post valve closed
1/26/2011	9:23:11 PM	Bubbler valve closed
1/26/2011	9:23:11 PM	Main Vac valve opened
1/26/2011	9:23:11 PM	Bypass valve opened
1/26/2011	9:23:11 PM	Helium MFC set to  0.000000
1/26/2011	9:23:11 PM	H2 MFC set to  0.000000
1/26/2011	9:23:11 PM	BCl3 MFC set to  0.000000
1/26/2011	9:23:11 PM	PHl3 MFC set to  0.000000
1/26/2011	9:23:11 PM	SiCl4 MFC set to  0.000000
1/26/2011	9:23:11 PM	Bypass solenoid MFC set to  0.000000
1/26/2011	9:23:11 PM	Tube furnace set to 0
1/26/2011	9:24:11 PM	H2 valve closed
1/26/2011	9:24:11 PM	BCl3 valve closed
1/26/2011	9:24:11 PM	PH3 valve closed
1/26/2011	9:24:11 PM	SiCl4 pre valve closed
1/26/2011	9:24:11 PM	SiCl4 post valve closed
1/26/2011	9:24:11 PM	Bubbler valve closed
1/26/2011	9:24:11 PM	Helium valve opened
1/26/2011	9:24:11 PM	Main Vac valve opened
1/26/2011	9:24:11 PM	Bypass valve opened
1/26/2011	9:24:11 PM	Helium MFC set to  100.000000
1/26/2011	9:24:11 PM	H2 MFC set to  0.000000
1/26/2011	9:24:11 PM	BCl3 MFC set to  0.000000
1/26/2011	9:24:11 PM	PHl3 MFC set to  0.000000
1/26/2011	9:24:11 PM	SiCl4 MFC set to  0.000000
1/26/2011	9:24:11 PM	Bypass solenoid MFC set to  0.000000
1/26/2011	9:24:11 PM	Tube furnace set to 0
1/26/2011	9:25:11 PM	Helium valve closed
1/26/2011	9:25:11 PM	H2 valve closed
1/26/2011	9:25:11 PM	BCl3 valve closed
1/26/2011	9:25:11 PM	PH3 valve closed
1/26/2011	9:25:11 PM	SiCl4 pre valve closed
1/26/2011	9:25:11 PM	SiCl4 post valve closed
1/26/2011	9:25:11 PM	Bubbler valve closed
1/26/2011	9:25:11 PM	Main Vac valve opened
1/26/2011	9:25:11 PM	Bypass valve opened
1/26/2011	9:25:11 PM	Helium MFC set to  0.000000
1/26/2011	9:25:11 PM	H2 MFC set to  0.000000
1/26/2011	9:25:11 PM	BCl3 MFC set to  0.000000
1/26/2011	9:25:11 PM	PHl3 MFC set to  0.000000
1/26/2011	9:25:11 PM	SiCl4 MFC set to  0.000000
1/26/2011	9:25:11 PM	Bypass solenoid MFC set to  0.000000
1/26/2011	9:25:12 PM	Tube furnace set to 0
1/26/2011	9:26:12 PM	H2 valve closed
1/26/2011	9:26:12 PM	BCl3 valve closed
1/26/2011	9:26:12 PM	PH3 valve closed
1/26/2011	9:26:12 PM	SiCl4 pre valve closed
1/26/2011	9:26:12 PM	SiCl4 post valve closed
1/26/2011	9:26:12 PM	Bubbler valve closed
1/26/2011	9:26:12 PM	Helium valve opened
1/26/2011	9:26:12 PM	Main Vac valve opened
1/26/2011	9:26:12 PM	Bypass valve opened
1/26/2011	9:26:12 PM	Helium MFC set to  100.000000
1/26/2011	9:26:12 PM	H2 MFC set to  0.000000
1/26/2011	9:26:12 PM	BCl3 MFC set to  0.000000
1/26/2011	9:26:12 PM	PHl3 MFC set to  0.000000
1/26/2011	9:26:12 PM	SiCl4 MFC set to  0.000000
1/26/2011	9:26:12 PM	Bypass solenoid MFC set to  0.000000
1/26/2011	9:26:12 PM	Tube furnace set to 0
1/26/2011	9:26:26 PM	Helium valve closed
1/26/2011	9:26:26 PM	H2 valve closed
1/26/2011	9:26:26 PM	BCl3 valve closed
1/26/2011	9:26:26 PM	PH3 valve closed
1/26/2011	9:26:26 PM	SiCl4 pre valve closed
1/26/2011	9:26:26 PM	SiCl4 post valve closed
1/26/2011	9:26:26 PM	Bubbler valve closed
1/26/2011	9:26:26 PM	Main Vac valve opened
1/26/2011	9:26:26 PM	Bypass valve opened
1/26/2011	9:26:26 PM	Helium MFC set to  0.000000
1/26/2011	9:26:26 PM	H2 MFC set to  0.000000
1/26/2011	9:26:26 PM	BCl3 MFC set to  0.000000
1/26/2011	9:26:26 PM	PHl3 MFC set to  0.000000
1/26/2011	9:26:26 PM	SiCl4 MFC set to  0.000000
1/26/2011	9:26:26 PM	Bypass solenoid MFC set to  0.000000
1/26/2011	9:26:26 PM	Tube furnace set to 0
1/26/2011	9:27:26 PM	H2 valve closed
1/26/2011	9:27:26 PM	BCl3 valve closed
1/26/2011	9:27:26 PM	PH3 valve closed
1/26/2011	9:27:26 PM	SiCl4 pre valve closed
1/26/2011	9:27:26 PM	SiCl4 post valve closed
1/26/2011	9:27:26 PM	Bubbler valve closed
1/26/2011	9:27:26 PM	Helium valve opened
1/26/2011	9:27:26 PM	Main Vac valve opened
1/26/2011	9:27:26 PM	Bypass valve opened
1/26/2011	9:27:26 PM	Helium MFC set to  100.000000
1/26/2011	9:27:26 PM	H2 MFC set to  0.000000
1/26/2011	9:27:26 PM	BCl3 MFC set to  0.000000
1/26/2011	9:27:26 PM	PHl3 MFC set to  0.000000
1/26/2011	9:27:26 PM	SiCl4 MFC set to  0.000000
1/26/2011	9:27:26 PM	Bypass solenoid MFC set to  0.000000
1/26/2011	9:27:26 PM	Tube furnace set to 0
1/26/2011	9:27:42 PM	Helium valve closed
1/26/2011	9:27:42 PM	H2 valve closed
1/26/2011	9:27:42 PM	BCl3 valve closed
1/26/2011	9:27:42 PM	PH3 valve closed
1/26/2011	9:27:42 PM	SiCl4 pre valve closed
1/26/2011	9:27:42 PM	SiCl4 post valve closed
1/26/2011	9:27:42 PM	Bubbler valve closed
1/26/2011	9:27:42 PM	Main Vac valve opened
1/26/2011	9:27:42 PM	Bypass valve opened
1/26/2011	9:27:42 PM	Helium MFC set to  0.000000
1/26/2011	9:27:42 PM	H2 MFC set to  0.000000
1/26/2011	9:27:42 PM	BCl3 MFC set to  0.000000
1/26/2011	9:27:42 PM	PHl3 MFC set to  0.000000
1/26/2011	9:27:42 PM	SiCl4 MFC set to  0.000000
1/26/2011	9:27:42 PM	Bypass solenoid MFC set to  0.000000
1/26/2011	9:27:43 PM	Tube furnace set to 0
1/26/2011	9:28:34 PM	H2 valve closed
1/26/2011	9:28:34 PM	BCl3 valve closed
1/26/2011	9:28:34 PM	PH3 valve closed
1/26/2011	9:28:34 PM	SiCl4 pre valve closed
1/26/2011	9:28:34 PM	SiCl4 post valve closed
1/26/2011	9:28:34 PM	Bubbler valve closed
1/26/2011	9:28:34 PM	Helium valve opened
1/26/2011	9:28:34 PM	Main Vac valve opened
1/26/2011	9:28:34 PM	Bypass valve opened
1/26/2011	9:28:34 PM	Helium MFC set to  100.000000
1/26/2011	9:28:34 PM	H2 MFC set to  0.000000
1/26/2011	9:28:34 PM	BCl3 MFC set to  0.000000
1/26/2011	9:28:34 PM	PHl3 MFC set to  0.000000
1/26/2011	9:28:34 PM	SiCl4 MFC set to  0.000000
1/26/2011	9:28:34 PM	Bypass solenoid MFC set to  0.000000
1/26/2011	9:28:34 PM	Tube furnace set to 0
1/26/2011	9:28:34 PM	Helium valve closed
1/26/2011	9:28:34 PM	H2 valve closed
1/26/2011	9:28:34 PM	BCl3 valve closed
1/26/2011	9:28:34 PM	PH3 valve closed
1/26/2011	9:28:34 PM	SiCl4 pre valve closed
1/26/2011	9:28:34 PM	SiCl4 post valve closed
1/26/2011	9:28:34 PM	Bubbler valve closed
1/26/2011	9:28:34 PM	Main Vac valve opened
1/26/2011	9:28:34 PM	Bypass valve opened
1/26/2011	9:28:34 PM	Helium MFC set to  0.000000
1/26/2011	9:28:34 PM	H2 MFC set to  0.000000
1/26/2011	9:28:34 PM	BCl3 MFC set to  0.000000
1/26/2011	9:28:34 PM	PHl3 MFC set to  0.000000
1/26/2011	9:28:34 PM	SiCl4 MFC set to  0.000000
1/26/2011	9:28:34 PM	Bypass solenoid MFC set to  0.000000
1/26/2011	9:28:35 PM	Tube furnace set to 0
1/26/2011	9:28:36 PM	Run finished at 9:28 PM
1/26/2011	9:28:36 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\10x_he_purgepump.xml
1/26/2011	9:29:26 PM	Main Vac valve closed
1/26/2011	9:29:27 PM	Bypass valve closed
1/26/2011	9:29:38 PM	Bypass valve opened
1/26/2011	9:29:39 PM	Main Vac valve opened
1/26/2011	9:30:08 PM	Recipe started at 9:30 PM
1/26/2011	9:30:08 PM	Helium valve closed
1/26/2011	9:30:08 PM	BCl3 valve closed
1/26/2011	9:30:08 PM	PH3 valve closed
1/26/2011	9:30:08 PM	SiCl4 pre valve closed
1/26/2011	9:30:08 PM	SiCl4 post valve closed
1/26/2011	9:30:08 PM	Main Vac valve closed
1/26/2011	9:30:08 PM	Bypass valve closed
1/26/2011	9:30:08 PM	Bubbler valve closed
1/26/2011	9:30:08 PM	H2 valve opened
1/26/2011	9:30:08 PM	Helium MFC set to  0.000000
1/26/2011	9:30:09 PM	H2 MFC set to  500.000000
1/26/2011	9:30:09 PM	BCl3 MFC set to  0.000000
1/26/2011	9:30:09 PM	PHl3 MFC set to  0.000000
1/26/2011	9:30:09 PM	SiCl4 MFC set to  0.000000
1/26/2011	9:30:09 PM	Bypass solenoid MFC set to  0.000000
1/26/2011	9:30:09 PM	Tube furnace set to 200
1/26/2011	9:31:27 PM	Helium valve closed
1/26/2011	9:31:27 PM	BCl3 valve closed
1/26/2011	9:31:27 PM	PH3 valve closed
1/26/2011	9:31:27 PM	SiCl4 pre valve closed
1/26/2011	9:31:27 PM	SiCl4 post valve closed
1/26/2011	9:31:27 PM	Main Vac valve closed
1/26/2011	9:31:27 PM	Bypass valve closed
1/26/2011	9:31:27 PM	H2 valve opened
1/26/2011	9:31:27 PM	Bubbler valve opened
1/26/2011	9:31:27 PM	Helium MFC set to  0.000000
1/26/2011	9:31:27 PM	H2 MFC set to  400.000000
1/26/2011	9:31:27 PM	BCl3 MFC set to  0.000000
1/26/2011	9:31:27 PM	PHl3 MFC set to  0.000000
1/26/2011	9:31:27 PM	SiCl4 MFC set to  0.000000
1/26/2011	9:31:27 PM	Bypass solenoid MFC set to  0.000000
1/26/2011	9:31:27 PM	Tube furnace set to 1001
1/26/2011	9:53:07 PM	Helium valve closed
1/26/2011	9:53:07 PM	PH3 valve closed
1/26/2011	9:53:07 PM	Main Vac valve closed
1/26/2011	9:53:07 PM	Bypass valve closed
1/26/2011	9:53:07 PM	H2 valve opened
1/26/2011	9:53:07 PM	BCl3 valve opened
1/26/2011	9:53:07 PM	SiCl4 pre valve opened
1/26/2011	9:53:07 PM	SiCl4 post valve opened
1/26/2011	9:53:07 PM	Bubbler valve opened
1/26/2011	9:53:07 PM	Helium MFC set to  0.000000
1/26/2011	9:53:07 PM	H2 MFC set to  500.000000
1/26/2011	9:53:07 PM	BCl3 MFC set to  12.000000
1/26/2011	9:53:07 PM	PHl3 MFC set to  0.000000
1/26/2011	9:53:07 PM	SiCl4 MFC set to  50.000000
1/26/2011	9:53:07 PM	Bypass solenoid MFC set to  0.000000
1/26/2011	9:53:07 PM	Tube furnace set to 1000
1/26/2011	10:11:07 PM	Helium valve closed
1/26/2011	10:11:07 PM	BCl3 valve closed
1/26/2011	10:11:07 PM	PH3 valve closed
1/26/2011	10:11:07 PM	SiCl4 pre valve closed
1/26/2011	10:11:07 PM	SiCl4 post valve closed
1/26/2011	10:11:07 PM	Main Vac valve closed
1/26/2011	10:11:07 PM	Bypass valve closed
1/26/2011	10:11:07 PM	H2 valve opened
1/26/2011	10:11:07 PM	Bubbler valve opened
1/26/2011	10:11:07 PM	Helium MFC set to  0.000000
1/26/2011	10:11:07 PM	H2 MFC set to  500.000000
1/26/2011	10:11:07 PM	BCl3 MFC set to  0.000000
1/26/2011	10:11:07 PM	PHl3 MFC set to  0.000000
1/26/2011	10:11:07 PM	SiCl4 MFC set to  0.000000
1/26/2011	10:11:07 PM	Bypass solenoid MFC set to  0.000000
1/26/2011	10:11:07 PM	Tube furnace set to 0
1/26/2011	10:11:27 PM	H2 valve closed
1/26/2011	10:11:27 PM	BCl3 valve closed
1/26/2011	10:11:27 PM	PH3 valve closed
1/26/2011	10:11:27 PM	SiCl4 pre valve closed
1/26/2011	10:11:27 PM	SiCl4 post valve closed
1/26/2011	10:11:27 PM	Main Vac valve closed
1/26/2011	10:11:27 PM	Bypass valve closed
1/26/2011	10:11:27 PM	Helium valve opened
1/26/2011	10:11:27 PM	Bubbler valve opened
1/26/2011	10:11:27 PM	Helium MFC set to  400.000000
1/26/2011	10:11:27 PM	H2 MFC set to  0.000000
1/26/2011	10:11:27 PM	BCl3 MFC set to  0.000000
1/26/2011	10:11:27 PM	PHl3 MFC set to  0.000000
1/26/2011	10:11:27 PM	SiCl4 MFC set to  0.000000
1/26/2011	10:11:27 PM	Bypass solenoid MFC set to  0.000000
1/26/2011	10:11:27 PM	Tube furnace set to 0
1/26/2011	10:31:27 PM	Helium valve closed
1/26/2011	10:31:27 PM	H2 valve closed
1/26/2011	10:31:27 PM	BCl3 valve closed
1/26/2011	10:31:27 PM	PH3 valve closed
1/26/2011	10:31:27 PM	SiCl4 pre valve closed
1/26/2011	10:31:27 PM	SiCl4 post valve closed
1/26/2011	10:31:27 PM	Main Vac valve closed
1/26/2011	10:31:27 PM	Bypass valve closed
1/26/2011	10:31:27 PM	Bubbler valve closed
1/26/2011	10:31:27 PM	Helium MFC set to  0.000000
1/26/2011	10:31:27 PM	H2 MFC set to  0.000000
1/26/2011	10:31:27 PM	BCl3 MFC set to  0.000000
1/26/2011	10:31:27 PM	PHl3 MFC set to  0.000000
1/26/2011	10:31:27 PM	SiCl4 MFC set to  0.000000
1/26/2011	10:31:27 PM	Bypass solenoid MFC set to  0.000000
1/26/2011	10:31:28 PM	Tube furnace set to 0
1/26/2011	10:31:28 PM	Run finished at 10:31 PM
1/26/2011	10:36:04 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
1/26/2011	10:36:05 PM	Recipe started at 10:36 PM
1/26/2011	10:36:05 PM	Helium valve closed
1/26/2011	10:36:05 PM	H2 valve closed
1/26/2011	10:36:05 PM	BCl3 valve closed
1/26/2011	10:36:05 PM	PH3 valve closed
1/26/2011	10:36:05 PM	SiCl4 pre valve closed
1/26/2011	10:36:05 PM	SiCl4 post valve closed
1/26/2011	10:36:05 PM	Main Vac valve closed
1/26/2011	10:36:05 PM	Bubbler valve closed
1/26/2011	10:36:05 PM	Bypass valve opened
1/26/2011	10:36:05 PM	Helium MFC set to  0.000000
1/26/2011	10:36:05 PM	H2 MFC set to  0.000000
1/26/2011	10:36:05 PM	BCl3 MFC set to  0.000000
1/26/2011	10:36:05 PM	PHl3 MFC set to  0.000000
1/26/2011	10:36:05 PM	SiCl4 MFC set to  0.000000
1/26/2011	10:36:05 PM	Bypass solenoid MFC set to  0.000000
1/26/2011	10:36:05 PM	Tube furnace set to 0
1/26/2011	10:36:36 PM	Helium valve closed
1/26/2011	10:36:36 PM	H2 valve closed
1/26/2011	10:36:36 PM	BCl3 valve closed
1/26/2011	10:36:36 PM	PH3 valve closed
1/26/2011	10:36:36 PM	SiCl4 pre valve closed
1/26/2011	10:36:36 PM	SiCl4 post valve closed
1/26/2011	10:36:36 PM	Bubbler valve closed
1/26/2011	10:36:36 PM	Main Vac valve opened
1/26/2011	10:36:36 PM	Bypass valve opened
1/26/2011	10:36:36 PM	Helium MFC set to  0.000000
1/26/2011	10:36:36 PM	H2 MFC set to  0.000000
1/26/2011	10:36:36 PM	BCl3 MFC set to  0.000000
1/26/2011	10:36:36 PM	PHl3 MFC set to  0.000000
1/26/2011	10:36:36 PM	SiCl4 MFC set to  0.000000
1/26/2011	10:36:36 PM	Bypass solenoid MFC set to  0.000000
1/26/2011	10:36:36 PM	Tube furnace set to 0
1/26/2011	10:36:36 PM	Run finished at 10:36 PM
1/26/2011	10:36:36 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
1/26/2011	10:37:16 PM	Helium MFC set to  100.000000
1/26/2011	10:37:18 PM	Helium valve opened
1/26/2011	10:38:39 PM	Helium MFC set to  0.000000
1/26/2011	10:38:40 PM	Helium valve closed
1/26/2011	10:39:29 PM	Helium MFC set to  100.000000
1/26/2011	10:39:31 PM	Helium valve opened
1/26/2011	10:40:35 PM	Helium MFC set to  0.000000
1/26/2011	10:40:36 PM	Helium valve closed
1/26/2011	10:41:29 PM	Helium MFC set to  50.000000
1/26/2011	10:41:30 PM	Helium valve opened
1/26/2011	10:42:21 PM	Helium MFC set to  0.000000
1/26/2011	10:47:04 PM	Helium MFC set to  100.000000
1/26/2011	10:49:09 PM	Helium MFC set to  0.000000
1/26/2011	10:49:11 PM	Helium valve closed
1/26/2011	10:50:04 PM	Main Vac valve closed
1/26/2011	10:50:06 PM	Bypass valve closed
1/26/2011	10:50:18 PM	Bypass valve opened
1/26/2011	10:50:19 PM	Main Vac valve opened
1/26/2011	10:50:25 PM	Helium MFC set to  100.000000
1/26/2011	10:50:26 PM	Helium valve opened
1/26/2011	10:51:03 PM	Helium MFC set to  0.000000
1/26/2011	10:51:04 PM	Helium valve closed
1/26/2011	10:52:37 PM	Recipe started at 10:52 PM
1/26/2011	10:52:37 PM	Helium valve closed
1/26/2011	10:52:37 PM	BCl3 valve closed
1/26/2011	10:52:37 PM	PH3 valve closed
1/26/2011	10:52:37 PM	SiCl4 pre valve closed
1/26/2011	10:52:37 PM	SiCl4 post valve closed
1/26/2011	10:52:37 PM	Main Vac valve closed
1/26/2011	10:52:37 PM	Bypass valve closed
1/26/2011	10:52:37 PM	Bubbler valve closed
1/26/2011	10:52:37 PM	H2 valve opened
1/26/2011	10:52:37 PM	Helium MFC set to  0.000000
1/26/2011	10:52:37 PM	H2 MFC set to  500.000000
1/26/2011	10:52:37 PM	BCl3 MFC set to  0.000000
1/26/2011	10:52:37 PM	PHl3 MFC set to  0.000000
1/26/2011	10:52:37 PM	SiCl4 MFC set to  0.000000
1/26/2011	10:52:37 PM	Bypass solenoid MFC set to  0.000000
1/26/2011	10:52:37 PM	Tube furnace set to 200
1/26/2011	10:53:55 PM	Helium valve closed
1/26/2011	10:53:55 PM	BCl3 valve closed
1/26/2011	10:53:55 PM	PH3 valve closed
1/26/2011	10:53:55 PM	SiCl4 pre valve closed
1/26/2011	10:53:55 PM	SiCl4 post valve closed
1/26/2011	10:53:55 PM	Main Vac valve closed
1/26/2011	10:53:55 PM	Bypass valve closed
1/26/2011	10:53:55 PM	H2 valve opened
1/26/2011	10:53:55 PM	Bubbler valve opened
1/26/2011	10:53:55 PM	Helium MFC set to  0.000000
1/26/2011	10:53:55 PM	H2 MFC set to  400.000000
1/26/2011	10:53:55 PM	BCl3 MFC set to  0.000000
1/26/2011	10:53:55 PM	PHl3 MFC set to  0.000000
1/26/2011	10:53:55 PM	SiCl4 MFC set to  0.000000
1/26/2011	10:53:55 PM	Bypass solenoid MFC set to  0.000000
1/26/2011	10:53:55 PM	Tube furnace set to 1001
1/26/2011	11:13:55 PM	Helium valve closed
1/26/2011	11:13:55 PM	PH3 valve closed
1/26/2011	11:13:55 PM	Main Vac valve closed
1/26/2011	11:13:55 PM	Bypass valve closed
1/26/2011	11:13:55 PM	H2 valve opened
1/26/2011	11:13:55 PM	BCl3 valve opened
1/26/2011	11:13:55 PM	SiCl4 pre valve opened
1/26/2011	11:13:55 PM	SiCl4 post valve opened
1/26/2011	11:13:55 PM	Bubbler valve opened
1/26/2011	11:13:55 PM	Helium MFC set to  0.000000
1/26/2011	11:13:55 PM	H2 MFC set to  500.000000
1/26/2011	11:13:55 PM	BCl3 MFC set to  12.000000
1/26/2011	11:13:55 PM	PHl3 MFC set to  0.000000
1/26/2011	11:13:55 PM	SiCl4 MFC set to  50.000000
1/26/2011	11:13:55 PM	Bypass solenoid MFC set to  0.000000
1/26/2011	11:13:55 PM	Tube furnace set to 1000
1/26/2011	11:31:55 PM	Helium valve closed
1/26/2011	11:31:55 PM	BCl3 valve closed
1/26/2011	11:31:55 PM	PH3 valve closed
1/26/2011	11:31:55 PM	SiCl4 pre valve closed
1/26/2011	11:31:55 PM	SiCl4 post valve closed
1/26/2011	11:31:55 PM	Main Vac valve closed
1/26/2011	11:31:55 PM	Bypass valve closed
1/26/2011	11:31:55 PM	H2 valve opened
1/26/2011	11:31:55 PM	Bubbler valve opened
1/26/2011	11:31:55 PM	Helium MFC set to  0.000000
1/26/2011	11:31:55 PM	H2 MFC set to  500.000000
1/26/2011	11:31:55 PM	BCl3 MFC set to  0.000000
1/26/2011	11:31:55 PM	PHl3 MFC set to  0.000000
1/26/2011	11:31:55 PM	SiCl4 MFC set to  0.000000
1/26/2011	11:31:55 PM	Bypass solenoid MFC set to  0.000000
1/26/2011	11:31:55 PM	Tube furnace set to 0
1/26/2011	11:32:15 PM	H2 valve closed
1/26/2011	11:32:15 PM	BCl3 valve closed
1/26/2011	11:32:15 PM	PH3 valve closed
1/26/2011	11:32:15 PM	SiCl4 pre valve closed
1/26/2011	11:32:15 PM	SiCl4 post valve closed
1/26/2011	11:32:15 PM	Main Vac valve closed
1/26/2011	11:32:15 PM	Bypass valve closed
1/26/2011	11:32:15 PM	Helium valve opened
1/26/2011	11:32:15 PM	Bubbler valve opened
1/26/2011	11:32:15 PM	Helium MFC set to  400.000000
1/26/2011	11:32:15 PM	H2 MFC set to  0.000000
1/26/2011	11:32:15 PM	BCl3 MFC set to  0.000000
1/26/2011	11:32:15 PM	PHl3 MFC set to  0.000000
1/26/2011	11:32:15 PM	SiCl4 MFC set to  0.000000
1/26/2011	11:32:15 PM	Bypass solenoid MFC set to  0.000000
1/26/2011	11:32:16 PM	Tube furnace set to 0
1/26/2011	11:52:16 PM	Helium valve closed
1/26/2011	11:52:16 PM	H2 valve closed
1/26/2011	11:52:16 PM	BCl3 valve closed
1/26/2011	11:52:16 PM	PH3 valve closed
1/26/2011	11:52:16 PM	SiCl4 pre valve closed
1/26/2011	11:52:16 PM	SiCl4 post valve closed
1/26/2011	11:52:16 PM	Main Vac valve closed
1/26/2011	11:52:16 PM	Bypass valve closed
1/26/2011	11:52:16 PM	Bubbler valve closed
1/26/2011	11:52:16 PM	Helium MFC set to  0.000000
1/26/2011	11:52:16 PM	H2 MFC set to  0.000000
1/26/2011	11:52:16 PM	BCl3 MFC set to  0.000000
1/26/2011	11:52:16 PM	PHl3 MFC set to  0.000000
1/26/2011	11:52:16 PM	SiCl4 MFC set to  0.000000
1/26/2011	11:52:16 PM	Bypass solenoid MFC set to  0.000000
1/26/2011	11:52:16 PM	Tube furnace set to 0
1/26/2011	11:52:16 PM	Run finished at 11:52 PM
1/26/2011	11:54:36 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
1/26/2011	11:54:37 PM	Recipe started at 11:54 PM
1/26/2011	11:54:37 PM	Helium valve closed
1/26/2011	11:54:37 PM	H2 valve closed
1/26/2011	11:54:37 PM	BCl3 valve closed
1/26/2011	11:54:37 PM	PH3 valve closed
1/26/2011	11:54:37 PM	SiCl4 pre valve closed
1/26/2011	11:54:37 PM	SiCl4 post valve closed
1/26/2011	11:54:37 PM	Main Vac valve closed
1/26/2011	11:54:37 PM	Bubbler valve closed
1/26/2011	11:54:37 PM	Bypass valve opened
1/26/2011	11:54:37 PM	Helium MFC set to  0.000000
1/26/2011	11:54:37 PM	H2 MFC set to  0.000000
1/26/2011	11:54:37 PM	BCl3 MFC set to  0.000000
1/26/2011	11:54:37 PM	PHl3 MFC set to  0.000000
1/26/2011	11:54:37 PM	SiCl4 MFC set to  0.000000
1/26/2011	11:54:37 PM	Bypass solenoid MFC set to  0.000000
1/26/2011	11:54:37 PM	Tube furnace set to 0
1/26/2011	11:54:50 PM	Helium valve closed
1/26/2011	11:54:50 PM	H2 valve closed
1/26/2011	11:54:50 PM	BCl3 valve closed
1/26/2011	11:54:50 PM	PH3 valve closed
1/26/2011	11:54:50 PM	SiCl4 pre valve closed
1/26/2011	11:54:50 PM	SiCl4 post valve closed
1/26/2011	11:54:50 PM	Bubbler valve closed
1/26/2011	11:54:50 PM	Main Vac valve opened
1/26/2011	11:54:50 PM	Bypass valve opened
1/26/2011	11:54:50 PM	Helium MFC set to  0.000000
1/26/2011	11:54:50 PM	H2 MFC set to  0.000000
1/26/2011	11:54:50 PM	BCl3 MFC set to  0.000000
1/26/2011	11:54:50 PM	PHl3 MFC set to  0.000000
1/26/2011	11:54:50 PM	SiCl4 MFC set to  0.000000
1/26/2011	11:54:50 PM	Bypass solenoid MFC set to  0.000000
1/26/2011	11:54:50 PM	Tube furnace set to 0
1/26/2011	11:54:50 PM	Run finished at 11:54 PM
1/26/2011	11:54:50 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
